Jokanović, M.

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  • Jokanović, M. (1)
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TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering

Jokanović, Vukoman R.; Čolović, Božana M.; Bundaleski, Nenad; Jokanović, M.; Trajkovska Petkoska, Anka; Ferrara, Manuela; Nasov, Ilija; Rakočević, Zlatko Lj.

(2018)

TY  - JOUR
AU  - Jokanović, Vukoman R.
AU  - Čolović, Božana M.
AU  - Bundaleski, Nenad
AU  - Jokanović, M.
AU  - Trajkovska Petkoska, Anka
AU  - Ferrara, Manuela
AU  - Nasov, Ilija
AU  - Rakočević, Zlatko Lj.
PY  - 2018
UR  - https://joam.inoe.ro/index.php?option=magazine&op=view&idu=4206&catid=110
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/7716
AB  - Optical properties of TixOy thin film, of thickness 125 nm, obtained by pulsed magnetron sputtering were investigated in this paper. XRD analysis revealed the presence of anatase, rutile, TiO, Ti2O3and Ti3O5phases. XPS analysis showed similar results. SEM analysis showed quite smooth surface of the film. Spectroscopic ellipsometry revealed sharp decrease of refractive index in wavelength range 300-500 nm and extremely low values of extinction coefficients which are less than 0.01 at wavelengths equal to or higher than 500 nm.
T2  - Journal of Optoelectronics and Advanced Materials
T1  - TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering
VL  - 20
IS  - 3-4
SP  - 169
EP  - 174
UR  - https://hdl.handle.net/21.15107/rcub_vinar_7716
ER  - 
@article{
author = "Jokanović, Vukoman R. and Čolović, Božana M. and Bundaleski, Nenad and Jokanović, M. and Trajkovska Petkoska, Anka and Ferrara, Manuela and Nasov, Ilija and Rakočević, Zlatko Lj.",
year = "2018",
abstract = "Optical properties of TixOy thin film, of thickness 125 nm, obtained by pulsed magnetron sputtering were investigated in this paper. XRD analysis revealed the presence of anatase, rutile, TiO, Ti2O3and Ti3O5phases. XPS analysis showed similar results. SEM analysis showed quite smooth surface of the film. Spectroscopic ellipsometry revealed sharp decrease of refractive index in wavelength range 300-500 nm and extremely low values of extinction coefficients which are less than 0.01 at wavelengths equal to or higher than 500 nm.",
journal = "Journal of Optoelectronics and Advanced Materials",
title = "TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering",
volume = "20",
number = "3-4",
pages = "169-174",
url = "https://hdl.handle.net/21.15107/rcub_vinar_7716"
}
Jokanović, V. R., Čolović, B. M., Bundaleski, N., Jokanović, M., Trajkovska Petkoska, A., Ferrara, M., Nasov, I.,& Rakočević, Z. Lj.. (2018). TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering. in Journal of Optoelectronics and Advanced Materials, 20(3-4), 169-174.
https://hdl.handle.net/21.15107/rcub_vinar_7716
Jokanović VR, Čolović BM, Bundaleski N, Jokanović M, Trajkovska Petkoska A, Ferrara M, Nasov I, Rakočević ZL. TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering. in Journal of Optoelectronics and Advanced Materials. 2018;20(3-4):169-174.
https://hdl.handle.net/21.15107/rcub_vinar_7716 .
Jokanović, Vukoman R., Čolović, Božana M., Bundaleski, Nenad, Jokanović, M., Trajkovska Petkoska, Anka, Ferrara, Manuela, Nasov, Ilija, Rakočević, Zlatko Lj., "TixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputtering" in Journal of Optoelectronics and Advanced Materials, 20, no. 3-4 (2018):169-174,
https://hdl.handle.net/21.15107/rcub_vinar_7716 .
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