TY  - JOUR
AU  - Petrović, Suzana
AU  - Peruško, Davor
AU  - Radović-Bogdanović, I.
AU  - Branković, Goran O.
AU  - Čekada, Miha
AU  - Gaković, Biljana M.
AU  - Jaksic, M.
AU  - Trtica, Milan
AU  - Milosavljević, Momir
PY  - 2012
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/4912
AB  - In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase.
T2  - Metals and Materials International
T1  - Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser
VL  - 18
IS  - 3
SP  - 457
EP  - 463
DO  - 10.1007/s12540-012-3012-4
ER  - 

@article{
author = "Petrović, Suzana and Peruško, Davor and Radović-Bogdanović, I. and Branković, Goran O. and Čekada, Miha and Gaković, Biljana M. and Jaksic, M. and Trtica, Milan and Milosavljević, Momir",
year = "2012",
abstract = "In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase.",
journal = "Metals and Materials International",
title = "Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser",
volume = "18",
number = "3",
pages = "457-463",
doi = "10.1007/s12540-012-3012-4"
}

Petrović, S., Peruško, D., Radović-Bogdanović, I., Branković, G. O., Čekada, M., Gaković, B. M., Jaksic, M., Trtica, M.,& Milosavljević, M.. (2012). Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser. in Metals and Materials International, 18(3), 457-463.
https://doi.org/10.1007/s12540-012-3012-4

Petrović S, Peruško D, Radović-Bogdanović I, Branković GO, Čekada M, Gaković BM, Jaksic M, Trtica M, Milosavljević M. Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser. in Metals and Materials International. 2012;18(3):457-463.
doi:10.1007/s12540-012-3012-4 .

Petrović, Suzana, Peruško, Davor, Radović-Bogdanović, I., Branković, Goran O., Čekada, Miha, Gaković, Biljana M., Jaksic, M., Trtica, Milan, Milosavljević, Momir, "Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser" in Metals and Materials International, 18, no. 3 (2012):457-463,
https://doi.org/10.1007/s12540-012-3012-4 . .

TY  - JOUR
AU  - Petrović, Suzana
AU  - Peruško, Davor
AU  - Milovanović, Dubravka S.
AU  - Siketic, Z.
AU  - Jaksic, M.
AU  - Kovač, Janez
AU  - Gaković, Biljana M.
AU  - Milosavljević, Momir
AU  - Trtica, Milan
PY  - 2011
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6932
AB  - In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064 nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantly changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization.
T2  - Applied Physics. B: Lasers and Optics
T1  - Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions
VL  - 105
IS  - 3
SP  - 593
EP  - 597
DO  - 10.1007/s00340-011-4505-4
ER  - 

@article{
author = "Petrović, Suzana and Peruško, Davor and Milovanović, Dubravka S. and Siketic, Z. and Jaksic, M. and Kovač, Janez and Gaković, Biljana M. and Milosavljević, Momir and Trtica, Milan",
year = "2011",
abstract = "In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064 nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantly changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization.",
journal = "Applied Physics. B: Lasers and Optics",
title = "Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions",
volume = "105",
number = "3",
pages = "593-597",
doi = "10.1007/s00340-011-4505-4"
}

Petrović, S., Peruško, D., Milovanović, D. S., Siketic, Z., Jaksic, M., Kovač, J., Gaković, B. M., Milosavljević, M.,& Trtica, M.. (2011). Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions. in Applied Physics. B: Lasers and Optics, 105(3), 593-597.
https://doi.org/10.1007/s00340-011-4505-4

Petrović S, Peruško D, Milovanović DS, Siketic Z, Jaksic M, Kovač J, Gaković BM, Milosavljević M, Trtica M. Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions. in Applied Physics. B: Lasers and Optics. 2011;105(3):593-597.
doi:10.1007/s00340-011-4505-4 .

Petrović, Suzana, Peruško, Davor, Milovanović, Dubravka S., Siketic, Z., Jaksic, M., Kovač, Janez, Gaković, Biljana M., Milosavljević, Momir, Trtica, Milan, "Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions" in Applied Physics. B: Lasers and Optics, 105, no. 3 (2011):593-597,
https://doi.org/10.1007/s00340-011-4505-4 . .