Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties
Apstrakt
Nickel thin films were deposited on glass substrates at different N-2 gas contents using a dc triode sputtering deposition system. Triode configuration was used to deposit nanostructured thin films with preferred orientation at lower gas pressure and at lower substrate temperature compared to the dc diode sputtering system. A gradual evolution in the composition of the films from Ni, Ni(N), to Ni3N was found by X-ray diffraction analysis. The preferred growth orientation of the nanostructured Ni films changed from (1 1 1) to (1 0 0) for 9% N-2 at 100 degrees C. Ni3N films were formed at 23% N-2 with a particle size of about 65 nm, while for 0% and 9% of nitrogen, the particles sizes were 60 nm, and 37 nm, respectively, as obtained by atomic force microscopy. Magnetic force microscopy imaging showed that the local magnetic structure changed from disordered stripe domains of about 200 nm for Ni and Ni(N) to a structure without a magnetic contrast, indicating the paramagnetic state of thi...s material, which confirmed the structural transformation from Ni to Ni3N. (C) 2008 Elsevier B. V. All rights reserved.
Ključne reči:
Nitrides / Thin films / Atomic force microscopy (AFM) / Magnetic propertiesIzvor:
Applied Surface Science, 2009, 255, 7, 4027-4032Finansiranje / projekti:
- Dobijanje i karakterizacija površina nanostrukturnih materijala (RS-MESTD-MPN2006-2010-141001)
DOI: 10.1016/j.apsusc.2008.10.076
ISSN: 0169-4332
WoS: 000262245500021
Scopus: 2-s2.0-58149177183
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Popovic, N. AU - Bogdanov, Žarko AU - Goncić, Bratislav AU - Štrbac, Svetlana AU - Rakočević, Zlatko Lj. PY - 2009 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3610 AB - Nickel thin films were deposited on glass substrates at different N-2 gas contents using a dc triode sputtering deposition system. Triode configuration was used to deposit nanostructured thin films with preferred orientation at lower gas pressure and at lower substrate temperature compared to the dc diode sputtering system. A gradual evolution in the composition of the films from Ni, Ni(N), to Ni3N was found by X-ray diffraction analysis. The preferred growth orientation of the nanostructured Ni films changed from (1 1 1) to (1 0 0) for 9% N-2 at 100 degrees C. Ni3N films were formed at 23% N-2 with a particle size of about 65 nm, while for 0% and 9% of nitrogen, the particles sizes were 60 nm, and 37 nm, respectively, as obtained by atomic force microscopy. Magnetic force microscopy imaging showed that the local magnetic structure changed from disordered stripe domains of about 200 nm for Ni and Ni(N) to a structure without a magnetic contrast, indicating the paramagnetic state of this material, which confirmed the structural transformation from Ni to Ni3N. (C) 2008 Elsevier B. V. All rights reserved. T2 - Applied Surface Science T1 - Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties VL - 255 IS - 7 SP - 4027 EP - 4032 DO - 10.1016/j.apsusc.2008.10.076 ER -
@article{ author = "Popovic, N. and Bogdanov, Žarko and Goncić, Bratislav and Štrbac, Svetlana and Rakočević, Zlatko Lj.", year = "2009", abstract = "Nickel thin films were deposited on glass substrates at different N-2 gas contents using a dc triode sputtering deposition system. Triode configuration was used to deposit nanostructured thin films with preferred orientation at lower gas pressure and at lower substrate temperature compared to the dc diode sputtering system. A gradual evolution in the composition of the films from Ni, Ni(N), to Ni3N was found by X-ray diffraction analysis. The preferred growth orientation of the nanostructured Ni films changed from (1 1 1) to (1 0 0) for 9% N-2 at 100 degrees C. Ni3N films were formed at 23% N-2 with a particle size of about 65 nm, while for 0% and 9% of nitrogen, the particles sizes were 60 nm, and 37 nm, respectively, as obtained by atomic force microscopy. Magnetic force microscopy imaging showed that the local magnetic structure changed from disordered stripe domains of about 200 nm for Ni and Ni(N) to a structure without a magnetic contrast, indicating the paramagnetic state of this material, which confirmed the structural transformation from Ni to Ni3N. (C) 2008 Elsevier B. V. All rights reserved.", journal = "Applied Surface Science", title = "Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties", volume = "255", number = "7", pages = "4027-4032", doi = "10.1016/j.apsusc.2008.10.076" }
Popovic, N., Bogdanov, Ž., Goncić, B., Štrbac, S.,& Rakočević, Z. Lj.. (2009). Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties. in Applied Surface Science, 255(7), 4027-4032. https://doi.org/10.1016/j.apsusc.2008.10.076
Popovic N, Bogdanov Ž, Goncić B, Štrbac S, Rakočević ZL. Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties. in Applied Surface Science. 2009;255(7):4027-4032. doi:10.1016/j.apsusc.2008.10.076 .
Popovic, N., Bogdanov, Žarko, Goncić, Bratislav, Štrbac, Svetlana, Rakočević, Zlatko Lj., "Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties" in Applied Surface Science, 255, no. 7 (2009):4027-4032, https://doi.org/10.1016/j.apsusc.2008.10.076 . .