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dc.creatorJokanović, Vukoman R.
dc.creatorČolović, Božana M.
dc.creatorBundaleski, Nenad
dc.creatorJokanović, M.
dc.creatorPetkoska, Anka Trajkovska
dc.creatorFerrara, Manuela
dc.creatorNasov, Ilija
dc.creatorRakočević, Zlatko Lj.
dc.date.accessioned2018-07-05T12:28:22Z
dc.date.available2018-07-05T12:28:22Z
dc.date.issued2018
dc.identifier.issn1454-4164 (print)
dc.identifier.urihttps://joam.inoe.ro/index.php?option=magazine&op=view&idu=4206&catid=110
dc.identifier.urihttp://vinar.vin.bg.ac.rs/handle/123456789/7716
dc.description.abstractOptical properties of TixOy thin film, of thickness 125 nm, obtained by pulsed magnetron sputtering were investigated in this paper. XRD analysis revealed the presence of anatase, rutile, TiO, Ti2O3and Ti3O5phases. XPS analysis showed similar results. SEM analysis showed quite smooth surface of the film. Spectroscopic ellipsometry revealed sharp decrease of refractive index in wavelength range 300-500 nm and extremely low values of extinction coefficients which are less than 0.01 at wavelengths equal to or higher than 500 nm.en
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/172026/RS//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Integrated and Interdisciplinary Research (IIR or III)/45005/RS//
dc.rightsrestrictedAccess
dc.sourceJournal of Optoelectronics and Advanced Materials
dc.subjectpulsed magnetron sputteringen
dc.subjectTixOy thin filmen
dc.subjectrefractive indexen
dc.subjectextinction coefficienten
dc.titleTixOy thin films with extremely low extinction coefficients obtained by pulsed magnetron sputteringen
dc.typearticleen
dc.rights.licenseARR
dcterms.abstractБундалески, Н.; Ракочевић, З.; Јокановић, В.; Чоловић, Б.; Јокановић, М.; Петкоска, A.Т.; Феррара, М.; Насов, И.;
dc.rights.holder© 2018, National Institute of Optoelectronics
dc.citation.volume20
dc.citation.issue3-4
dc.citation.spage169
dc.citation.epage174
dc.type.versionpublishedVersion
dc.identifier.scopus2-s2.0-85048109141


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