TY  - JOUR
AU  - Popović, Maja
AU  - Novaković, Mirjana M.
AU  - Vaňa, Dušan
AU  - Ronning, Carsten
AU  - Jugović, Dragana
AU  - Rajić, Vladimir
AU  - Noga, Pavol
PY  - 2023
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/10746
AB  - Titanium nitride (TiN) is an attractive alternative for modern and future photonic applications, as its optical properties can be engineered over a wide spectral range. In this study, we have used sequential implantation of gold and silver ions with varying ion fluence, as well as subsequent annealing, in order to modify the optical and plasmonic properties of TiN thin films and correlated this to their structural properties. Our investigations show that the columnar structure of the TiN films is partially destroyed upon implantation, but metallic Au and Ag nanoparticles are formed. The irradiation further induces a reduction of the lattice constant as well as changes the TiN stoichiometry and grain size. From the optical point of view, the implanted films possess less metallicity with increasing Ag fluence and losses several times lower than the as-deposited film, which can be correlated with the deficiency of nitrogen and additional defects. Subsequent annealing partially recovered the destroyed columnar structure, and the films become more metallic where the optical losses are much smaller in comparison to the as-implanted situation, being comparable to those of pure Au and Ag. In this way, by varying the implantation fluence of silver ions properly while keeping the gold fluence constant, we were able to optimize experimental parameters in such a way to ensure the formation of TiN with desirable optical performances.
T2  - Optical Materials
T1  - Structure-dependent optical properties of Au/Ag irradiated TiN thin films
VL  - 138
SP  - 113684
DO  - 10.1016/j.optmat.2023.113684
UR  - https://hdl.handle.net/21.15107/rcub_dais_14289
ER  - 

@article{
author = "Popović, Maja and Novaković, Mirjana M. and Vaňa, Dušan and Ronning, Carsten and Jugović, Dragana and Rajić, Vladimir and Noga, Pavol",
year = "2023",
abstract = "Titanium nitride (TiN) is an attractive alternative for modern and future photonic applications, as its optical properties can be engineered over a wide spectral range. In this study, we have used sequential implantation of gold and silver ions with varying ion fluence, as well as subsequent annealing, in order to modify the optical and plasmonic properties of TiN thin films and correlated this to their structural properties. Our investigations show that the columnar structure of the TiN films is partially destroyed upon implantation, but metallic Au and Ag nanoparticles are formed. The irradiation further induces a reduction of the lattice constant as well as changes the TiN stoichiometry and grain size. From the optical point of view, the implanted films possess less metallicity with increasing Ag fluence and losses several times lower than the as-deposited film, which can be correlated with the deficiency of nitrogen and additional defects. Subsequent annealing partially recovered the destroyed columnar structure, and the films become more metallic where the optical losses are much smaller in comparison to the as-implanted situation, being comparable to those of pure Au and Ag. In this way, by varying the implantation fluence of silver ions properly while keeping the gold fluence constant, we were able to optimize experimental parameters in such a way to ensure the formation of TiN with desirable optical performances.",
journal = "Optical Materials",
title = "Structure-dependent optical properties of Au/Ag irradiated TiN thin films",
volume = "138",
pages = "113684",
doi = "10.1016/j.optmat.2023.113684",
url = "https://hdl.handle.net/21.15107/rcub_dais_14289"
}

Popović, M., Novaković, M. M., Vaňa, D., Ronning, C., Jugović, D., Rajić, V.,& Noga, P.. (2023). Structure-dependent optical properties of Au/Ag irradiated TiN thin films. in Optical Materials, 138, 113684.
https://doi.org/10.1016/j.optmat.2023.113684
https://hdl.handle.net/21.15107/rcub_dais_14289

Popović M, Novaković MM, Vaňa D, Ronning C, Jugović D, Rajić V, Noga P. Structure-dependent optical properties of Au/Ag irradiated TiN thin films. in Optical Materials. 2023;138:113684.
doi:10.1016/j.optmat.2023.113684
https://hdl.handle.net/21.15107/rcub_dais_14289 .

