Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses
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Petrović, SuzanaPeruško, Davor
Kovač, Janez
Siketic, Z.
Bogdanović-Radović, Ivančica
Gaković, Biljana M.
Radak, Bojan
Trtica, Milan
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The surface oxidation of Ni/Ti bilayer, deposited on silicon substrate, affected by picosecond Nd: YAG laser radiation has been investigated. Fluence close to the target ablation threshold and multi-pulse laser irradiation regime were applied. Changes in the chemical composition of the formed surface oxide layer were studied by Elastic Recoil Detection Analysis (ERDA) and X-ray photoelectron spectroscopy (XPS). Morphological features analysis, at the oxide surface layer, was monitored, too. Laser modification as-deposited (Ni/Ti)/Si sample with 10 pulses induces a progressed interaction between Ni and Ti layers with the initial surface oxidation and formation of NiTi alloy phase. Progressed intermixing of components was achieved for the irradiation with 50 and more pulses, when all components were quite uniformly distributed to a depth of about 80 nm. An oxide layer was formed at the surface, with the specific combination of the oxide phases depending on the number of accumulated pulse...s. Changes in the morphological characteristics are reflected in the increase of the mean surface roughness and the generation of a certain number of cavities. These features are decreased with increasing number of pulses, caused by the surface melting and a pronounced mobility of the materials. (C) 2013 Elsevier B.V. All rights reserved.
Keywords:
Thin films / Oxides / Laser annealing / X-ray photo-emission spectroscopy / Oxidation / DiffusionSource:
Materials Chemistry and Physics, 2014, 143, 2, 530-535Funding / projects:
- Effects of laser radiation and plasma on novel materials in their synthesis, modification, and analysis (RS-MESTD-Basic Research (BR or ON)-172019)
- Fabrication and characterization of nano-photonic functional structrues in biomedicine and informatics (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45016)
- European Community, COST Action [CM1104], Slovenian Research Agency, Ministry of Science, Education, and Sports of the Republic of Croatia
DOI: 10.1016/j.matchemphys.2013.09.021
ISSN: 0254-0584; 1879-3312
WoS: 000329888300010
Scopus: 2-s2.0-84888201347
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VinčaTY - JOUR AU - Petrović, Suzana AU - Peruško, Davor AU - Kovač, Janez AU - Siketic, Z. AU - Bogdanović-Radović, Ivančica AU - Gaković, Biljana M. AU - Radak, Bojan AU - Trtica, Milan PY - 2014 UR - https://vinar.vin.bg.ac.rs/handle/123456789/5842 AB - The surface oxidation of Ni/Ti bilayer, deposited on silicon substrate, affected by picosecond Nd: YAG laser radiation has been investigated. Fluence close to the target ablation threshold and multi-pulse laser irradiation regime were applied. Changes in the chemical composition of the formed surface oxide layer were studied by Elastic Recoil Detection Analysis (ERDA) and X-ray photoelectron spectroscopy (XPS). Morphological features analysis, at the oxide surface layer, was monitored, too. Laser modification as-deposited (Ni/Ti)/Si sample with 10 pulses induces a progressed interaction between Ni and Ti layers with the initial surface oxidation and formation of NiTi alloy phase. Progressed intermixing of components was achieved for the irradiation with 50 and more pulses, when all components were quite uniformly distributed to a depth of about 80 nm. An oxide layer was formed at the surface, with the specific combination of the oxide phases depending on the number of accumulated pulses. Changes in the morphological characteristics are reflected in the increase of the mean surface roughness and the generation of a certain number of cavities. These features are decreased with increasing number of pulses, caused by the surface melting and a pronounced mobility of the materials. (C) 2013 Elsevier B.V. All rights reserved. T2 - Materials Chemistry and Physics T1 - Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses VL - 143 IS - 2 SP - 530 EP - 535 DO - 10.1016/j.matchemphys.2013.09.021 ER -
@article{ author = "Petrović, Suzana and Peruško, Davor and Kovač, Janez and Siketic, Z. and Bogdanović-Radović, Ivančica and Gaković, Biljana M. and Radak, Bojan and Trtica, Milan", year = "2014", abstract = "The surface oxidation of Ni/Ti bilayer, deposited on silicon substrate, affected by picosecond Nd: YAG laser radiation has been investigated. Fluence close to the target ablation threshold and multi-pulse laser irradiation regime were applied. Changes in the chemical composition of the formed surface oxide layer were studied by Elastic Recoil Detection Analysis (ERDA) and X-ray photoelectron spectroscopy (XPS). Morphological features analysis, at the oxide surface layer, was monitored, too. Laser modification as-deposited (Ni/Ti)/Si sample with 10 pulses induces a progressed interaction between Ni and Ti layers with the initial surface oxidation and formation of NiTi alloy phase. Progressed intermixing of components was achieved for the irradiation with 50 and more pulses, when all components were quite uniformly distributed to a depth of about 80 nm. An oxide layer was formed at the surface, with the specific combination of the oxide phases depending on the number of accumulated pulses. Changes in the morphological characteristics are reflected in the increase of the mean surface roughness and the generation of a certain number of cavities. These features are decreased with increasing number of pulses, caused by the surface melting and a pronounced mobility of the materials. (C) 2013 Elsevier B.V. All rights reserved.", journal = "Materials Chemistry and Physics", title = "Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses", volume = "143", number = "2", pages = "530-535", doi = "10.1016/j.matchemphys.2013.09.021" }
Petrović, S., Peruško, D., Kovač, J., Siketic, Z., Bogdanović-Radović, I., Gaković, B. M., Radak, B.,& Trtica, M.. (2014). Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses. in Materials Chemistry and Physics, 143(2), 530-535. https://doi.org/10.1016/j.matchemphys.2013.09.021
Petrović S, Peruško D, Kovač J, Siketic Z, Bogdanović-Radović I, Gaković BM, Radak B, Trtica M. Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses. in Materials Chemistry and Physics. 2014;143(2):530-535. doi:10.1016/j.matchemphys.2013.09.021 .
Petrović, Suzana, Peruško, Davor, Kovač, Janez, Siketic, Z., Bogdanović-Radović, Ivančica, Gaković, Biljana M., Radak, Bojan, Trtica, Milan, "Laser-induced surface oxidation of (Ni/Ti)/Si system with picosecond laser pulses" in Materials Chemistry and Physics, 143, no. 2 (2014):530-535, https://doi.org/10.1016/j.matchemphys.2013.09.021 . .