Laser induced mixing in multilayered Ti/Ta thin film structures
Samo za registrovane korisnike
2018
Autori
Obradović, Marko O.Kovač, Janez
Petrović, Suzana
Lazović, Vladimir M.
Salatić, Branislav
Ciganović, Jovan
Pjević, Dejan J.
Milosavljević, Momir
Peruško, Davor
Članak u časopisu (Objavljena verzija)
,
© 2018, Springer Science+Business Media, LLC, part of Springer Nature
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
The possibility of interlayer mixing in a Ti/Ta multilayer system, induced by laser irradiation, was the main purpose of these experiments. Ti/Ta multilayer system, consisting of ten alternating Ti and Ta thin films and covered by slightly thicker Ti layer, was deposited on Si (100) wafers to a total thickness of 205 nm. Laser irradiation was performed in air by picoseconds Nd:YAG laser pulses in defocused regime with fluences of 0.057 and 0.11 J cm−2. Laser beam was scanned over the 5 × 5 mm surface area with different steps along y-axes. Structural and compositional characterisation was done by auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, and scanning electron microscopy. Laser processing at lower fluence caused only oxidation of the top Ti layer, despite of the number of applied laser pulses. Interlayer mixing was not observed. Application of laser pulses at fluence of 0.11 J cm−2caused partial and/or complete ablation of deposited layers. ...In partially ablated regions considerable mixing between Ti and Ta films was registered.
Ključne reči:
thin films / multilayers / laser irradiation / mixingIzvor:
Optical and Quantum Electronics, 2018, 50, 6, 257-Finansiranje / projekti:
- Fizički procesi u sintezi novih nanostrukturnih materijala (RS-MESTD-Basic Research (BR or ON)-171023)
- Slovenian Research Agency, Research Program (P2-0082)
DOI: 10.1007/s11082-018-1525-x
ISSN: 0306-8919
WoS: 000434937300002
Scopus: 2-s2.0-85048481425
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Obradović, Marko O. AU - Kovač, Janez AU - Petrović, Suzana AU - Lazović, Vladimir M. AU - Salatić, Branislav AU - Ciganović, Jovan AU - Pjević, Dejan J. AU - Milosavljević, Momir AU - Peruško, Davor PY - 2018 UR - https://vinar.vin.bg.ac.rs/handle/123456789/7721 AB - The possibility of interlayer mixing in a Ti/Ta multilayer system, induced by laser irradiation, was the main purpose of these experiments. Ti/Ta multilayer system, consisting of ten alternating Ti and Ta thin films and covered by slightly thicker Ti layer, was deposited on Si (100) wafers to a total thickness of 205 nm. Laser irradiation was performed in air by picoseconds Nd:YAG laser pulses in defocused regime with fluences of 0.057 and 0.11 J cm−2. Laser beam was scanned over the 5 × 5 mm surface area with different steps along y-axes. Structural and compositional characterisation was done by auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, and scanning electron microscopy. Laser processing at lower fluence caused only oxidation of the top Ti layer, despite of the number of applied laser pulses. Interlayer mixing was not observed. Application of laser pulses at fluence of 0.11 J cm−2caused partial and/or complete ablation of deposited layers. In partially ablated regions considerable mixing between Ti and Ta films was registered. T2 - Optical and Quantum Electronics T1 - Laser induced mixing in multilayered Ti/Ta thin film structures VL - 50 IS - 6 SP - 257 DO - 10.1007/s11082-018-1525-x ER -
@article{ author = "Obradović, Marko O. and Kovač, Janez and Petrović, Suzana and Lazović, Vladimir M. and Salatić, Branislav and Ciganović, Jovan and Pjević, Dejan J. and Milosavljević, Momir and Peruško, Davor", year = "2018", abstract = "The possibility of interlayer mixing in a Ti/Ta multilayer system, induced by laser irradiation, was the main purpose of these experiments. Ti/Ta multilayer system, consisting of ten alternating Ti and Ta thin films and covered by slightly thicker Ti layer, was deposited on Si (100) wafers to a total thickness of 205 nm. Laser irradiation was performed in air by picoseconds Nd:YAG laser pulses in defocused regime with fluences of 0.057 and 0.11 J cm−2. Laser beam was scanned over the 5 × 5 mm surface area with different steps along y-axes. Structural and compositional characterisation was done by auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, and scanning electron microscopy. Laser processing at lower fluence caused only oxidation of the top Ti layer, despite of the number of applied laser pulses. Interlayer mixing was not observed. Application of laser pulses at fluence of 0.11 J cm−2caused partial and/or complete ablation of deposited layers. In partially ablated regions considerable mixing between Ti and Ta films was registered.", journal = "Optical and Quantum Electronics", title = "Laser induced mixing in multilayered Ti/Ta thin film structures", volume = "50", number = "6", pages = "257", doi = "10.1007/s11082-018-1525-x" }
Obradović, M. O., Kovač, J., Petrović, S., Lazović, V. M., Salatić, B., Ciganović, J., Pjević, D. J., Milosavljević, M.,& Peruško, D.. (2018). Laser induced mixing in multilayered Ti/Ta thin film structures. in Optical and Quantum Electronics, 50(6), 257. https://doi.org/10.1007/s11082-018-1525-x
Obradović MO, Kovač J, Petrović S, Lazović VM, Salatić B, Ciganović J, Pjević DJ, Milosavljević M, Peruško D. Laser induced mixing in multilayered Ti/Ta thin film structures. in Optical and Quantum Electronics. 2018;50(6):257. doi:10.1007/s11082-018-1525-x .
Obradović, Marko O., Kovač, Janez, Petrović, Suzana, Lazović, Vladimir M., Salatić, Branislav, Ciganović, Jovan, Pjević, Dejan J., Milosavljević, Momir, Peruško, Davor, "Laser induced mixing in multilayered Ti/Ta thin film structures" in Optical and Quantum Electronics, 50, no. 6 (2018):257, https://doi.org/10.1007/s11082-018-1525-x . .