Fabrication of zigzag and square spiral Cu nanostructures: Influence of substrate rotation on the structural, optical and electrical properties
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2022
Authors
Potočnik, JelenaBožinović, Nevena
Popović, Maja
Barudžija, Tanja
Nenadović, Miloš
Novaković, Mirjana M.
Article (Published version)
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Copper (Cu) thin films were deposited by using glancing angle deposition in the form of zigzag and square spiral nanostructures. Thin films were fabricated under different azimuthal rotations (φ = 180°, 90°, 45°, 22.5° and 11°), to the thickness of approximately 300 nm. Morphological, chemical and structural properties were investigated by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and high-resolution transmission electron microscopy. For the optical characterization of the samples spectroscopic ellipsometry was used, while the electrical properties were analyzed by four-point probe method. It was found that as the azimuthal rotation decreases, deposited nanostructures become more porous with larger number of grown arms. Both, optical and electrical analyses revealed that the properties of the obtained thin films are significantly influenced by growth mechanism. By decreasing the φ parameter, the surface plasmon resonance peak was s...hifted from 1038.9 nm to 1676.6 nm, which can be correlated with the porosity of Cu structures. Besides, it was found that the optical and electrical properties of the thin films are also strongly dependent on the concentration of defects.
Keywords:
Cu zigzag and square spiral structures / Electrical resistivity / Glancing angle deposition / Porosity / Surface plasmon resonanceSource:
Journal of Alloys and Compounds, 2022, 922, 166211-Funding / projects:
- Ministry of Education, Science and Technological Development of the Republic of Serbia
DOI: 10.1016/j.jallcom.2022.166211
ISSN: 0925-8388
WoS: 000831130400003
Scopus: 2-s2.0-85134304425
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VinčaTY - JOUR AU - Potočnik, Jelena AU - Božinović, Nevena AU - Popović, Maja AU - Barudžija, Tanja AU - Nenadović, Miloš AU - Novaković, Mirjana M. PY - 2022 UR - https://vinar.vin.bg.ac.rs/handle/123456789/10366 AB - Copper (Cu) thin films were deposited by using glancing angle deposition in the form of zigzag and square spiral nanostructures. Thin films were fabricated under different azimuthal rotations (φ = 180°, 90°, 45°, 22.5° and 11°), to the thickness of approximately 300 nm. Morphological, chemical and structural properties were investigated by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and high-resolution transmission electron microscopy. For the optical characterization of the samples spectroscopic ellipsometry was used, while the electrical properties were analyzed by four-point probe method. It was found that as the azimuthal rotation decreases, deposited nanostructures become more porous with larger number of grown arms. Both, optical and electrical analyses revealed that the properties of the obtained thin films are significantly influenced by growth mechanism. By decreasing the φ parameter, the surface plasmon resonance peak was shifted from 1038.9 nm to 1676.6 nm, which can be correlated with the porosity of Cu structures. Besides, it was found that the optical and electrical properties of the thin films are also strongly dependent on the concentration of defects. T2 - Journal of Alloys and Compounds T1 - Fabrication of zigzag and square spiral Cu nanostructures: Influence of substrate rotation on the structural, optical and electrical properties VL - 922 SP - 166211 DO - 10.1016/j.jallcom.2022.166211 ER -
@article{ author = "Potočnik, Jelena and Božinović, Nevena and Popović, Maja and Barudžija, Tanja and Nenadović, Miloš and Novaković, Mirjana M.", year = "2022", abstract = "Copper (Cu) thin films were deposited by using glancing angle deposition in the form of zigzag and square spiral nanostructures. Thin films were fabricated under different azimuthal rotations (φ = 180°, 90°, 45°, 22.5° and 11°), to the thickness of approximately 300 nm. Morphological, chemical and structural properties were investigated by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and high-resolution transmission electron microscopy. For the optical characterization of the samples spectroscopic ellipsometry was used, while the electrical properties were analyzed by four-point probe method. It was found that as the azimuthal rotation decreases, deposited nanostructures become more porous with larger number of grown arms. Both, optical and electrical analyses revealed that the properties of the obtained thin films are significantly influenced by growth mechanism. By decreasing the φ parameter, the surface plasmon resonance peak was shifted from 1038.9 nm to 1676.6 nm, which can be correlated with the porosity of Cu structures. Besides, it was found that the optical and electrical properties of the thin films are also strongly dependent on the concentration of defects.", journal = "Journal of Alloys and Compounds", title = "Fabrication of zigzag and square spiral Cu nanostructures: Influence of substrate rotation on the structural, optical and electrical properties", volume = "922", pages = "166211", doi = "10.1016/j.jallcom.2022.166211" }
Potočnik, J., Božinović, N., Popović, M., Barudžija, T., Nenadović, M.,& Novaković, M. M.. (2022). Fabrication of zigzag and square spiral Cu nanostructures: Influence of substrate rotation on the structural, optical and electrical properties. in Journal of Alloys and Compounds, 922, 166211. https://doi.org/10.1016/j.jallcom.2022.166211
Potočnik J, Božinović N, Popović M, Barudžija T, Nenadović M, Novaković MM. Fabrication of zigzag and square spiral Cu nanostructures: Influence of substrate rotation on the structural, optical and electrical properties. in Journal of Alloys and Compounds. 2022;922:166211. doi:10.1016/j.jallcom.2022.166211 .
Potočnik, Jelena, Božinović, Nevena, Popović, Maja, Barudžija, Tanja, Nenadović, Miloš, Novaković, Mirjana M., "Fabrication of zigzag and square spiral Cu nanostructures: Influence of substrate rotation on the structural, optical and electrical properties" in Journal of Alloys and Compounds, 922 (2022):166211, https://doi.org/10.1016/j.jallcom.2022.166211 . .