Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers
Apstrakt
In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.
Ključne reči:
Nd : YAG laser / OM / SEM / TEA CO2 laser / TiN thin filmIzvor:
Materials Science Forum, 2006, 518, 161-166Napomena:
- Recent Developments in Advanced Materials and Processes, 7th Conference of the Yugoslav-Materials-Research-Society (Yu-MRS), Sep 12-16, 2005, Herceg Novi, Montenegro
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Gaković, Biljana M. AU - Pongrac, I. AU - Petrović, Suzana AU - Minic, D. AU - Trtica, Milan PY - 2006 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6601 AB - In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser. T2 - Materials Science Forum T1 - Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers VL - 518 SP - 161 EP - 166 DO - 10.4028/www.scientific.net/MSF.518.161 ER -
@article{ author = "Gaković, Biljana M. and Pongrac, I. and Petrović, Suzana and Minic, D. and Trtica, Milan", year = "2006", abstract = "In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.", journal = "Materials Science Forum", title = "Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers", volume = "518", pages = "161-166", doi = "10.4028/www.scientific.net/MSF.518.161" }
Gaković, B. M., Pongrac, I., Petrović, S., Minic, D.,& Trtica, M.. (2006). Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers. in Materials Science Forum, 518, 161-166. https://doi.org/10.4028/www.scientific.net/MSF.518.161
Gaković BM, Pongrac I, Petrović S, Minic D, Trtica M. Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers. in Materials Science Forum. 2006;518:161-166. doi:10.4028/www.scientific.net/MSF.518.161 .
Gaković, Biljana M., Pongrac, I., Petrović, Suzana, Minic, D., Trtica, Milan, "Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers" in Materials Science Forum, 518 (2006):161-166, https://doi.org/10.4028/www.scientific.net/MSF.518.161 . .