TY  - CONF
AU  - Petrović, S.
AU  - Gaković, Biljana M.
AU  - Siogka, C.
AU  - Milovanović, D.
AU  - Tsibidis, G.
PY  - 2023
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/11817
AB  - Nano layer thin films (NLTF), composed of alternating layers of various materials, are widely used in modern nanotechnology. Ultrafast lasers for processing is a precise non-contact method. Single pulses can be used to remove NLTF from the substrate or to accurately and selectively ablate one or more layers of the film's surface. Selective ablation can only be achieved at specified values of the laser beam's properties for a given material [1-3]. On practically any material, a laser beam can be used to produce the universal phenomena known as “laser-induced periodic surface structures” (LIPSSs). These structures are created by exposing the sample's surface to multi-pulse irradiation and have a variety of applications [4,5]. The interaction of ultrafast laser pulses with nickel/titanium (Ni/Ti) thin film was investigated. The NLTF, composed of ten alternating Ni and Ti layers, was deposited on silicon (Si) substrate by ion-sputtering. A single and multi-pulse irradiation was done in air with focused and linearly polarized laser pulses (wavelength 1026 nm and pulse duration 170 fs). For achieving selective ablation, the single pulse energy was gradually increased from near the ablation threshold to a level that completely removed the NLTF. The pulse energy for LIPSS creation was close to the ablation threshold of the NLTF. The laser induced morphology and the elemental composition changes were examined with microscopy, optical profilometry and energy dispersive X-ray spectroscopy. To interpret the experimental observations, theoretical simulation has been performed to explore the thermal response of the NLTF after irradiation with single laser pulses.
PB  - Belgrade : Vinča Institute of Nuclear Sciences
C3  - PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade
T1  - Selective ablation and laser induced periodical surface structures (LIPSS) produced on (Ni/Ti) nano layer thin film with ultrafast laser pulses
SP  - 118
EP  - 118
UR  - https://hdl.handle.net/21.15107/rcub_vinar_11817
ER  - 

@conference{
author = "Petrović, S. and Gaković, Biljana M. and Siogka, C. and Milovanović, D. and Tsibidis, G.",
year = "2023",
abstract = "Nano layer thin films (NLTF), composed of alternating layers of various materials, are widely used in modern nanotechnology. Ultrafast lasers for processing is a precise non-contact method. Single pulses can be used to remove NLTF from the substrate or to accurately and selectively ablate one or more layers of the film's surface. Selective ablation can only be achieved at specified values of the laser beam's properties for a given material [1-3]. On practically any material, a laser beam can be used to produce the universal phenomena known as “laser-induced periodic surface structures” (LIPSSs). These structures are created by exposing the sample's surface to multi-pulse irradiation and have a variety of applications [4,5]. The interaction of ultrafast laser pulses with nickel/titanium (Ni/Ti) thin film was investigated. The NLTF, composed of ten alternating Ni and Ti layers, was deposited on silicon (Si) substrate by ion-sputtering. A single and multi-pulse irradiation was done in air with focused and linearly polarized laser pulses (wavelength 1026 nm and pulse duration 170 fs). For achieving selective ablation, the single pulse energy was gradually increased from near the ablation threshold to a level that completely removed the NLTF. The pulse energy for LIPSS creation was close to the ablation threshold of the NLTF. The laser induced morphology and the elemental composition changes were examined with microscopy, optical profilometry and energy dispersive X-ray spectroscopy. To interpret the experimental observations, theoretical simulation has been performed to explore the thermal response of the NLTF after irradiation with single laser pulses.",
publisher = "Belgrade : Vinča Institute of Nuclear Sciences",
journal = "PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade",
title = "Selective ablation and laser induced periodical surface structures (LIPSS) produced on (Ni/Ti) nano layer thin film with ultrafast laser pulses",
pages = "118-118",
url = "https://hdl.handle.net/21.15107/rcub_vinar_11817"
}

Petrović, S., Gaković, B. M., Siogka, C., Milovanović, D.,& Tsibidis, G.. (2023). Selective ablation and laser induced periodical surface structures (LIPSS) produced on (Ni/Ti) nano layer thin film with ultrafast laser pulses. in PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade
Belgrade : Vinča Institute of Nuclear Sciences., 118-118.
https://hdl.handle.net/21.15107/rcub_vinar_11817

Petrović S, Gaković BM, Siogka C, Milovanović D, Tsibidis G. Selective ablation and laser induced periodical surface structures (LIPSS) produced on (Ni/Ti) nano layer thin film with ultrafast laser pulses. in PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade. 2023;:118-118.
https://hdl.handle.net/21.15107/rcub_vinar_11817 .

