A multipurpose apparatus for studying the interaction of low energy ions with solid state surface
Апстракт
A new concept of a multipurpose device for the investigation of a low energy in beam interactions with solid state surfaces is realized in an apparatus for surface analysis by means of low energy ion scattering (LEIS), direct recoil spectrometry (DRS), mass spectrometry of recoil ions (MRSI), and secondary-ion mass spectrometry (SIMS). This device provides broad alkali ion beams, homogeneous and much more intense than in standard commercial realizations available, as well as various high quality intense gas ion beams. A long tube with a magnetic quadrupole triplet is introduced. This construction disjoins the high vacuum from the ultrahigh vacuum (UHV) parts of the system and makes possible low cost differential pumping. The use of an UHV broad alkali ion beam in SIMS experiments should importantly decrease crater effect problems without use of rastering and electrical gating systems. In order to demonstrate the possibilities and the advantages of the proposed concept, we present the r...esults of experimental analysis of primary ion beam characteristics, as well as LEIS and DRS experimental results obtained by use of gas ion beams scattered from silver polycrystalline surfaces. This design concept results in a simple and low cost device with operating characteristics comparable to those of high quality devices of similar type. (C) 2000 American Institute of Physics. [S0034-6748(00)00812-1].
Извор:
Review of Scientific Instruments, 2000, 71, 11, 4195-4200
DOI: 10.1063/1.1319985
ISSN: 0034-6748
WoS: 000165084100034
Scopus: 2-s2.0-0000708054
Колекције
Институција/група
VinčaTY - JOUR AU - Terzić, Ivan AU - Bundaleski, Nenad AU - Rakočević, Zlatko Lj. AU - Oklobdzija, N AU - Elazar, Jovan PY - 2000 UR - https://vinar.vin.bg.ac.rs/handle/123456789/2388 AB - A new concept of a multipurpose device for the investigation of a low energy in beam interactions with solid state surfaces is realized in an apparatus for surface analysis by means of low energy ion scattering (LEIS), direct recoil spectrometry (DRS), mass spectrometry of recoil ions (MRSI), and secondary-ion mass spectrometry (SIMS). This device provides broad alkali ion beams, homogeneous and much more intense than in standard commercial realizations available, as well as various high quality intense gas ion beams. A long tube with a magnetic quadrupole triplet is introduced. This construction disjoins the high vacuum from the ultrahigh vacuum (UHV) parts of the system and makes possible low cost differential pumping. The use of an UHV broad alkali ion beam in SIMS experiments should importantly decrease crater effect problems without use of rastering and electrical gating systems. In order to demonstrate the possibilities and the advantages of the proposed concept, we present the results of experimental analysis of primary ion beam characteristics, as well as LEIS and DRS experimental results obtained by use of gas ion beams scattered from silver polycrystalline surfaces. This design concept results in a simple and low cost device with operating characteristics comparable to those of high quality devices of similar type. (C) 2000 American Institute of Physics. [S0034-6748(00)00812-1]. T2 - Review of Scientific Instruments T1 - A multipurpose apparatus for studying the interaction of low energy ions with solid state surface VL - 71 IS - 11 SP - 4195 EP - 4200 DO - 10.1063/1.1319985 ER -
@article{ author = "Terzić, Ivan and Bundaleski, Nenad and Rakočević, Zlatko Lj. and Oklobdzija, N and Elazar, Jovan", year = "2000", abstract = "A new concept of a multipurpose device for the investigation of a low energy in beam interactions with solid state surfaces is realized in an apparatus for surface analysis by means of low energy ion scattering (LEIS), direct recoil spectrometry (DRS), mass spectrometry of recoil ions (MRSI), and secondary-ion mass spectrometry (SIMS). This device provides broad alkali ion beams, homogeneous and much more intense than in standard commercial realizations available, as well as various high quality intense gas ion beams. A long tube with a magnetic quadrupole triplet is introduced. This construction disjoins the high vacuum from the ultrahigh vacuum (UHV) parts of the system and makes possible low cost differential pumping. The use of an UHV broad alkali ion beam in SIMS experiments should importantly decrease crater effect problems without use of rastering and electrical gating systems. In order to demonstrate the possibilities and the advantages of the proposed concept, we present the results of experimental analysis of primary ion beam characteristics, as well as LEIS and DRS experimental results obtained by use of gas ion beams scattered from silver polycrystalline surfaces. This design concept results in a simple and low cost device with operating characteristics comparable to those of high quality devices of similar type. (C) 2000 American Institute of Physics. [S0034-6748(00)00812-1].", journal = "Review of Scientific Instruments", title = "A multipurpose apparatus for studying the interaction of low energy ions with solid state surface", volume = "71", number = "11", pages = "4195-4200", doi = "10.1063/1.1319985" }
Terzić, I., Bundaleski, N., Rakočević, Z. Lj., Oklobdzija, N.,& Elazar, J.. (2000). A multipurpose apparatus for studying the interaction of low energy ions with solid state surface. in Review of Scientific Instruments, 71(11), 4195-4200. https://doi.org/10.1063/1.1319985
Terzić I, Bundaleski N, Rakočević ZL, Oklobdzija N, Elazar J. A multipurpose apparatus for studying the interaction of low energy ions with solid state surface. in Review of Scientific Instruments. 2000;71(11):4195-4200. doi:10.1063/1.1319985 .
Terzić, Ivan, Bundaleski, Nenad, Rakočević, Zlatko Lj., Oklobdzija, N, Elazar, Jovan, "A multipurpose apparatus for studying the interaction of low energy ions with solid state surface" in Review of Scientific Instruments, 71, no. 11 (2000):4195-4200, https://doi.org/10.1063/1.1319985 . .