TY  - CONF
AU  - Salatić, Branislav
AU  - Petrović, Suzana
AU  - Bogdanović-Radović, Iva
AU  - Čekada, M.
AU  - Panjan, P.
AU  - Pantelić, D.
AU  - Jelenković, B.
AU  - Peruško, Davor
PY  - 2017
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/10944
AB  - Metallic thin films, based on nickel (Ni) and palladium (Pd)are promising material for a wide range of application, as catalytic components [1], optical devices [2], photovoltaic gas sensors [3], dye sensitized solar cells [4], and especially for environmental purposes [5]. The potential of nanosecond laser micro-processing for surface modification of nickel-palladium (Ni/Pd) multilayer thin film deposited on n-type (100) silicon wafer was studied. The multilayer structure composed of five bilayer (Pd/Ni) was deposited by d.c.sputtering from a pure Ni and Pd targets, using Ar ions, to a total thickness of about 180 nm. These multilayer thin films were then exposed to various number of pulses of Er:Glass laser, operating at 1540 nm wavelength with pulse duration of 44 ns. Multi-pulse laser irradiations were done at an incidence angle of 90 in an ambient air environment. The changes of the composition and surface morphology in the 5x(Pd/Ni)/Si system were monitored by Particle Induced X-Ray Emission (PIXE), by Rutherford backscattering spectrometry (RBS), by scanning electron microscopy (SEM) and by profilometry. The main part of the absorbed laser energy was rapidly transformed into heat, producing intensive modifications of composition and morphology on the multilayer surface. The results show an increase in surface roughness, formation of a specific surface topography, appearance of hydrodynamic features and ablation of surface material without shallow or deep crater like characteristics. RBS analysis revealed that laser modification was induced intermixing between the individual Ni and Pd layers, but also with silicon substrate. During the laser processing of 5x(Pd/Ni)/Si system delivered energy was probably sufficient to cause solid-state reactions, the formation of intermetallic compounds and silicides with Ni and Pd. An interesting finding is the 5x(Pd/Ni)/Si thin film has undergone some changes in the chemical composition and structure in the irradiated areas, indicating better crystallinity with an increase of the number of applied pulses.
PB  - Belgrade : Institute of Physics Belgrade
C3  - PHOTONICA2017 : 6th International School and Conference on Photonics and COST actions: MP1406 and MP1402 : Program and the book of abstracts
T1  - Laser ablation of nickel/palladium multilayer thin films by nanosecond pulses
SP  - 173
UR  - https://hdl.handle.net/21.15107/rcub_vinar_10944
ER  - 

@conference{
author = "Salatić, Branislav and Petrović, Suzana and Bogdanović-Radović, Iva and Čekada, M. and Panjan, P. and Pantelić, D. and Jelenković, B. and Peruško, Davor",
year = "2017",
abstract = "Metallic thin films, based on nickel (Ni) and palladium (Pd)are promising material for a wide range of application, as catalytic components [1], optical devices [2], photovoltaic gas sensors [3], dye sensitized solar cells [4], and especially for environmental purposes [5]. The potential of nanosecond laser micro-processing for surface modification of nickel-palladium (Ni/Pd) multilayer thin film deposited on n-type (100) silicon wafer was studied. The multilayer structure composed of five bilayer (Pd/Ni) was deposited by d.c.sputtering from a pure Ni and Pd targets, using Ar ions, to a total thickness of about 180 nm. These multilayer thin films were then exposed to various number of pulses of Er:Glass laser, operating at 1540 nm wavelength with pulse duration of 44 ns. Multi-pulse laser irradiations were done at an incidence angle of 90 in an ambient air environment. The changes of the composition and surface morphology in the 5x(Pd/Ni)/Si system were monitored by Particle Induced X-Ray Emission (PIXE), by Rutherford backscattering spectrometry (RBS), by scanning electron microscopy (SEM) and by profilometry. The main part of the absorbed laser energy was rapidly transformed into heat, producing intensive modifications of composition and morphology on the multilayer surface. The results show an increase in surface roughness, formation of a specific surface topography, appearance of hydrodynamic features and ablation of surface material without shallow or deep crater like characteristics. RBS analysis revealed that laser modification was induced intermixing between the individual Ni and Pd layers, but also with silicon substrate. During the laser processing of 5x(Pd/Ni)/Si system delivered energy was probably sufficient to cause solid-state reactions, the formation of intermetallic compounds and silicides with Ni and Pd. An interesting finding is the 5x(Pd/Ni)/Si thin film has undergone some changes in the chemical composition and structure in the irradiated areas, indicating better crystallinity with an increase of the number of applied pulses.",
publisher = "Belgrade : Institute of Physics Belgrade",
journal = "PHOTONICA2017 : 6th International School and Conference on Photonics and COST actions: MP1406 and MP1402 : Program and the book of abstracts",
title = "Laser ablation of nickel/palladium multilayer thin films by nanosecond pulses",
pages = "173",
url = "https://hdl.handle.net/21.15107/rcub_vinar_10944"
}