Petrović, S., Gaković, Biljana M., Siogka, C., Milovanović, D., Tsibidis, G., "Selective ablation and laser induced periodical surface structures (LIPSS) produced on (Ni/Ti) nano layer thin film with ultrafast laser pulses" in PHOTONICA2023 : 9th International School and Conference on Photonics : book of abstracts; August 28 - September 1, 2023; Belgrade (2023):118-118,
https://hdl.handle.net/21.15107/rcub_vinar_11817 .

TY  - JOUR
AU  - Gaković, Biljana M.
AU  - Kudryashov, S. I.
AU  - Danilov, P. A.
AU  - Milovanović, D.
AU  - Panjan, Peter
AU  - Bezhanov, S. G.
AU  - Uryupin, S. A.
AU  - Ionin, A. A.
PY  - 2021
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/10012
AB  - Results concerning the controllable ablation of nano-layered thin films (NLTF) by femtosecond laser pulses are presented. Investigated samples were titanium-aluminum bilayers, deposited on a silicon substrate, with the top titanium or aluminum layer of variable thickness on the surface. Irradiation was done in ambient air with single femtosecond laser pulses under standard laboratory conditions. The samples were analyzed by complementary methods of optical and scanning electron microscopy and optical profilometry, exhibiting laser-fluence-dependent ablative removal either of the top layer or the entire bilayer or even partial ablation of the underlying silicon substrate. The removal (spallation) threshold fluences for the topmost layer are scalable versus its thickness almost irrespectively of its material, being rather selective for the Ti-coated samples and much less selective for the Al-coated samples. The removal of the entire bilayers was found to be strongly influenced by electronic properties of the underlying metallic layer, dictating the NLTF-Si adhesion, heat conduction, and capacity in the NLTFs toward the NLTF-Si interface and beyond, as well as by their thermophysical characteristics, e.g., almost twice higher melting temperature and enthalpy for Ti. As a result, precise fs-laser machining of the entire NLTFs is pronounced and selective for the samples with the fusible Al at the low-adhesion Al-Si interfaces, compared with the incomplete NLTF removal from the high-adhesion and refractory Ti-Si interfaces.
T2  - Applied Optics
T1  - Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation
VL  - 60
IS  - 31
SP  - H12
EP  - H19
DO  - 10.1364/AO.432691
ER  - 

@article{
author = "Gaković, Biljana M. and Kudryashov, S. I. and Danilov, P. A. and Milovanović, D. and Panjan, Peter and Bezhanov, S. G. and Uryupin, S. A. and Ionin, A. A.",
year = "2021",
abstract = "Results concerning the controllable ablation of nano-layered thin films (NLTF) by femtosecond laser pulses are presented. Investigated samples were titanium-aluminum bilayers, deposited on a silicon substrate, with the top titanium or aluminum layer of variable thickness on the surface. Irradiation was done in ambient air with single femtosecond laser pulses under standard laboratory conditions. The samples were analyzed by complementary methods of optical and scanning electron microscopy and optical profilometry, exhibiting laser-fluence-dependent ablative removal either of the top layer or the entire bilayer or even partial ablation of the underlying silicon substrate. The removal (spallation) threshold fluences for the topmost layer are scalable versus its thickness almost irrespectively of its material, being rather selective for the Ti-coated samples and much less selective for the Al-coated samples. The removal of the entire bilayers was found to be strongly influenced by electronic properties of the underlying metallic layer, dictating the NLTF-Si adhesion, heat conduction, and capacity in the NLTFs toward the NLTF-Si interface and beyond, as well as by their thermophysical characteristics, e.g., almost twice higher melting temperature and enthalpy for Ti. As a result, precise fs-laser machining of the entire NLTFs is pronounced and selective for the samples with the fusible Al at the low-adhesion Al-Si interfaces, compared with the incomplete NLTF removal from the high-adhesion and refractory Ti-Si interfaces.",
journal = "Applied Optics",
title = "Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation",
volume = "60",
number = "31",
pages = "H12-H19",
doi = "10.1364/AO.432691"
}

Gaković, B. M., Kudryashov, S. I., Danilov, P. A., Milovanović, D., Panjan, P., Bezhanov, S. G., Uryupin, S. A.,& Ionin, A. A.. (2021). Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation. in Applied Optics, 60(31), H12-H19.
https://doi.org/10.1364/AO.432691

Gaković BM, Kudryashov SI, Danilov PA, Milovanović D, Panjan P, Bezhanov SG, Uryupin SA, Ionin AA. Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation. in Applied Optics. 2021;60(31):H12-H19.
doi:10.1364/AO.432691 .

Gaković, Biljana M., Kudryashov, S. I., Danilov, P. A., Milovanović, D., Panjan, Peter, Bezhanov, S. G., Uryupin, S. A., Ionin, A. A., "Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation" in Applied Optics, 60, no. 31 (2021):H12-H19,
https://doi.org/10.1364/AO.432691 . .