High fluence nitrogen implantation in Al/Ti multilayers
Нема приказа
Аутори
Peruško, DavorMilosavljević, Momir
Milinović, Velimir
Timotijević, B.
Zalar, A.
Kovač, Janez
Pracek, B.
Jeynes, C.
Чланак у часопису
Метаподаци
Приказ свих података о документуАпстракт
We have studied the effects of high fluence nitrogen ion implantation on the structural changes in Al/Ti multilayers, with the aim of achieving multilayered metal-nitrides. The starting structures consisted of 10 alternate sputter-deposited Al and Ti films, with a total thickness of 270 nm, on (100) Si substrates. They were implanted with 200 keV N-2(+), to 1 x 10(17) and 2 x 10(17) at/cm(2), the projected range being around half-depth of the multilayers. Structural characterization was performed by Rutherford backscattering, Auger electron spectroscopy and transmission electron microscopy. It was found that ion implantation to the higher fluence induces a full intermixing of Al/Ti layers, resulting in a multilayered structure with different content of Al, Ti and N. The applied method can be interesting for preparation of graded (AI,Ti)N multilayers, with a controlled content of nitrogen and a controlled level of Al-Ti intermixing within the structures. (C) 2008 Elsevier B.V. All right...s reserved.
Кључне речи:
Al/Ti multilayers / ion implantation / hard coatings / RBS / AES / TEMИзвор:
Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2008, 266, 10, 2503-2506Напомена:
- 9th European Conference on Accelerators in Applied Research and Technology, Sep 03-07, 2007, Florence, Italy
DOI: 10.1016/j.nimb.2008.03.034
ISSN: 0168-583X
WoS: 000257185600093
Scopus: 2-s2.0-44649139762
Колекције
Институција/група
VinčaTY - JOUR AU - Peruško, Davor AU - Milosavljević, Momir AU - Milinović, Velimir AU - Timotijević, B. AU - Zalar, A. AU - Kovač, Janez AU - Pracek, B. AU - Jeynes, C. PY - 2008 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6768 AB - We have studied the effects of high fluence nitrogen ion implantation on the structural changes in Al/Ti multilayers, with the aim of achieving multilayered metal-nitrides. The starting structures consisted of 10 alternate sputter-deposited Al and Ti films, with a total thickness of 270 nm, on (100) Si substrates. They were implanted with 200 keV N-2(+), to 1 x 10(17) and 2 x 10(17) at/cm(2), the projected range being around half-depth of the multilayers. Structural characterization was performed by Rutherford backscattering, Auger electron spectroscopy and transmission electron microscopy. It was found that ion implantation to the higher fluence induces a full intermixing of Al/Ti layers, resulting in a multilayered structure with different content of Al, Ti and N. The applied method can be interesting for preparation of graded (AI,Ti)N multilayers, with a controlled content of nitrogen and a controlled level of Al-Ti intermixing within the structures. (C) 2008 Elsevier B.V. All rights reserved. T2 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms T1 - High fluence nitrogen implantation in Al/Ti multilayers VL - 266 IS - 10 SP - 2503 EP - 2506 DO - 10.1016/j.nimb.2008.03.034 ER -
@article{ author = "Peruško, Davor and Milosavljević, Momir and Milinović, Velimir and Timotijević, B. and Zalar, A. and Kovač, Janez and Pracek, B. and Jeynes, C.", year = "2008", abstract = "We have studied the effects of high fluence nitrogen ion implantation on the structural changes in Al/Ti multilayers, with the aim of achieving multilayered metal-nitrides. The starting structures consisted of 10 alternate sputter-deposited Al and Ti films, with a total thickness of 270 nm, on (100) Si substrates. They were implanted with 200 keV N-2(+), to 1 x 10(17) and 2 x 10(17) at/cm(2), the projected range being around half-depth of the multilayers. Structural characterization was performed by Rutherford backscattering, Auger electron spectroscopy and transmission electron microscopy. It was found that ion implantation to the higher fluence induces a full intermixing of Al/Ti layers, resulting in a multilayered structure with different content of Al, Ti and N. The applied method can be interesting for preparation of graded (AI,Ti)N multilayers, with a controlled content of nitrogen and a controlled level of Al-Ti intermixing within the structures. (C) 2008 Elsevier B.V. All rights reserved.", journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms", title = "High fluence nitrogen implantation in Al/Ti multilayers", volume = "266", number = "10", pages = "2503-2506", doi = "10.1016/j.nimb.2008.03.034" }
Peruško, D., Milosavljević, M., Milinović, V., Timotijević, B., Zalar, A., Kovač, J., Pracek, B.,& Jeynes, C.. (2008). High fluence nitrogen implantation in Al/Ti multilayers. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 266(10), 2503-2506. https://doi.org/10.1016/j.nimb.2008.03.034
Peruško D, Milosavljević M, Milinović V, Timotijević B, Zalar A, Kovač J, Pracek B, Jeynes C. High fluence nitrogen implantation in Al/Ti multilayers. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2008;266(10):2503-2506. doi:10.1016/j.nimb.2008.03.034 .
Peruško, Davor, Milosavljević, Momir, Milinović, Velimir, Timotijević, B., Zalar, A., Kovač, Janez, Pracek, B., Jeynes, C., "High fluence nitrogen implantation in Al/Ti multilayers" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 266, no. 10 (2008):2503-2506, https://doi.org/10.1016/j.nimb.2008.03.034 . .