Structure and surface composition of NiCr sputtered thin films
2006
Authors
Petrović, SuzanaBundaleski, Nenad
Radović, Marko B.
Ristić, Zoran
Gligorić, Goran
Peruško, Davor
Zec, Slavica
Article
Metadata
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Thin films of nichrome were deposited by d.c. sputtering of a target (80%Ni - 20%Cr w.t.) by Ar+ ions at a working pressure of 10(-1) Pa and at room temperature. The phase composition and grain size were studied by X-ray Diffraction (XRD), while the surface chemical composition was determined by Low Energy Ion Scattering (LEIS). Analysis of phase composition showed that the NiCr thin films were a solid solution of chromium in a nickel matrix with increased nickel lattice parameters. LEIS analysis showed the presence of Ni, Cr and O in the first atomic layer. There is a strong suspicion that surface passivation occurred by forming Cr2O3 oxide at the surface.
Keywords:
nichrome thin films / LEIS / XRDSource:
Science of Sintering, 2006, 38, 2, 155-160
DOI: 10.2298/SOS0602155P
ISSN: 0350-820X
WoS: 000241312100007
Scopus: 2-s2.0-66149178082
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VinčaTY - JOUR AU - Petrović, Suzana AU - Bundaleski, Nenad AU - Radović, Marko B. AU - Ristić, Zoran AU - Gligorić, Goran AU - Peruško, Davor AU - Zec, Slavica PY - 2006 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3099 AB - Thin films of nichrome were deposited by d.c. sputtering of a target (80%Ni - 20%Cr w.t.) by Ar+ ions at a working pressure of 10(-1) Pa and at room temperature. The phase composition and grain size were studied by X-ray Diffraction (XRD), while the surface chemical composition was determined by Low Energy Ion Scattering (LEIS). Analysis of phase composition showed that the NiCr thin films were a solid solution of chromium in a nickel matrix with increased nickel lattice parameters. LEIS analysis showed the presence of Ni, Cr and O in the first atomic layer. There is a strong suspicion that surface passivation occurred by forming Cr2O3 oxide at the surface. T2 - Science of Sintering T1 - Structure and surface composition of NiCr sputtered thin films VL - 38 IS - 2 SP - 155 EP - 160 DO - 10.2298/SOS0602155P ER -
@article{ author = "Petrović, Suzana and Bundaleski, Nenad and Radović, Marko B. and Ristić, Zoran and Gligorić, Goran and Peruško, Davor and Zec, Slavica", year = "2006", abstract = "Thin films of nichrome were deposited by d.c. sputtering of a target (80%Ni - 20%Cr w.t.) by Ar+ ions at a working pressure of 10(-1) Pa and at room temperature. The phase composition and grain size were studied by X-ray Diffraction (XRD), while the surface chemical composition was determined by Low Energy Ion Scattering (LEIS). Analysis of phase composition showed that the NiCr thin films were a solid solution of chromium in a nickel matrix with increased nickel lattice parameters. LEIS analysis showed the presence of Ni, Cr and O in the first atomic layer. There is a strong suspicion that surface passivation occurred by forming Cr2O3 oxide at the surface.", journal = "Science of Sintering", title = "Structure and surface composition of NiCr sputtered thin films", volume = "38", number = "2", pages = "155-160", doi = "10.2298/SOS0602155P" }
Petrović, S., Bundaleski, N., Radović, M. B., Ristić, Z., Gligorić, G., Peruško, D.,& Zec, S.. (2006). Structure and surface composition of NiCr sputtered thin films. in Science of Sintering, 38(2), 155-160. https://doi.org/10.2298/SOS0602155P
Petrović S, Bundaleski N, Radović MB, Ristić Z, Gligorić G, Peruško D, Zec S. Structure and surface composition of NiCr sputtered thin films. in Science of Sintering. 2006;38(2):155-160. doi:10.2298/SOS0602155P .
Petrović, Suzana, Bundaleski, Nenad, Radović, Marko B., Ristić, Zoran, Gligorić, Goran, Peruško, Davor, Zec, Slavica, "Structure and surface composition of NiCr sputtered thin films" in Science of Sintering, 38, no. 2 (2006):155-160, https://doi.org/10.2298/SOS0602155P . .