TY  - JOUR
AU  - Petrović, Suzana
AU  - Gaković, Biljana M.
AU  - Peruško, Davor
AU  - Radak, Bojan
AU  - Desai, T.
AU  - Kovač, Janez
AU  - Panjan, Peter
AU  - Trtica, Milan
PY  - 2010
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/3891
AB  - Picosecond (40 ps) pulsed Nd:YAG laser irradiation of a WTi thin film on silicon with a wavelength of 532 nm and a fluence 2.1 J/cm(2) was performed in air. This led to significant changes of the chemical composition and morphology on the surface of the WTi thin film. The results show an increase in surface roughness, due to formation of conical structures, about 50 nm wide in the base, and a very thin oxide layer composed of WO(3) and TiO(2), with a dominant TiO(2) phase at the top, within the depth of about 20 nm. The thickness of the oxide layer was dependent on the number of laser pulses. The samples were analyzed by scanning electron microscopy, atomic force microscopy, and X-ray photoelectron spectroscopy.
T2  - Applied Physics. A: Materials Science and Processing
T1  - Composition and structure modification of a WTi/Si system by short laser pulses
VL  - 98
IS  - 4
SP  - 843
EP  - 847
DO  - 10.1007/s00339-010-5549-8
ER  - 

@article{
author = "Petrović, Suzana and Gaković, Biljana M. and Peruško, Davor and Radak, Bojan and Desai, T. and Kovač, Janez and Panjan, Peter and Trtica, Milan",
year = "2010",
abstract = "Picosecond (40 ps) pulsed Nd:YAG laser irradiation of a WTi thin film on silicon with a wavelength of 532 nm and a fluence 2.1 J/cm(2) was performed in air. This led to significant changes of the chemical composition and morphology on the surface of the WTi thin film. The results show an increase in surface roughness, due to formation of conical structures, about 50 nm wide in the base, and a very thin oxide layer composed of WO(3) and TiO(2), with a dominant TiO(2) phase at the top, within the depth of about 20 nm. The thickness of the oxide layer was dependent on the number of laser pulses. The samples were analyzed by scanning electron microscopy, atomic force microscopy, and X-ray photoelectron spectroscopy.",
journal = "Applied Physics. A: Materials Science and Processing",
title = "Composition and structure modification of a WTi/Si system by short laser pulses",
volume = "98",
number = "4",
pages = "843-847",
doi = "10.1007/s00339-010-5549-8"
}

Petrović, S., Gaković, B. M., Peruško, D., Radak, B., Desai, T., Kovač, J., Panjan, P.,& Trtica, M.. (2010). Composition and structure modification of a WTi/Si system by short laser pulses. in Applied Physics. A: Materials Science and Processing, 98(4), 843-847.
https://doi.org/10.1007/s00339-010-5549-8

Petrović S, Gaković BM, Peruško D, Radak B, Desai T, Kovač J, Panjan P, Trtica M. Composition and structure modification of a WTi/Si system by short laser pulses. in Applied Physics. A: Materials Science and Processing. 2010;98(4):843-847.
doi:10.1007/s00339-010-5549-8 .

Petrović, Suzana, Gaković, Biljana M., Peruško, Davor, Radak, Bojan, Desai, T., Kovač, Janez, Panjan, Peter, Trtica, Milan, "Composition and structure modification of a WTi/Si system by short laser pulses" in Applied Physics. A: Materials Science and Processing, 98, no. 4 (2010):843-847,
https://doi.org/10.1007/s00339-010-5549-8 . .