Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers

Abstract

In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.