Salatić, B., Petrović, S., Bogdanović-Radović, I., Čekada, M., Panjan, P., Pantelić, D., Jelenković, B.,& Peruško, D.. (2017). Laser ablation of nickel/palladium multilayer thin films by nanosecond pulses. in PHOTONICA2017 : 6th International School and Conference on Photonics and COST actions: MP1406 and MP1402 : Program and the book of abstracts
Belgrade : Institute of Physics Belgrade., 173.
https://hdl.handle.net/21.15107/rcub_vinar_10944

Salatić B, Petrović S, Bogdanović-Radović I, Čekada M, Panjan P, Pantelić D, Jelenković B, Peruško D. Laser ablation of nickel/palladium multilayer thin films by nanosecond pulses. in PHOTONICA2017 : 6th International School and Conference on Photonics and COST actions: MP1406 and MP1402 : Program and the book of abstracts. 2017;:173.
https://hdl.handle.net/21.15107/rcub_vinar_10944 .

Salatić, Branislav, Petrović, Suzana, Bogdanović-Radović, Iva, Čekada, M., Panjan, P., Pantelić, D., Jelenković, B., Peruško, Davor, "Laser ablation of nickel/palladium multilayer thin films by nanosecond pulses" in PHOTONICA2017 : 6th International School and Conference on Photonics and COST actions: MP1406 and MP1402 : Program and the book of abstracts (2017):173,
https://hdl.handle.net/21.15107/rcub_vinar_10944 .

TY  - CONF
AU  - Petrović, Suzana
AU  - Gaković, Biljana M.
AU  - Peruško, Davor
AU  - Trtica, Milan
AU  - Jelenković, B.
AU  - Stratakis, E.
PY  - 2012
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/12469
AB  - In this work we reported the effects of femtosecond laser on the morphology and structure of WTi thin film (thickness of ~190 nm) deposited on single crystal Si(100) wafer. Irradiation was performed in air by linearly polarized and focused femtosecond laser beam. The main characteristics of used laser system: pulse duration 40 fs, pulse repetition rate 1 kHz, wavelength 800 nm. The sample surface was irradiated using maximum energy of 7 μJ per pulse. The results demonstrate the possibility of laser induced periodical surface structures (LIPSS) formation on the thin film surface and on the Si substrate.
PB  - Minsk : National Academy of Sciences of Belarus; B.I. Stepanov Institute of Physics
C3  - IX Belarusian-Serbian Symposium "Physics and Diagnostics of Laboratory and Astrophysical Plasmas" (РDР-9) : Proceedings
T1  - Morphology of WTi thin film processing by femtosecond laser
SP  - 79
EP  - 82
UR  - https://hdl.handle.net/21.15107/rcub_vinar_12469
ER  - 

@conference{
author = "Petrović, Suzana and Gaković, Biljana M. and Peruško, Davor and Trtica, Milan and Jelenković, B. and Stratakis, E.",
year = "2012",
abstract = "In this work we reported the effects of femtosecond laser on the morphology and structure of WTi thin film (thickness of ~190 nm) deposited on single crystal Si(100) wafer. Irradiation was performed in air by linearly polarized and focused femtosecond laser beam. The main characteristics of used laser system: pulse duration 40 fs, pulse repetition rate 1 kHz, wavelength 800 nm. The sample surface was irradiated using maximum energy of 7 μJ per pulse. The results demonstrate the possibility of laser induced periodical surface structures (LIPSS) formation on the thin film surface and on the Si substrate.",
publisher = "Minsk : National Academy of Sciences of Belarus; B.I. Stepanov Institute of Physics",
journal = "IX Belarusian-Serbian Symposium "Physics and Diagnostics of Laboratory and Astrophysical Plasmas" (РDР-9) : Proceedings",
title = "Morphology of WTi thin film processing by femtosecond laser",
pages = "79-82",
url = "https://hdl.handle.net/21.15107/rcub_vinar_12469"
}

Petrović, S., Gaković, B. M., Peruško, D., Trtica, M., Jelenković, B.,& Stratakis, E.. (2012). Morphology of WTi thin film processing by femtosecond laser. in IX Belarusian-Serbian Symposium "Physics and Diagnostics of Laboratory and Astrophysical Plasmas" (РDР-9) : Proceedings
Minsk : National Academy of Sciences of Belarus; B.I. Stepanov Institute of Physics., 79-82.
https://hdl.handle.net/21.15107/rcub_vinar_12469

Petrović S, Gaković BM, Peruško D, Trtica M, Jelenković B, Stratakis E. Morphology of WTi thin film processing by femtosecond laser. in IX Belarusian-Serbian Symposium "Physics and Diagnostics of Laboratory and Astrophysical Plasmas" (РDР-9) : Proceedings. 2012;:79-82.
https://hdl.handle.net/21.15107/rcub_vinar_12469 .

Petrović, Suzana, Gaković, Biljana M., Peruško, Davor, Trtica, Milan, Jelenković, B., Stratakis, E., "Morphology of WTi thin film processing by femtosecond laser" in IX Belarusian-Serbian Symposium "Physics and Diagnostics of Laboratory and Astrophysical Plasmas" (РDР-9) : Proceedings (2012):79-82,
https://hdl.handle.net/21.15107/rcub_vinar_12469 .