Composition of the sputter deposited W-Ti thin films
Apstrakt
Tungsten-titanium (W-Ti) thin film was deposited by dc Ar(+) sputtering of W(70 at.%)-Ti(30 at.%) target. The thin film composition, determined by X-ray photoelectron spectroscopy (XPS) depth pro. ling, is W((0.77 +/- 0.07)) Ti((0.08 +/- 0.03))O((0.15 +/- 0.03)). The presence of oxygen in the deposit is due to the rather poor vacuum conditions during the deposition, while significant deficiency of Ti, as compared to the sputtering target composition cannot be explained straightforwardly. Monte Carlo simulations of both, transport of sputtered particles from target to the substrate through the background gas (SRIM 2003 program) and thin film sputtering during the XPS depth pro. ling ( program TRIDYN_FZR) are presented. The simulations show that the particle transport through the background gas is mainly responsible for the Ti depletion: the estimated composition of the thin film is W(0.61)Ti(0.16)O(0.23). Additional apparent Ti depletion occurs due to the preferential sputtering during ...the thin film composition analysis. The simulation of the sputtering process show that the surface concentration measured by XPS should be about W(0.74)Ti(0.11)O(0.15). The discrepancy between the estimated surface composition and the actual experimental result is in the range of the experimental error. (c) 2008 Elsevier B.V. All rights reserved.
Ključne reči:
W-Ti thin films / sputtering deposition / preferential sputtering / XPS / Monte CarloIzvor:
Applied Surface Science, 2008, 254, 20, 6390-6394
DOI: 10.1016/j.apsusc.2008.03.179
ISSN: 0169-4332
WoS: 000257950100019
Scopus: 2-s2.0-47649095669
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Bundaleski, Nenad AU - Petrović, Suzana AU - Peruško, Davor AU - Kovač, Janez AU - Zalar, A. PY - 2008 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3498 AB - Tungsten-titanium (W-Ti) thin film was deposited by dc Ar(+) sputtering of W(70 at.%)-Ti(30 at.%) target. The thin film composition, determined by X-ray photoelectron spectroscopy (XPS) depth pro. ling, is W((0.77 +/- 0.07)) Ti((0.08 +/- 0.03))O((0.15 +/- 0.03)). The presence of oxygen in the deposit is due to the rather poor vacuum conditions during the deposition, while significant deficiency of Ti, as compared to the sputtering target composition cannot be explained straightforwardly. Monte Carlo simulations of both, transport of sputtered particles from target to the substrate through the background gas (SRIM 2003 program) and thin film sputtering during the XPS depth pro. ling ( program TRIDYN_FZR) are presented. The simulations show that the particle transport through the background gas is mainly responsible for the Ti depletion: the estimated composition of the thin film is W(0.61)Ti(0.16)O(0.23). Additional apparent Ti depletion occurs due to the preferential sputtering during the thin film composition analysis. The simulation of the sputtering process show that the surface concentration measured by XPS should be about W(0.74)Ti(0.11)O(0.15). The discrepancy between the estimated surface composition and the actual experimental result is in the range of the experimental error. (c) 2008 Elsevier B.V. All rights reserved. T2 - Applied Surface Science T1 - Composition of the sputter deposited W-Ti thin films VL - 254 IS - 20 SP - 6390 EP - 6394 DO - 10.1016/j.apsusc.2008.03.179 ER -
@article{ author = "Bundaleski, Nenad and Petrović, Suzana and Peruško, Davor and Kovač, Janez and Zalar, A.", year = "2008", abstract = "Tungsten-titanium (W-Ti) thin film was deposited by dc Ar(+) sputtering of W(70 at.%)-Ti(30 at.%) target. The thin film composition, determined by X-ray photoelectron spectroscopy (XPS) depth pro. ling, is W((0.77 +/- 0.07)) Ti((0.08 +/- 0.03))O((0.15 +/- 0.03)). The presence of oxygen in the deposit is due to the rather poor vacuum conditions during the deposition, while significant deficiency of Ti, as compared to the sputtering target composition cannot be explained straightforwardly. Monte Carlo simulations of both, transport of sputtered particles from target to the substrate through the background gas (SRIM 2003 program) and thin film sputtering during the XPS depth pro. ling ( program TRIDYN_FZR) are presented. The simulations show that the particle transport through the background gas is mainly responsible for the Ti depletion: the estimated composition of the thin film is W(0.61)Ti(0.16)O(0.23). Additional apparent Ti depletion occurs due to the preferential sputtering during the thin film composition analysis. The simulation of the sputtering process show that the surface concentration measured by XPS should be about W(0.74)Ti(0.11)O(0.15). The discrepancy between the estimated surface composition and the actual experimental result is in the range of the experimental error. (c) 2008 Elsevier B.V. All rights reserved.", journal = "Applied Surface Science", title = "Composition of the sputter deposited W-Ti thin films", volume = "254", number = "20", pages = "6390-6394", doi = "10.1016/j.apsusc.2008.03.179" }
Bundaleski, N., Petrović, S., Peruško, D., Kovač, J.,& Zalar, A.. (2008). Composition of the sputter deposited W-Ti thin films. in Applied Surface Science, 254(20), 6390-6394. https://doi.org/10.1016/j.apsusc.2008.03.179
Bundaleski N, Petrović S, Peruško D, Kovač J, Zalar A. Composition of the sputter deposited W-Ti thin films. in Applied Surface Science. 2008;254(20):6390-6394. doi:10.1016/j.apsusc.2008.03.179 .
Bundaleski, Nenad, Petrović, Suzana, Peruško, Davor, Kovač, Janez, Zalar, A., "Composition of the sputter deposited W-Ti thin films" in Applied Surface Science, 254, no. 20 (2008):6390-6394, https://doi.org/10.1016/j.apsusc.2008.03.179 . .