Backscattered electron spectra from graphite

Abstract

The backscattered electron spectra from graphite sample were studied both experimentally and theoretically at impact energies between 500 and 5000 eV. The angle of the incident electron beam was 50° and the detection angle was 0° with respect to the surface normal, respectively. Monte Carlo (MC) simulations were performed based on the Classical Transport Theory (CTT) model to mimic the experimental spectra. In our simulations, both elastic and inelastic scattering of primary electrons and secondary electron emission from graphite are taken into account. There is found satisfactory agreement between measured and calculated electron spectra. © 2018 Elsevier B.V.