Single- and dual-wavelength laser pulses induced modification in 10x(Al/Ti)/Si multilayer system
Samo za registrovane korisnike
2016
Autori
Salatić, BranislavPetrović, Suzana
Peruško, Davor
Čekada, Miha
Panjan, Peter
Pantelić, Dejan
Jelenković, Branislav
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
The surface morphology of the ablation craters created in the multilayer 10x(Al/Ti)/Si system by nanosecond laser pulses at single- and dual wavelength has been studied experimentally and numerically. A complex multilayer thin film including ten (Al/Ti) bilayers deposited by ion sputtering on Si(1 0 0) substrate to a total thickness of 260 nm were illuminated at different laser irradiance in the range 0.25-3.5 x 10(9)W cm(-2). Single pulse laser irradiation was done at normal incidence in air, with the single wavelength, either at 532 nm or 1064 nm or with both laser light simultaneously in the ratio of 1: 10 for energy per pulse between second harmonic and 1064 nm. Most of the absorbed laser energy was rapidly transformed into heat, producing intensive modifications of composition and morphology on the sample surface. The results show an increase in surface roughness, formation of specific nanostructures, appearance of hydrodynamic features and ablation of surface material with crater... formation. Applying a small fraction (10%) of the second harmonic in dual-wavelength pulses, a modification of the 10x(Al/Ti)/Si system by a single laser pulse was reflected in the formation of wider and/or deeper craters. Numerical calculations show that the main physical mechanism in ablation process is normal evaporation without phase explosion. The calculated and experimental results agree relatively well for the whole irradiance range, what makes the model applicable to complex Al/Ti multilayer systems. (C) 2015 Elsevier B.V. All rights reserved.
Ključne reči:
Dual-wavelength pulses / laser ablation / Crater formation / NanostructuresIzvor:
Applied Surface Science, 2016, 360, 559-565Izdavač:
- Elsevier
Finansiranje / projekti:
- Generisanje i karakterizacija nanofotonskih funkcionalnih struktura u biomedicini i informatici (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-45016)
- Holografske metode generisanja specifičnih talasnih frontova za efikasnu kontrolu kvantnih koherentnih efekata u interakciji atoma i lasera (RS-MESTD-Basic Research (BR or ON)-171038)
- European Community [COST Action MP1203, COST Action MP1208]
DOI: 10.1016/j.apsusc.2015.10.203
ISSN: 0169-4332; 1873-5584
WoS: 000366592400017
Scopus: 2-s2.0-84952864369
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Salatić, Branislav AU - Petrović, Suzana AU - Peruško, Davor AU - Čekada, Miha AU - Panjan, Peter AU - Pantelić, Dejan AU - Jelenković, Branislav PY - 2016 UR - https://vinar.vin.bg.ac.rs/handle/123456789/858 AB - The surface morphology of the ablation craters created in the multilayer 10x(Al/Ti)/Si system by nanosecond laser pulses at single- and dual wavelength has been studied experimentally and numerically. A complex multilayer thin film including ten (Al/Ti) bilayers deposited by ion sputtering on Si(1 0 0) substrate to a total thickness of 260 nm were illuminated at different laser irradiance in the range 0.25-3.5 x 10(9)W cm(-2). Single pulse laser irradiation was done at normal incidence in air, with the single wavelength, either at 532 nm or 1064 nm or with both laser light simultaneously in the ratio of 1: 10 for energy per pulse between second harmonic and 1064 nm. Most of the absorbed laser energy was rapidly transformed into heat, producing intensive modifications of composition and morphology on the sample surface. The results show an increase in surface roughness, formation of specific nanostructures, appearance of hydrodynamic features and ablation of surface material with crater formation. Applying a small fraction (10%) of the second harmonic in dual-wavelength pulses, a modification of the 10x(Al/Ti)/Si system by a single laser pulse was reflected in the formation of wider and/or deeper craters. Numerical calculations show that the main physical mechanism in ablation process is normal evaporation without phase explosion. The calculated and experimental results agree relatively well for the whole irradiance range, what makes the model applicable to complex Al/Ti multilayer systems. (C) 2015 Elsevier B.V. All rights reserved. PB - Elsevier T2 - Applied Surface Science T1 - Single- and dual-wavelength laser pulses induced modification in 10x(Al/Ti)/Si multilayer system VL - 360 SP - 559 EP - 565 DO - 10.1016/j.apsusc.2015.10.203 ER -
@article{ author = "Salatić, Branislav and Petrović, Suzana and Peruško, Davor and Čekada, Miha and Panjan, Peter and Pantelić, Dejan and Jelenković, Branislav", year = "2016", abstract = "The surface morphology of the ablation craters created in the multilayer 10x(Al/Ti)/Si system by nanosecond laser pulses at single- and dual wavelength has been studied experimentally and numerically. A complex multilayer thin film including ten (Al/Ti) bilayers deposited by ion sputtering on Si(1 0 0) substrate to a total thickness of 260 nm were illuminated at different laser irradiance in the range 0.25-3.5 x 10(9)W cm(-2). Single pulse laser irradiation was done at normal incidence in air, with the single wavelength, either at 532 nm or 1064 nm or with both laser light simultaneously in the ratio of 1: 10 for energy per pulse between second harmonic and 1064 nm. Most of the absorbed laser energy was rapidly transformed into heat, producing intensive modifications of composition and morphology on the sample surface. The results show an increase in surface roughness, formation of specific nanostructures, appearance of hydrodynamic features and ablation of surface material with crater formation. Applying a small fraction (10%) of the second harmonic in dual-wavelength pulses, a modification of the 10x(Al/Ti)/Si system by a single laser pulse was reflected in the formation of wider and/or deeper craters. Numerical calculations show that the main physical mechanism in ablation process is normal evaporation without phase explosion. The calculated and experimental results agree relatively well for the whole irradiance range, what makes the model applicable to complex Al/Ti multilayer systems. (C) 2015 Elsevier B.V. All rights reserved.", publisher = "Elsevier", journal = "Applied Surface Science", title = "Single- and dual-wavelength laser pulses induced modification in 10x(Al/Ti)/Si multilayer system", volume = "360", pages = "559-565", doi = "10.1016/j.apsusc.2015.10.203" }
Salatić, B., Petrović, S., Peruško, D., Čekada, M., Panjan, P., Pantelić, D.,& Jelenković, B.. (2016). Single- and dual-wavelength laser pulses induced modification in 10x(Al/Ti)/Si multilayer system. in Applied Surface Science Elsevier., 360, 559-565. https://doi.org/10.1016/j.apsusc.2015.10.203
Salatić B, Petrović S, Peruško D, Čekada M, Panjan P, Pantelić D, Jelenković B. Single- and dual-wavelength laser pulses induced modification in 10x(Al/Ti)/Si multilayer system. in Applied Surface Science. 2016;360:559-565. doi:10.1016/j.apsusc.2015.10.203 .
Salatić, Branislav, Petrović, Suzana, Peruško, Davor, Čekada, Miha, Panjan, Peter, Pantelić, Dejan, Jelenković, Branislav, "Single- and dual-wavelength laser pulses induced modification in 10x(Al/Ti)/Si multilayer system" in Applied Surface Science, 360 (2016):559-565, https://doi.org/10.1016/j.apsusc.2015.10.203 . .