Popović, Maja, Novaković, Mirjana M., Vaňa, Dušan, Ronning, Carsten, Jugović, Dragana, Rajić, Vladimir, Noga, Pavol, "Structure-dependent optical properties of Au/Ag irradiated TiN thin films" in Optical Materials, 138 (2023):113684,
https://doi.org/10.1016/j.optmat.2023.113684 .,
https://hdl.handle.net/21.15107/rcub_dais_14289 .

TY  - JOUR
AU  - Novaković, Mirjana M.
AU  - Popović, Maja
AU  - Noga, Pavol
AU  - Vaňa, Dušan
AU  - Rakočević, Zlatko Lj.
PY  - 2020
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/8929
AB  - Au-Ag alloy nanoparticles were formed into amorphous silicon by sequential ion implantation of Au and Ag. Monocrystalline Si was amorphized at the initial moment of implantation with 1 × 1016 ions/cm2 gold ions, and then different silver fluences were applied in the range of 1 × 1016–1 × 1017 ions/cm2. After implantations the samples were investigated by means of Rutherford backscattering spectrometry and transmission electron microscopy. The nanoparticles were found to be formed at surface and sub-surface regions of the Si substrate, at depths corresponding to the maximum distribution of Au and Ag ions. The particles are crystalline in nature with sizes from 2 nm to 30 nm in diameter, increasing with silver ion fluence. Although the lattice constants of gold and silver are too close to be distinguished by measuring the characteristic interplanar spacings, imaging in scanning transmission mode confirms the formation of Au-Ag bimetallic nanoparticles, presenting a solid-solution alloy of gold and silver.
T2  - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
T1  - Formation of Au-Ag alloy nanoparticles in amorphous silicon using sequential ion implantation
VL  - 471
SP  - 33
EP  - 41
DO  - 10.1016/j.nimb.2020.03.021
ER  - 

@article{
author = "Novaković, Mirjana M. and Popović, Maja and Noga, Pavol and Vaňa, Dušan and Rakočević, Zlatko Lj.",
year = "2020",
abstract = "Au-Ag alloy nanoparticles were formed into amorphous silicon by sequential ion implantation of Au and Ag. Monocrystalline Si was amorphized at the initial moment of implantation with 1 × 1016 ions/cm2 gold ions, and then different silver fluences were applied in the range of 1 × 1016–1 × 1017 ions/cm2. After implantations the samples were investigated by means of Rutherford backscattering spectrometry and transmission electron microscopy. The nanoparticles were found to be formed at surface and sub-surface regions of the Si substrate, at depths corresponding to the maximum distribution of Au and Ag ions. The particles are crystalline in nature with sizes from 2 nm to 30 nm in diameter, increasing with silver ion fluence. Although the lattice constants of gold and silver are too close to be distinguished by measuring the characteristic interplanar spacings, imaging in scanning transmission mode confirms the formation of Au-Ag bimetallic nanoparticles, presenting a solid-solution alloy of gold and silver.",
journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
title = "Formation of Au-Ag alloy nanoparticles in amorphous silicon using sequential ion implantation",
volume = "471",
pages = "33-41",
doi = "10.1016/j.nimb.2020.03.021"
}

Novaković, M. M., Popović, M., Noga, P., Vaňa, D.,& Rakočević, Z. Lj.. (2020). Formation of Au-Ag alloy nanoparticles in amorphous silicon using sequential ion implantation. in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 471, 33-41.
https://doi.org/10.1016/j.nimb.2020.03.021

Novaković MM, Popović M, Noga P, Vaňa D, Rakočević ZL. Formation of Au-Ag alloy nanoparticles in amorphous silicon using sequential ion implantation. in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2020;471:33-41.
doi:10.1016/j.nimb.2020.03.021 .

