Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions

Uglov, Vladimir Vasilevich; Abadias, Gregory; Rovbut, A. Y.; Zlotski, Sergey V.; Saladukhin, Ihar A.; Skuratov, Vladimir A.; Petrović, Srđan M.

doi:10.1016/j.nimb.2014.11.012

dc.creator	Uglov, Vladimir Vasilevich
dc.creator	Abadias, Gregory
dc.creator	Rovbut, A. Y.
dc.creator	Zlotski, Sergey V.
dc.creator	Saladukhin, Ihar A.
dc.creator	Skuratov, Vladimir A.
dc.creator	Petrović, Srđan M.
dc.date.accessioned	2018-03-01T16:13:50Z
dc.date.available	2018-03-01T16:13:50Z
dc.date.issued	2015
dc.identifier.issn	0168-583X
dc.identifier.issn	1872-9584
dc.identifier.uri	https://vinar.vin.bg.ac.rs/handle/123456789/612
dc.description.abstract	The influence of irradiation with He+ ions on the thermal stability of TiZrN and (Ti,Zr)(0.54)Al0.46N nanocrystalline films was studied. The TiZrN and (Ti,Zr)(0.54)Al0.46N films were prepared by reactive magnetron sputtering. XRD research showed that the TiZrN and (Ti,Zr)(0.54)Al0.6N films were single-phase systems (based on cubic c-(Ti,Zr)N and cubic c-(Ti,Zr,AI)N solid solutions) with nanocrystalline (grain size 30 and 21 nm, respectively) structure. The irradiation with He ions and thermal annealing up to 800 degrees C do not affect the structure and phase composition of the (Ti,Zr)(0.54)Al0.46N film. The prior irradiation of the (Ti,Zr)(0.54)Al0.46N film with He+ ions activates spinodal decomposition of the c-(Ti,Zr,Al)N solid solution after thermal annealing at 1000 degrees C due to redistribution of the components of the solid solution inside the grains. (C) 2014 Elsevier B.V. All rights reserved.	en
dc.relation	info:eu-repo/grantAgreement/MESTD/Integrated and Interdisciplinary Research (IIR or III)/45006/RS//
dc.relation	Belarusian Republic Foundation for Fundamental Research [F13F-003], Centre National de la Recherche Scientifique (bilateral project CNRS/FRFRB) [EDC25728]
dc.rights	restrictedAccess	en
dc.source	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms	en
dc.subject	Nanocrystalline nitrides	en
dc.subject	Helium ion irradiation	en
dc.subject	Radiation and thermal stability	en
dc.subject	Spinodal decomposition	en
dc.title	Thermal stability of nanocrystalline (Ti,Zr)(0.54)Al0.46N films implanted by He+ ions	en
dc.type	article	en
dc.rights.license	ARR
dcterms.abstract	Злотски, С. В.; Ровбут, A. Y.; Aбадиас, Г.; Саладукхин, И. A.; Углов, В. В.; Скуратов, В. A.; Петровицх, С.;
dc.citation.volume	354
dc.citation.spage	269
dc.citation.epage	273
dc.identifier.wos	000356193900060
dc.identifier.doi	10.1016/j.nimb.2014.11.012
dc.citation.rank	M22
dc.type.version	publishedVersion
dc.identifier.scopus	2-s2.0-84939953835

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