Diamond coating deposition by synergy of thermal and laser methods - A problem revisited
Abstract
Diamond coatings were deposited by synergy of the hot filament CVD method and the pulse TEA CO2 laser, in spectroactive and spectroinactive diamond precursor atmospheres. Resulting diamond coatings are interpreted relying on evidence of scanning electron microscopy as well as microRaman spectroscopy. Thermal synergy component (hot filament) possesses an activating agent for diamond deposition, and contributes significantly to quality and extent of diamond deposition. Laser synergy component comprises a solid surface modification as well as the spectroactive gaseous atmosphere modification. Surface modification consists in changes of the diamond coating being deposited and, at the same time, in changes of the substrate surface structure. Laser modification of the spectroactive diamond precursor atmosphere means specific consumption of the precursor, which enables to skip the deposition on a defined substrate location. The resulting process of diamond coating elimination from certain, de...sired locations using the CO2 laser might contribute to tailoring diamond coatings for particular applications. Additionally, the substrate laser modification could be optimized by choice of a proper spectroactive precursor concentration, or by a laser radiation multiple pass through an absorbing medium. (c) 2006 Elsevier B.V. All rights reserved.
Keywords:
diamond coating / hot filament / CO2-laser / chemical vapour deposition / laser and hot filament synergy / deposition tailoringSource:
Applied Surface Science, 2007, 253, 12, 5233-5239
DOI: 10.1016/j.apsusc.2006.11.045
ISSN: 0169-4332; 1873-5584
WoS: 000246092900010
Scopus: 2-s2.0-33847717877
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VinčaTY - JOUR AU - Ristić, Gordana S. AU - Trtica, Milan AU - Bogdanov, Žarko AU - Romčević, Nebojša Ž. AU - Miljanić, Šćepan S. PY - 2007 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3190 AB - Diamond coatings were deposited by synergy of the hot filament CVD method and the pulse TEA CO2 laser, in spectroactive and spectroinactive diamond precursor atmospheres. Resulting diamond coatings are interpreted relying on evidence of scanning electron microscopy as well as microRaman spectroscopy. Thermal synergy component (hot filament) possesses an activating agent for diamond deposition, and contributes significantly to quality and extent of diamond deposition. Laser synergy component comprises a solid surface modification as well as the spectroactive gaseous atmosphere modification. Surface modification consists in changes of the diamond coating being deposited and, at the same time, in changes of the substrate surface structure. Laser modification of the spectroactive diamond precursor atmosphere means specific consumption of the precursor, which enables to skip the deposition on a defined substrate location. The resulting process of diamond coating elimination from certain, desired locations using the CO2 laser might contribute to tailoring diamond coatings for particular applications. Additionally, the substrate laser modification could be optimized by choice of a proper spectroactive precursor concentration, or by a laser radiation multiple pass through an absorbing medium. (c) 2006 Elsevier B.V. All rights reserved. T2 - Applied Surface Science T1 - Diamond coating deposition by synergy of thermal and laser methods - A problem revisited VL - 253 IS - 12 SP - 5233 EP - 5239 DO - 10.1016/j.apsusc.2006.11.045 ER -
@article{ author = "Ristić, Gordana S. and Trtica, Milan and Bogdanov, Žarko and Romčević, Nebojša Ž. and Miljanić, Šćepan S.", year = "2007", abstract = "Diamond coatings were deposited by synergy of the hot filament CVD method and the pulse TEA CO2 laser, in spectroactive and spectroinactive diamond precursor atmospheres. Resulting diamond coatings are interpreted relying on evidence of scanning electron microscopy as well as microRaman spectroscopy. Thermal synergy component (hot filament) possesses an activating agent for diamond deposition, and contributes significantly to quality and extent of diamond deposition. Laser synergy component comprises a solid surface modification as well as the spectroactive gaseous atmosphere modification. Surface modification consists in changes of the diamond coating being deposited and, at the same time, in changes of the substrate surface structure. Laser modification of the spectroactive diamond precursor atmosphere means specific consumption of the precursor, which enables to skip the deposition on a defined substrate location. The resulting process of diamond coating elimination from certain, desired locations using the CO2 laser might contribute to tailoring diamond coatings for particular applications. Additionally, the substrate laser modification could be optimized by choice of a proper spectroactive precursor concentration, or by a laser radiation multiple pass through an absorbing medium. (c) 2006 Elsevier B.V. All rights reserved.", journal = "Applied Surface Science", title = "Diamond coating deposition by synergy of thermal and laser methods - A problem revisited", volume = "253", number = "12", pages = "5233-5239", doi = "10.1016/j.apsusc.2006.11.045" }
Ristić, G. S., Trtica, M., Bogdanov, Ž., Romčević, N. Ž.,& Miljanić, Š. S.. (2007). Diamond coating deposition by synergy of thermal and laser methods - A problem revisited. in Applied Surface Science, 253(12), 5233-5239. https://doi.org/10.1016/j.apsusc.2006.11.045
Ristić GS, Trtica M, Bogdanov Ž, Romčević NŽ, Miljanić ŠS. Diamond coating deposition by synergy of thermal and laser methods - A problem revisited. in Applied Surface Science. 2007;253(12):5233-5239. doi:10.1016/j.apsusc.2006.11.045 .
Ristić, Gordana S., Trtica, Milan, Bogdanov, Žarko, Romčević, Nebojša Ž., Miljanić, Šćepan S., "Diamond coating deposition by synergy of thermal and laser methods - A problem revisited" in Applied Surface Science, 253, no. 12 (2007):5233-5239, https://doi.org/10.1016/j.apsusc.2006.11.045 . .