Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser
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Petrović, SuzanaPeruško, Davor
Radović-Bogdanović, I.
Branković, Goran O.
Čekada, Miha
Gaković, Biljana M.
Jaksic, M.
Trtica, Milan
Milosavljević, Momir
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In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface ...oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase.
Keywords:
WTi coating / surface modification / microstructure / interface / oxidationSource:
Metals and Materials International, 2012, 18, 3, 457-463Funding / projects:
- Effects of laser radiation and plasma on novel materials in their synthesis, modification, and analysis (RS-MESTD-Basic Research (BR or ON)-172019)
- Fabrication and characterization of nano-photonic functional structrues in biomedicine and informatics (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45016)
- Slovenian Research Agency, Ministry of Science, Education and Sports of the Republic of Croatia
DOI: 10.1007/s12540-012-3012-4
ISSN: 1598-9623
WoS: 000305689900012
Scopus: 2-s2.0-84863816228
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VinčaTY - JOUR AU - Petrović, Suzana AU - Peruško, Davor AU - Radović-Bogdanović, I. AU - Branković, Goran O. AU - Čekada, Miha AU - Gaković, Biljana M. AU - Jaksic, M. AU - Trtica, Milan AU - Milosavljević, Momir PY - 2012 UR - https://vinar.vin.bg.ac.rs/handle/123456789/4912 AB - In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase. T2 - Metals and Materials International T1 - Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser VL - 18 IS - 3 SP - 457 EP - 463 DO - 10.1007/s12540-012-3012-4 ER -
@article{ author = "Petrović, Suzana and Peruško, Davor and Radović-Bogdanović, I. and Branković, Goran O. and Čekada, Miha and Gaković, Biljana M. and Jaksic, M. and Trtica, Milan and Milosavljević, Momir", year = "2012", abstract = "In this work we studied the influence of laser radiation on the composition, structure and morphology of WTi thin films deposited on n-type (100) silicon wafers. The films were deposited by d.c. sputtering from a 70:30 at% W-Ti target, using Ar ions, to a thickness of similar to 190 nm. Irradiation was performed with a pulsed Nd:YAG laser operating at 1064 nm, whereas the pulse duration was 150 ps. Laser fluences of 3.2 and 5.9 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The results show: (i) ablation of WTi thin film and a Si substrate in the central zone of spots, (ii) appearance of hydrodynamic features like resolidified material, (iii) partial ablation of the WTi thin film at the periphery and (iv) appearance of thin film cracks at the far periphery. On the non-ablated areas, the laser modification induced changes in composition, such as inter-mixing of components at the WTi/Si interface with formation of silicides in both metals. Surface oxidation was the dominant process in the ablated areas, which is demonstrated by the presence of a SiO2 phase.", journal = "Metals and Materials International", title = "Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser", volume = "18", number = "3", pages = "457-463", doi = "10.1007/s12540-012-3012-4" }
Petrović, S., Peruško, D., Radović-Bogdanović, I., Branković, G. O., Čekada, M., Gaković, B. M., Jaksic, M., Trtica, M.,& Milosavljević, M.. (2012). Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser. in Metals and Materials International, 18(3), 457-463. https://doi.org/10.1007/s12540-012-3012-4
Petrović S, Peruško D, Radović-Bogdanović I, Branković GO, Čekada M, Gaković BM, Jaksic M, Trtica M, Milosavljević M. Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser. in Metals and Materials International. 2012;18(3):457-463. doi:10.1007/s12540-012-3012-4 .
Petrović, Suzana, Peruško, Davor, Radović-Bogdanović, I., Branković, Goran O., Čekada, Miha, Gaković, Biljana M., Jaksic, M., Trtica, Milan, Milosavljević, Momir, "Evaluation of the composition and morphology of a WTi/Si system processed by a picosecond laser" in Metals and Materials International, 18, no. 3 (2012):457-463, https://doi.org/10.1007/s12540-012-3012-4 . .