TY  - JOUR
AU  - Obradović, Marko O.
AU  - Pjević, Dejan J.
AU  - Peruško, Davor
AU  - Grce, Ana
AU  - Milosavljević, Momir
AU  - Homewood, Kevin P.
AU  - Siketic, Z.
PY  - 2015
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/7078
AB  - The effects of helium ion irradiation on immiscible AlN/TiN multilayered system were studied. The structure consisted of 30 alternate AlN (similar to 8 nm) and TiN (similar to 9.3 nm) layers of a total thickness around 260 nm, deposited on (100) Si substrates by reactive sputtering. The system was then implanted with 30 keV He+ to very high irradiation doses, 1-4 x 10(17) ions/cm(2). Evaluated projected ion range was 153.1 +/- 45.4 nm and maximum displacements per atom for the applied doses from 6 to 24. It was found that the multilayers remained well separated and stable after irradiation to 1 x 10(17) ions/cm(2), which introduces up to 10 at.% of He within the structure. The main effects were agglomeration of He bubbles around the projected ion range, mostly concentrated at the AlN edges of the interfaces, and a slight increase of the mean grain size within the affected zone. Increasing of the ion dose induced further agglomeration of bubbles, splitting of the layers at the interfaces, and final destruction of the structure. The evaluated He content was consistent with the implanted dose up to 2 x 10(17) ions/cm(2). For the highest dose the implanted gas is partially released from the structure. The results can be interesting towards the development of radiation tolerant materials. (C) 2015 Elsevier B.V. All rights reserved.
T2  - Thin Solid Films
T1  - Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system
VL  - 591
SP  - 164
EP  - 168
DO  - 10.1016/j.tsf.2015.03.074
ER  - 

@article{
author = "Obradović, Marko O. and Pjević, Dejan J. and Peruško, Davor and Grce, Ana and Milosavljević, Momir and Homewood, Kevin P. and Siketic, Z.",
year = "2015",
abstract = "The effects of helium ion irradiation on immiscible AlN/TiN multilayered system were studied. The structure consisted of 30 alternate AlN (similar to 8 nm) and TiN (similar to 9.3 nm) layers of a total thickness around 260 nm, deposited on (100) Si substrates by reactive sputtering. The system was then implanted with 30 keV He+ to very high irradiation doses, 1-4 x 10(17) ions/cm(2). Evaluated projected ion range was 153.1 +/- 45.4 nm and maximum displacements per atom for the applied doses from 6 to 24. It was found that the multilayers remained well separated and stable after irradiation to 1 x 10(17) ions/cm(2), which introduces up to 10 at.% of He within the structure. The main effects were agglomeration of He bubbles around the projected ion range, mostly concentrated at the AlN edges of the interfaces, and a slight increase of the mean grain size within the affected zone. Increasing of the ion dose induced further agglomeration of bubbles, splitting of the layers at the interfaces, and final destruction of the structure. The evaluated He content was consistent with the implanted dose up to 2 x 10(17) ions/cm(2). For the highest dose the implanted gas is partially released from the structure. The results can be interesting towards the development of radiation tolerant materials. (C) 2015 Elsevier B.V. All rights reserved.",
journal = "Thin Solid Films",
title = "Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system",
volume = "591",
pages = "164-168",
doi = "10.1016/j.tsf.2015.03.074"
}

Obradović, M. O., Pjević, D. J., Peruško, D., Grce, A., Milosavljević, M., Homewood, K. P.,& Siketic, Z.. (2015). Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system. in Thin Solid Films, 591, 164-168.
https://doi.org/10.1016/j.tsf.2015.03.074

Obradović MO, Pjević DJ, Peruško D, Grce A, Milosavljević M, Homewood KP, Siketic Z. Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system. in Thin Solid Films. 2015;591:164-168.
doi:10.1016/j.tsf.2015.03.074 .