Novaković, Mirjana M., Popović, Maja, Noga, Pavol, Vaňa, Dušan, Rakočević, Zlatko Lj., "Formation of Au-Ag alloy nanoparticles in amorphous silicon using sequential ion implantation" in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 471 (2020):33-41,
https://doi.org/10.1016/j.nimb.2020.03.021 . .

TY  - JOUR
AU  - Popović, Maja
AU  - Novaković, Mirjana M.
AU  - Noga, Pavol
AU  - Vaňa, Dušan
AU  - Rakočević, Zlatko Lj.
PY  - 2020
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/9589
AB  - Formation of Au-Ag alloy nanoparticles in TiN thin films is demonstrated through sequential implantation of Au and Ag ions. The irradiations were done with 200 keV Au ions at fluence of 1.0 × 1016 ions/cm2 and 150 keV Ag ions to the fluences in the range of 0.7–1.3 × 1017 ions/cm2. It was found that irradiations introduce around 1.5 at.% of gold and up to ~20 at.% of silver species causing also the significant sputtering of the surface. TiN surface besides the topographic undergoes chemical changes. The presence of silver and gold is confirmed by photoemission spectroscopy showing that the implanted ions did not form any kind of compound with the surrounding matrix. Electron microscopy evidenced the formation of crystalline and quasi-spherical particles with dimensions below 10 nm. Elemental analysis revealed that the obtained nanoparticles present Au-Ag alloys, with two elements mixed over the whole volume of the particles in different Au:Ag ratios. © 2020 Elsevier B.V.
T2  - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
T1  - Ion beam synthesis of Au-Ag alloy nanoparticles in TiN thin films
VL  - 475
SP  - 20
EP  - 27
DO  - 10.1016/j.nimb.2020.04.032
ER  - 

@article{
author = "Popović, Maja and Novaković, Mirjana M. and Noga, Pavol and Vaňa, Dušan and Rakočević, Zlatko Lj.",
year = "2020",
abstract = "Formation of Au-Ag alloy nanoparticles in TiN thin films is demonstrated through sequential implantation of Au and Ag ions. The irradiations were done with 200 keV Au ions at fluence of 1.0 × 1016 ions/cm2 and 150 keV Ag ions to the fluences in the range of 0.7–1.3 × 1017 ions/cm2. It was found that irradiations introduce around 1.5 at.% of gold and up to ~20 at.% of silver species causing also the significant sputtering of the surface. TiN surface besides the topographic undergoes chemical changes. The presence of silver and gold is confirmed by photoemission spectroscopy showing that the implanted ions did not form any kind of compound with the surrounding matrix. Electron microscopy evidenced the formation of crystalline and quasi-spherical particles with dimensions below 10 nm. Elemental analysis revealed that the obtained nanoparticles present Au-Ag alloys, with two elements mixed over the whole volume of the particles in different Au:Ag ratios. © 2020 Elsevier B.V.",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
title = "Ion beam synthesis of Au-Ag alloy nanoparticles in TiN thin films",
volume = "475",
pages = "20-27",
doi = "10.1016/j.nimb.2020.04.032"
}

Popović, M., Novaković, M. M., Noga, P., Vaňa, D.,& Rakočević, Z. Lj.. (2020). Ion beam synthesis of Au-Ag alloy nanoparticles in TiN thin films. in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 475, 20-27.
https://doi.org/10.1016/j.nimb.2020.04.032

Popović M, Novaković MM, Noga P, Vaňa D, Rakočević ZL. Ion beam synthesis of Au-Ag alloy nanoparticles in TiN thin films. in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2020;475:20-27.
doi:10.1016/j.nimb.2020.04.032 .

Popović, Maja, Novaković, Mirjana M., Noga, Pavol, Vaňa, Dušan, Rakočević, Zlatko Lj., "Ion beam synthesis of Au-Ag alloy nanoparticles in TiN thin films" in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 475 (2020):20-27,
https://doi.org/10.1016/j.nimb.2020.04.032 . .