Interaction of low energy electrons with iron surface: Energy loss and penetration depths

Abstract

We present Monte Carlo simulation of low energy electrons backscattered from iron (Fe) surface. We take into account both elastic and inelastic collisions during the simulation. In our simulations the primary electron energy is 150 eV and the incidence angle of the electron beam with respect to the surface is varied between 1 degrees and 90 degrees. The backscattered electron energy loss distributions for primary and as well for secondary electrons and the distribution of maximum electron penetration depths in the Fe sample were calculated using only the bulk and also the surface dielectric function.