Experimental and Theoretical Investigations of Cured and Uncured Disiloxane Bisbenzocyclobutene Thin Films
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Ivanović, NenadMarjanović, Nenad
Grbović-Novaković, Jasmina
Manasijević, Miodrag
Rakočević, Zlatko Lj.
Andrić, Velibor
Hadžić, Branka B.
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The main challenge in the large-scale commercial applications of benzocyclobutene (BCB) dielectrics is to perform their curing rapidly and efficiently at low temperatures, and in the same time, to obtain large area, high quality, pinhole free dielectric thin films. For that purpose, we investigated numerous uncured and cured BCB films, approximately 2 mu m thick, spin-coated on glass/ITO surface, using optical and AFM microscopy, infrared (IR) and Raman spectroscopy, and complete these results with appropriate Linear Combination of Atomic Orbitals (LCAO) calculations. That way we relate microscopic characteristics of the involved molecules, and macroscopic properties of the cured and uncured polymers, which is important for their practical applications.
Keywords:
AFM / Calculations / Curing / Disiloxane bisbenzocyclobutene / IR and Raman spectroscopy / Thin filmsSource:
Materials and Manufacturing Processes, 2009, 24, 10-11, 1180-1184Funding / projects:
- Istraživanja lokalnih struktura i klastera u čvrstom stanju (RS-MESTD-MPN2006-2010-141009)
DOI: 10.1080/10426910902978811
ISSN: 1042-6914
WoS: 000274699700024
Scopus: 2-s2.0-77949558681
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VinčaTY - JOUR AU - Ivanović, Nenad AU - Marjanović, Nenad AU - Grbović-Novaković, Jasmina AU - Manasijević, Miodrag AU - Rakočević, Zlatko Lj. AU - Andrić, Velibor AU - Hadžić, Branka B. PY - 2009 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3906 AB - The main challenge in the large-scale commercial applications of benzocyclobutene (BCB) dielectrics is to perform their curing rapidly and efficiently at low temperatures, and in the same time, to obtain large area, high quality, pinhole free dielectric thin films. For that purpose, we investigated numerous uncured and cured BCB films, approximately 2 mu m thick, spin-coated on glass/ITO surface, using optical and AFM microscopy, infrared (IR) and Raman spectroscopy, and complete these results with appropriate Linear Combination of Atomic Orbitals (LCAO) calculations. That way we relate microscopic characteristics of the involved molecules, and macroscopic properties of the cured and uncured polymers, which is important for their practical applications. T2 - Materials and Manufacturing Processes T1 - Experimental and Theoretical Investigations of Cured and Uncured Disiloxane Bisbenzocyclobutene Thin Films VL - 24 IS - 10-11 SP - 1180 EP - 1184 DO - 10.1080/10426910902978811 ER -
@article{ author = "Ivanović, Nenad and Marjanović, Nenad and Grbović-Novaković, Jasmina and Manasijević, Miodrag and Rakočević, Zlatko Lj. and Andrić, Velibor and Hadžić, Branka B.", year = "2009", abstract = "The main challenge in the large-scale commercial applications of benzocyclobutene (BCB) dielectrics is to perform their curing rapidly and efficiently at low temperatures, and in the same time, to obtain large area, high quality, pinhole free dielectric thin films. For that purpose, we investigated numerous uncured and cured BCB films, approximately 2 mu m thick, spin-coated on glass/ITO surface, using optical and AFM microscopy, infrared (IR) and Raman spectroscopy, and complete these results with appropriate Linear Combination of Atomic Orbitals (LCAO) calculations. That way we relate microscopic characteristics of the involved molecules, and macroscopic properties of the cured and uncured polymers, which is important for their practical applications.", journal = "Materials and Manufacturing Processes", title = "Experimental and Theoretical Investigations of Cured and Uncured Disiloxane Bisbenzocyclobutene Thin Films", volume = "24", number = "10-11", pages = "1180-1184", doi = "10.1080/10426910902978811" }
Ivanović, N., Marjanović, N., Grbović-Novaković, J., Manasijević, M., Rakočević, Z. Lj., Andrić, V.,& Hadžić, B. B.. (2009). Experimental and Theoretical Investigations of Cured and Uncured Disiloxane Bisbenzocyclobutene Thin Films. in Materials and Manufacturing Processes, 24(10-11), 1180-1184. https://doi.org/10.1080/10426910902978811
Ivanović N, Marjanović N, Grbović-Novaković J, Manasijević M, Rakočević ZL, Andrić V, Hadžić BB. Experimental and Theoretical Investigations of Cured and Uncured Disiloxane Bisbenzocyclobutene Thin Films. in Materials and Manufacturing Processes. 2009;24(10-11):1180-1184. doi:10.1080/10426910902978811 .
Ivanović, Nenad, Marjanović, Nenad, Grbović-Novaković, Jasmina, Manasijević, Miodrag, Rakočević, Zlatko Lj., Andrić, Velibor, Hadžić, Branka B., "Experimental and Theoretical Investigations of Cured and Uncured Disiloxane Bisbenzocyclobutene Thin Films" in Materials and Manufacturing Processes, 24, no. 10-11 (2009):1180-1184, https://doi.org/10.1080/10426910902978811 . .