TY  - JOUR
AU  - Peruško, Davor
AU  - Milosavljević, Momir
AU  - Milinović, Velimir
AU  - Timotijević, B.
AU  - Zalar, A.
AU  - Kovač, Janez
AU  - Pracek, B.
AU  - Jeynes, C.
PY  - 2008
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6768
AB  - We have studied the effects of high fluence nitrogen ion implantation on the structural changes in Al/Ti multilayers, with the aim of achieving multilayered metal-nitrides. The starting structures consisted of 10 alternate sputter-deposited Al and Ti films, with a total thickness of 270 nm, on (100) Si substrates. They were implanted with 200 keV N-2(+), to 1 x 10(17) and 2 x 10(17) at/cm(2), the projected range being around half-depth of the multilayers. Structural characterization was performed by Rutherford backscattering, Auger electron spectroscopy and transmission electron microscopy. It was found that ion implantation to the higher fluence induces a full intermixing of Al/Ti layers, resulting in a multilayered structure with different content of Al, Ti and N. The applied method can be interesting for preparation of graded (AI,Ti)N multilayers, with a controlled content of nitrogen and a controlled level of Al-Ti intermixing within the structures. (C) 2008 Elsevier B.V. All rights reserved.
T2  - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
T1  - High fluence nitrogen implantation in Al/Ti multilayers
VL  - 266
IS  - 10
SP  - 2503
EP  - 2506
DO  - 10.1016/j.nimb.2008.03.034
ER  - 

@article{
author = "Peruško, Davor and Milosavljević, Momir and Milinović, Velimir and Timotijević, B. and Zalar, A. and Kovač, Janez and Pracek, B. and Jeynes, C.",
year = "2008",
abstract = "We have studied the effects of high fluence nitrogen ion implantation on the structural changes in Al/Ti multilayers, with the aim of achieving multilayered metal-nitrides. The starting structures consisted of 10 alternate sputter-deposited Al and Ti films, with a total thickness of 270 nm, on (100) Si substrates. They were implanted with 200 keV N-2(+), to 1 x 10(17) and 2 x 10(17) at/cm(2), the projected range being around half-depth of the multilayers. Structural characterization was performed by Rutherford backscattering, Auger electron spectroscopy and transmission electron microscopy. It was found that ion implantation to the higher fluence induces a full intermixing of Al/Ti layers, resulting in a multilayered structure with different content of Al, Ti and N. The applied method can be interesting for preparation of graded (AI,Ti)N multilayers, with a controlled content of nitrogen and a controlled level of Al-Ti intermixing within the structures. (C) 2008 Elsevier B.V. All rights reserved.",
journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
title = "High fluence nitrogen implantation in Al/Ti multilayers",
volume = "266",
number = "10",
pages = "2503-2506",
doi = "10.1016/j.nimb.2008.03.034"
}

Peruško, D., Milosavljević, M., Milinović, V., Timotijević, B., Zalar, A., Kovač, J., Pracek, B.,& Jeynes, C.. (2008). High fluence nitrogen implantation in Al/Ti multilayers. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 266(10), 2503-2506.
https://doi.org/10.1016/j.nimb.2008.03.034

Peruško D, Milosavljević M, Milinović V, Timotijević B, Zalar A, Kovač J, Pracek B, Jeynes C. High fluence nitrogen implantation in Al/Ti multilayers. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2008;266(10):2503-2506.
doi:10.1016/j.nimb.2008.03.034 .

Peruško, Davor, Milosavljević, Momir, Milinović, Velimir, Timotijević, B., Zalar, A., Kovač, Janez, Pracek, B., Jeynes, C., "High fluence nitrogen implantation in Al/Ti multilayers" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 266, no. 10 (2008):2503-2506,
https://doi.org/10.1016/j.nimb.2008.03.034 . .

