Microstructural Changes of Chromium-Nitride Thin Films Induced By Argon Ion Implantation
Само за регистроване кориснике
2008
Аутори
Novaković, Mirjana M.Popović, Maja
Milosavljević, Momir
Peruško, Davor
Milinović, Velimir
Radović, Ivan
Bibić, Nataša M.
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
This paper presents a study of the structure and composition of Cr-N thin films as a function of deposition parameters and ion irradiation. Thin films were deposited by reactive ion sputtering on (100) Si substrates, to a thickness of 240-280 nm, at different nitrogen partial pressures. After deposition the samples were irradiated with 120 keV argon ions, to the fluences of 1 x 10(15) and 1 x 10(16) ions/cm(2). Structural characterization of the samples was performed by Rutherford backscattering spectrometry, x-ray diffraction and cross-sectional transmission electron microscopy. It was found that the film composition, Cr2N or CrN, strongly depends on the nitrogen partial pressure during deposition. Ion irradiation induces local microstructural changes, formation of nanoparticles mid defects.
Извор:
Publications of the Astronomical Observatory of Belgrade, 2008, 84, 201-204Финансирање / пројекти:
- Модификација, синтеза и анализа наноструктурних материјала јонским сноповима, гама зрачењем и вакуумским депоновањем (RS-MESTD-MPN2006-2010-141013)
Напомена:
- 24th Summer School and International Symposium on Physics of Ionized Gases, Aug 25-29, 2008, Novi Sad, Serbia
Колекције
Институција/група
VinčaTY - CONF AU - Novaković, Mirjana M. AU - Popović, Maja AU - Milosavljević, Momir AU - Peruško, Davor AU - Milinović, Velimir AU - Radović, Ivan AU - Bibić, Nataša M. PY - 2008 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6827 AB - This paper presents a study of the structure and composition of Cr-N thin films as a function of deposition parameters and ion irradiation. Thin films were deposited by reactive ion sputtering on (100) Si substrates, to a thickness of 240-280 nm, at different nitrogen partial pressures. After deposition the samples were irradiated with 120 keV argon ions, to the fluences of 1 x 10(15) and 1 x 10(16) ions/cm(2). Structural characterization of the samples was performed by Rutherford backscattering spectrometry, x-ray diffraction and cross-sectional transmission electron microscopy. It was found that the film composition, Cr2N or CrN, strongly depends on the nitrogen partial pressure during deposition. Ion irradiation induces local microstructural changes, formation of nanoparticles mid defects. C3 - Publications of the Astronomical Observatory of Belgrade T1 - Microstructural Changes of Chromium-Nitride Thin Films Induced By Argon Ion Implantation IS - 84 SP - 201 EP - 204 UR - https://hdl.handle.net/21.15107/rcub_vinar_6827 ER -
@conference{ author = "Novaković, Mirjana M. and Popović, Maja and Milosavljević, Momir and Peruško, Davor and Milinović, Velimir and Radović, Ivan and Bibić, Nataša M.", year = "2008", abstract = "This paper presents a study of the structure and composition of Cr-N thin films as a function of deposition parameters and ion irradiation. Thin films were deposited by reactive ion sputtering on (100) Si substrates, to a thickness of 240-280 nm, at different nitrogen partial pressures. After deposition the samples were irradiated with 120 keV argon ions, to the fluences of 1 x 10(15) and 1 x 10(16) ions/cm(2). Structural characterization of the samples was performed by Rutherford backscattering spectrometry, x-ray diffraction and cross-sectional transmission electron microscopy. It was found that the film composition, Cr2N or CrN, strongly depends on the nitrogen partial pressure during deposition. Ion irradiation induces local microstructural changes, formation of nanoparticles mid defects.", journal = "Publications of the Astronomical Observatory of Belgrade", title = "Microstructural Changes of Chromium-Nitride Thin Films Induced By Argon Ion Implantation", number = "84", pages = "201-204", url = "https://hdl.handle.net/21.15107/rcub_vinar_6827" }
Novaković, M. M., Popović, M., Milosavljević, M., Peruško, D., Milinović, V., Radović, I.,& Bibić, N. M.. (2008). Microstructural Changes of Chromium-Nitride Thin Films Induced By Argon Ion Implantation. in Publications of the Astronomical Observatory of Belgrade(84), 201-204. https://hdl.handle.net/21.15107/rcub_vinar_6827
Novaković MM, Popović M, Milosavljević M, Peruško D, Milinović V, Radović I, Bibić NM. Microstructural Changes of Chromium-Nitride Thin Films Induced By Argon Ion Implantation. in Publications of the Astronomical Observatory of Belgrade. 2008;(84):201-204. https://hdl.handle.net/21.15107/rcub_vinar_6827 .
Novaković, Mirjana M., Popović, Maja, Milosavljević, Momir, Peruško, Davor, Milinović, Velimir, Radović, Ivan, Bibić, Nataša M., "Microstructural Changes of Chromium-Nitride Thin Films Induced By Argon Ion Implantation" in Publications of the Astronomical Observatory of Belgrade, no. 84 (2008):201-204, https://hdl.handle.net/21.15107/rcub_vinar_6827 .