Obradović, Marko O., Pjević, Dejan J., Peruško, Davor, Grce, Ana, Milosavljević, Momir, Homewood, Kevin P., Siketic, Z., "Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system" in Thin Solid Films, 591 (2015):164-168,
https://doi.org/10.1016/j.tsf.2015.03.074 . .

TY  - JOUR
AU  - Petrović, Suzana
AU  - Peruško, Davor
AU  - Kovač, Janez
AU  - Siketic, Z.
AU  - Bogdanović-Radović, Ivančica
AU  - Gaković, Biljana M.
AU  - Radak, Bojan
AU  - Trtica, Milan
PY  - 2014
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/5842
AB  - The surface oxidation of Ni/Ti bilayer, deposited on silicon substrate, affected by picosecond Nd: YAG laser radiation has been investigated. Fluence close to the target ablation threshold and multi-pulse laser irradiation regime were applied. Changes in the chemical composition of the formed surface oxide layer were studied by Elastic Recoil Detection Analysis (ERDA) and X-ray photoelectron spectroscopy (XPS). Morphological features analysis, at the oxide surface layer, was monitored, too. Laser modification as-deposited (Ni/Ti)/Si sample with 10 pulses induces a progressed interaction between Ni and Ti layers with the initial surface oxidation and formation of NiTi alloy phase. Progressed intermixing of components was achieved for the irradiation with 50 and more pulses, when all components were quite uniformly distributed to a depth of about 80 nm. An oxide layer was formed at the surface, with the specific combination of the oxide phases depending on the number of accumulated pulses. Changes in the morphological characteristics are reflected in the increase of the mean surface roughness and the generation of a certain number of cavities. These features are decreased with increasing number of pulses, caused by the surface melting and a pronounced mobility of the materials. (C) 2013 Elsevier B.V. All rights reserved.
T2  - Materials Chemistry and Physics
T1  - Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses
VL  - 143
IS  - 2
SP  - 530
EP  - 535
DO  - 10.1016/j.matchemphys.2013.09.021
ER  - 

@article{
author = "Petrović, Suzana and Peruško, Davor and Kovač, Janez and Siketic, Z. and Bogdanović-Radović, Ivančica and Gaković, Biljana M. and Radak, Bojan and Trtica, Milan",
year = "2014",
abstract = "The surface oxidation of Ni/Ti bilayer, deposited on silicon substrate, affected by picosecond Nd: YAG laser radiation has been investigated. Fluence close to the target ablation threshold and multi-pulse laser irradiation regime were applied. Changes in the chemical composition of the formed surface oxide layer were studied by Elastic Recoil Detection Analysis (ERDA) and X-ray photoelectron spectroscopy (XPS). Morphological features analysis, at the oxide surface layer, was monitored, too. Laser modification as-deposited (Ni/Ti)/Si sample with 10 pulses induces a progressed interaction between Ni and Ti layers with the initial surface oxidation and formation of NiTi alloy phase. Progressed intermixing of components was achieved for the irradiation with 50 and more pulses, when all components were quite uniformly distributed to a depth of about 80 nm. An oxide layer was formed at the surface, with the specific combination of the oxide phases depending on the number of accumulated pulses. Changes in the morphological characteristics are reflected in the increase of the mean surface roughness and the generation of a certain number of cavities. These features are decreased with increasing number of pulses, caused by the surface melting and a pronounced mobility of the materials. (C) 2013 Elsevier B.V. All rights reserved.",
journal = "Materials Chemistry and Physics",
title = "Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses",
volume = "143",
number = "2",
pages = "530-535",
doi = "10.1016/j.matchemphys.2013.09.021"
}

Petrović, S., Peruško, D., Kovač, J., Siketic, Z., Bogdanović-Radović, I., Gaković, B. M., Radak, B.,& Trtica, M.. (2014). Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses. in Materials Chemistry and Physics, 143(2), 530-535.
https://doi.org/10.1016/j.matchemphys.2013.09.021

Petrović S, Peruško D, Kovač J, Siketic Z, Bogdanović-Radović I, Gaković BM, Radak B, Trtica M. Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses. in Materials Chemistry and Physics. 2014;143(2):530-535.
doi:10.1016/j.matchemphys.2013.09.021 .