TY  - JOUR
AU  - Petrović, Suzana
AU  - Bundaleski, Nenad
AU  - Radović, Marko B.
AU  - Ristić, Zoran
AU  - Gligorić, Goran
AU  - Peruško, Davor
AU  - Mitrić, Miodrag
AU  - Pracek, B.
AU  - Zalar, A.
AU  - Rakočević, Zlatko Lj.
PY  - 2007
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6652
AB  - Nichrome coatings have been deposited using the d.c. sputtering of the target (80% Ni-20% Cr wt.) by Ar+ ions at a working pressure of 10(-1) Pa and at room temperature. After the air exposure of samples at room temperature, their phase composition and structure was studied by X-ray diffraction, while the surface elemental composition was determined by low energy ion scattering (LEIS) and Auger electron spectroscopy (AES). AES has been also used for the bulk composition analysis. There is a significant difference between the compositions of the surface and of the bulk. Surface segregation of chromium was observed using both LEIS and AES, and it was found that the chromium concentration increases with that of oxygen adsorbed at the surface during the air exposure. The nichrome surface composition is qualitatively the same as in the case of its exposure to O-2 at room temperature, but significantly different from that of the thermally annealed nichrome to 400 degrees C in air. (c) 2006 Elsevier B.V. All rights reserved.
T2  - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
T1  - Surface composition and structure of Ni-Cr sputtered coatings exposed in air at room temperature
VL  - 256
IS  - 1
SP  - 368
EP  - 372
DO  - 10.1016/j.nimb.2006.12.030
ER  - 

@article{
author = "Petrović, Suzana and Bundaleski, Nenad and Radović, Marko B. and Ristić, Zoran and Gligorić, Goran and Peruško, Davor and Mitrić, Miodrag and Pracek, B. and Zalar, A. and Rakočević, Zlatko Lj.",
year = "2007",
abstract = "Nichrome coatings have been deposited using the d.c. sputtering of the target (80% Ni-20% Cr wt.) by Ar+ ions at a working pressure of 10(-1) Pa and at room temperature. After the air exposure of samples at room temperature, their phase composition and structure was studied by X-ray diffraction, while the surface elemental composition was determined by low energy ion scattering (LEIS) and Auger electron spectroscopy (AES). AES has been also used for the bulk composition analysis. There is a significant difference between the compositions of the surface and of the bulk. Surface segregation of chromium was observed using both LEIS and AES, and it was found that the chromium concentration increases with that of oxygen adsorbed at the surface during the air exposure. The nichrome surface composition is qualitatively the same as in the case of its exposure to O-2 at room temperature, but significantly different from that of the thermally annealed nichrome to 400 degrees C in air. (c) 2006 Elsevier B.V. All rights reserved.",
journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
title = "Surface composition and structure of Ni-Cr sputtered coatings exposed in air at room temperature",
volume = "256",
number = "1",
pages = "368-372",
doi = "10.1016/j.nimb.2006.12.030"
}

Petrović, S., Bundaleski, N., Radović, M. B., Ristić, Z., Gligorić, G., Peruško, D., Mitrić, M., Pracek, B., Zalar, A.,& Rakočević, Z. Lj.. (2007). Surface composition and structure of Ni-Cr sputtered coatings exposed in air at room temperature. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 256(1), 368-372.
https://doi.org/10.1016/j.nimb.2006.12.030

Petrović S, Bundaleski N, Radović MB, Ristić Z, Gligorić G, Peruško D, Mitrić M, Pracek B, Zalar A, Rakočević ZL. Surface composition and structure of Ni-Cr sputtered coatings exposed in air at room temperature. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2007;256(1):368-372.
doi:10.1016/j.nimb.2006.12.030 .

Petrović, Suzana, Bundaleski, Nenad, Radović, Marko B., Ristić, Zoran, Gligorić, Goran, Peruško, Davor, Mitrić, Miodrag, Pracek, B., Zalar, A., Rakočević, Zlatko Lj., "Surface composition and structure of Ni-Cr sputtered coatings exposed in air at room temperature" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 256, no. 1 (2007):368-372,
https://doi.org/10.1016/j.nimb.2006.12.030 . .