TY  - JOUR
AU  - Kokkoris, Michael
AU  - Kossionides, S
AU  - Vlastou, R.
AU  - Aslanoglou, X.A.
AU  - Grotzschel, Rainer
AU  - Nsouli, Bilal
AU  - Kuznetsov, Andrej Yu
AU  - Petrović, Srđan M.
AU  - Paradellis, T.
PY  - 2001
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/2476
AB  - Energy spectra of protons channeling along the (0001) axis of several SiC polytype crystals (namely 4H, 6H, 15R, 21R) in the energy region E-p = 1.7-2.5 MeV, in the backscattering geometry, were taken and analyzed. Computer simulations based on the assumption that the dechanneling of protons follows an exponential law are in very good agreement with the measured spectra. The obtained results for the two crucial channeling parameters, gimel, the mean channeling distance, and, alpha, the ratio of the stopping powers in the aligned and random mode are compared for the different structures and an attempt is made to explain the occurring similarities as well as the differences, in order to evaluate the use of SiC polytypes as substrates in implantations and thin film depositions. An attempt is also made to correlate the results from the present work to the ones obtained in the past for simpler crystallographic structures, namely Si(100) and Si(111), as well as more complex ones, such as SiO2 (c-axis).
T2  - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
T1  - Determination of parameters for channeling of protons in SiC polytype crystals in the backscattering geometry
VL  - 184
IS  - 3
SP  - 319
EP  - 326
DO  - 10.1016/S0168-583X(01)00727-3
ER  - 

@article{
author = "Kokkoris, Michael and Kossionides, S and Vlastou, R. and Aslanoglou, X.A. and Grotzschel, Rainer and Nsouli, Bilal and Kuznetsov, Andrej Yu and Petrović, Srđan M. and Paradellis, T.",
year = "2001",
abstract = "Energy spectra of protons channeling along the (0001) axis of several SiC polytype crystals (namely 4H, 6H, 15R, 21R) in the energy region E-p = 1.7-2.5 MeV, in the backscattering geometry, were taken and analyzed. Computer simulations based on the assumption that the dechanneling of protons follows an exponential law are in very good agreement with the measured spectra. The obtained results for the two crucial channeling parameters, gimel, the mean channeling distance, and, alpha, the ratio of the stopping powers in the aligned and random mode are compared for the different structures and an attempt is made to explain the occurring similarities as well as the differences, in order to evaluate the use of SiC polytypes as substrates in implantations and thin film depositions. An attempt is also made to correlate the results from the present work to the ones obtained in the past for simpler crystallographic structures, namely Si(100) and Si(111), as well as more complex ones, such as SiO2 (c-axis).",
journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
title = "Determination of parameters for channeling of protons in SiC polytype crystals in the backscattering geometry",
volume = "184",
number = "3",
pages = "319-326",
doi = "10.1016/S0168-583X(01)00727-3"
}

Kokkoris, M., Kossionides, S., Vlastou, R., Aslanoglou, X.A., Grotzschel, R., Nsouli, B., Kuznetsov, A. Y., Petrović, S. M.,& Paradellis, T.. (2001). Determination of parameters for channeling of protons in SiC polytype crystals in the backscattering geometry. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 184(3), 319-326.
https://doi.org/10.1016/S0168-583X(01)00727-3

Kokkoris M, Kossionides S, Vlastou R, Aslanoglou X, Grotzschel R, Nsouli B, Kuznetsov AY, Petrović SM, Paradellis T. Determination of parameters for channeling of protons in SiC polytype crystals in the backscattering geometry. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2001;184(3):319-326.
doi:10.1016/S0168-583X(01)00727-3 .

Kokkoris, Michael, Kossionides, S, Vlastou, R., Aslanoglou, X.A., Grotzschel, Rainer, Nsouli, Bilal, Kuznetsov, Andrej Yu, Petrović, Srđan M., Paradellis, T., "Determination of parameters for channeling of protons in SiC polytype crystals in the backscattering geometry" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 184, no. 3 (2001):319-326,
https://doi.org/10.1016/S0168-583X(01)00727-3 . .