Petrović, Suzana, Peruško, Davor, Kovač, Janez, Siketic, Z., Bogdanović-Radović, Ivančica, Gaković, Biljana M., Radak, Bojan, Trtica, Milan, "Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses" in Materials Chemistry and Physics, 143, no. 2 (2014):530-535,
https://doi.org/10.1016/j.matchemphys.2013.09.021 . .

TY  - JOUR
AU  - Peruško, Davor
AU  - Cizmovic, M.
AU  - Petrović, Suzana
AU  - Siketic, Z.
AU  - Mitrić, Miodrag
AU  - Pelicon, P.
AU  - Dražić, Goran
AU  - Kovač, Janez
AU  - Milinović, Velimir
AU  - Milosavljević, Momir
PY  - 2013
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/5457
AB  - Multilayered 5x(Al/Ti) structures, deposited on a Si substrate to a total thickness of 130 nm, were treated by unfocused Nd:YAG laser pulses (150 ps) with energies of 85 and 65 mJ. Irradiations were performed in air with 10, 50 and 100 successive laser pulses. Characterizations were done by using Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The results obtained show that laser irradiation, at either energy, induced almost full intermixing of deposited layers and formation of intermetallic compounds, but this was more pronounced for the applied laser pulses with a higher energy. The intermixed layer-silicon interface remains intact for all numbers of applied laser pulses and for both energies. The formation of an oxide layer on the sample surfaces was also observed, the thickness of which is greater for the higher laser beam energy.
T2  - Laser Physics
T1  - Laser irradiation of nano-metric Al/Ti multilayers
VL  - 23
IS  - 3
DO  - 10.1088/1054-660X/23/3/036005
ER  - 

@article{
author = "Peruško, Davor and Cizmovic, M. and Petrović, Suzana and Siketic, Z. and Mitrić, Miodrag and Pelicon, P. and Dražić, Goran and Kovač, Janez and Milinović, Velimir and Milosavljević, Momir",
year = "2013",
abstract = "Multilayered 5x(Al/Ti) structures, deposited on a Si substrate to a total thickness of 130 nm, were treated by unfocused Nd:YAG laser pulses (150 ps) with energies of 85 and 65 mJ. Irradiations were performed in air with 10, 50 and 100 successive laser pulses. Characterizations were done by using Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), x-ray diffraction (XRD) and transmission electron microscopy (TEM). The results obtained show that laser irradiation, at either energy, induced almost full intermixing of deposited layers and formation of intermetallic compounds, but this was more pronounced for the applied laser pulses with a higher energy. The intermixed layer-silicon interface remains intact for all numbers of applied laser pulses and for both energies. The formation of an oxide layer on the sample surfaces was also observed, the thickness of which is greater for the higher laser beam energy.",
journal = "Laser Physics",
title = "Laser irradiation of nano-metric Al/Ti multilayers",
volume = "23",
number = "3",
doi = "10.1088/1054-660X/23/3/036005"
}

Peruško, D., Cizmovic, M., Petrović, S., Siketic, Z., Mitrić, M., Pelicon, P., Dražić, G., Kovač, J., Milinović, V.,& Milosavljević, M.. (2013). Laser irradiation of nano-metric Al/Ti multilayers. in Laser Physics, 23(3).
https://doi.org/10.1088/1054-660X/23/3/036005

Peruško D, Cizmovic M, Petrović S, Siketic Z, Mitrić M, Pelicon P, Dražić G, Kovač J, Milinović V, Milosavljević M. Laser irradiation of nano-metric Al/Ti multilayers. in Laser Physics. 2013;23(3).
doi:10.1088/1054-660X/23/3/036005 .

