Sputtering yield and morphological changes of TiB2 coatings induced by different incident beams
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The properties of TiB2 coatings deposited by direct electron-beam evaporation and by plasma spray deposition as well as their behavior during the interaction with the energetic beam are discussed. These coatings are considered as a plasma facing material for some parts of the next step tokamak. Sputtering yields were determined for: Ar+ ion bombardment in the energy region 3-12 keV and laser beam bombardment in the range up to 10(9) W/m(2). It was found that whatever the mechanism of sputtering is, a similarity between sputtering yield and energy dependence for used combinations of incident beams and target does exist.
Извор:Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 1996, 115, 1-4, 523-527
- 16th International Conference on Atomic Collisions in Solids (ICACS-16), Jul 17-21, 1995, Linz, Austria
ISSN: 0168-583X (print)