TY  - JOUR
AU  - Petrović, Suzana
AU  - Tsibidis, George D.
AU  - Kovačević, Aleksander
AU  - Božinović, Nevena
AU  - Peruško, Davor
AU  - Mimidis, Alexandros
AU  - Manousaki, Alexandra
AU  - Stratakis, Emmanuel
PY  - 2021
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/10079
AB  - The experimental study of the static and dynamic femtosecond laser ablation of the multilayer 15x(Ti/Zr)/Si system is reported. The layer-by-layer selective laser ablation mechanism was studied by analysis of the surface morphology and elemental composition in static single pulse irradiation in a range of pulse energy from 10 to 17 $$\upmu $$J. The selective ablations, as number of concentric circles in modified spots are increased with the pulse energy. The boundary between the circles was shown a change in the depth, comparable to the thickness of the individual layers. Changes in the elemental composition at the edges are associated with the removal of the layer by layer. The dynamic multipulse irradiation was observed via the production of lines with laser-induced periodic surface structures (LIPSS) at different laser parameters (scan velocities and laser polarization). The spatial periodicity of the formed LIPSS depends on changes in the effective number of pulses and laser polarization, as well as the nature of the material. For better interpretation of the experimental results, simulations have been conducted to explore the thermal response of the multiple layered structure 15x(Ti/Zr) after static single pulse irradiation.
T2  - European Physical Journal D. Atoms, Molecules, Clusters and Optical Physics
T1  - Effects of static and dynamic femtosecond laser modifications of Ti/Zr multilayer thin films
VL  - 75
IS  - 12
SP  - 304
DO  - 10.1140/epjd/s10053-021-00291-5
ER  - 

@article{
author = "Petrović, Suzana and Tsibidis, George D. and Kovačević, Aleksander and Božinović, Nevena and Peruško, Davor and Mimidis, Alexandros and Manousaki, Alexandra and Stratakis, Emmanuel",
year = "2021",
abstract = "The experimental study of the static and dynamic femtosecond laser ablation of the multilayer 15x(Ti/Zr)/Si system is reported. The layer-by-layer selective laser ablation mechanism was studied by analysis of the surface morphology and elemental composition in static single pulse irradiation in a range of pulse energy from 10 to 17 $$\upmu $$J. The selective ablations, as number of concentric circles in modified spots are increased with the pulse energy. The boundary between the circles was shown a change in the depth, comparable to the thickness of the individual layers. Changes in the elemental composition at the edges are associated with the removal of the layer by layer. The dynamic multipulse irradiation was observed via the production of lines with laser-induced periodic surface structures (LIPSS) at different laser parameters (scan velocities and laser polarization). The spatial periodicity of the formed LIPSS depends on changes in the effective number of pulses and laser polarization, as well as the nature of the material. For better interpretation of the experimental results, simulations have been conducted to explore the thermal response of the multiple layered structure 15x(Ti/Zr) after static single pulse irradiation.",
journal = "European Physical Journal D. Atoms, Molecules, Clusters and Optical Physics",
title = "Effects of static and dynamic femtosecond laser modifications of Ti/Zr multilayer thin films",
volume = "75",
number = "12",
pages = "304",
doi = "10.1140/epjd/s10053-021-00291-5"
}

Petrović, S., Tsibidis, G. D., Kovačević, A., Božinović, N., Peruško, D., Mimidis, A., Manousaki, A.,& Stratakis, E.. (2021). Effects of static and dynamic femtosecond laser modifications of Ti/Zr multilayer thin films. in European Physical Journal D. Atoms, Molecules, Clusters and Optical Physics, 75(12), 304.
https://doi.org/10.1140/epjd/s10053-021-00291-5

Petrović S, Tsibidis GD, Kovačević A, Božinović N, Peruško D, Mimidis A, Manousaki A, Stratakis E. Effects of static and dynamic femtosecond laser modifications of Ti/Zr multilayer thin films. in European Physical Journal D. Atoms, Molecules, Clusters and Optical Physics. 2021;75(12):304.
doi:10.1140/epjd/s10053-021-00291-5 .

Petrović, Suzana, Tsibidis, George D., Kovačević, Aleksander, Božinović, Nevena, Peruško, Davor, Mimidis, Alexandros, Manousaki, Alexandra, Stratakis, Emmanuel, "Effects of static and dynamic femtosecond laser modifications of Ti/Zr multilayer thin films" in European Physical Journal D. Atoms, Molecules, Clusters and Optical Physics, 75, no. 12 (2021):304,
https://doi.org/10.1140/epjd/s10053-021-00291-5 . .