Peruško, Davor, Cizmovic, M., Petrović, Suzana, Siketic, Z., Mitrić, Miodrag, Pelicon, P., Dražić, Goran, Kovač, Janez, Milinović, Velimir, Milosavljević, Momir, "Laser irradiation of nano-metric Al/Ti multilayers" in Laser Physics, 23, no. 3 (2013),
https://doi.org/10.1088/1054-660X/23/3/036005 . .

TY  - JOUR
AU  - Petrović, Suzana
AU  - Peruško, Davor
AU  - Milovanović, Dubravka S.
AU  - Siketic, Z.
AU  - Jaksic, M.
AU  - Kovač, Janez
AU  - Gaković, Biljana M.
AU  - Milosavljević, Momir
AU  - Trtica, Milan
PY  - 2011
UR  - https://vinar.vin.bg.ac.rs/handle/123456789/6932
AB  - In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064 nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantly changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization.
T2  - Applied Physics. B: Lasers and Optics
T1  - Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions
VL  - 105
IS  - 3
SP  - 593
EP  - 597
DO  - 10.1007/s00340-011-4505-4
ER  - 

@article{
author = "Petrović, Suzana and Peruško, Davor and Milovanović, Dubravka S. and Siketic, Z. and Jaksic, M. and Kovač, Janez and Gaković, Biljana M. and Milosavljević, Momir and Trtica, Milan",
year = "2011",
abstract = "In this work we have studied the influence of laser modification on the composition and structure of tungsten titanium (WTi) thin films, deposited on n-type (100) silicon wafers. After deposition, the samples were multi-pulse laser irradiated in a nitrogen, oxygen, and helium ambient. The composition of the WTi/Si sample was determined by Elastic Recoil Detection Analysis (ERDA). Surface morphology was monitored by Atomic Force Microscopy (AFM). In the experiment, typical laser output parameters were: wavelength 1064 nm, pulse duration 150 ps, and laser pulse energy 30 mJ. Surface concentrations of W and Ti, as well as the concentration of gas components nitrogen and oxygen were determinated before and after the action of laser radiation in different ambient conditions. The contents of W and Ti decreased after irradiation due to adsorbed gases from the surrounding atmosphere. After surface irradiation in the inert ambient (He), the concentrations of the components were not significantly changed. In other cases, oxygen was the dominant component at the surface, probably due to the high affinity of thin film components. Also, the morphological changes occurred at the surface of WTi, as an increase in the surface roughness and formation of the granular structures are a result of laser-induced surface oxidation and recrystallization.",
journal = "Applied Physics. B: Lasers and Optics",
title = "Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions",
volume = "105",
number = "3",
pages = "593-597",
doi = "10.1007/s00340-011-4505-4"
}

Petrović, S., Peruško, D., Milovanović, D. S., Siketic, Z., Jaksic, M., Kovač, J., Gaković, B. M., Milosavljević, M.,& Trtica, M.. (2011). Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions. in Applied Physics. B: Lasers and Optics, 105(3), 593-597.
https://doi.org/10.1007/s00340-011-4505-4

Petrović S, Peruško D, Milovanović DS, Siketic Z, Jaksic M, Kovač J, Gaković BM, Milosavljević M, Trtica M. Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions. in Applied Physics. B: Lasers and Optics. 2011;105(3):593-597.
doi:10.1007/s00340-011-4505-4 .

Petrović, Suzana, Peruško, Davor, Milovanović, Dubravka S., Siketic, Z., Jaksic, M., Kovač, Janez, Gaković, Biljana M., Milosavljević, Momir, Trtica, Milan, "Chemical and structural modifications of laser treated WTi surfaces at different ambient conditions" in Applied Physics. B: Lasers and Optics, 105, no. 3 (2011):593-597,
https://doi.org/10.1007/s00340-011-4505-4 . .