Nano-second surface modification of titanium nitride thin film by Nd : YAG and TEA CO2 lasers
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In this work we investigated the interaction of ns laser pulses (TEA CO2 and Nd:YAG) with a titanium nitride (TiN) thin film. The TiN thin film of 1 mu m thickness was deposited by PVD method on silicon substrate. Modification of TiN film was induced by laser pulses with power densities of about 10(8) and 10(9) W/cm(2). Part of the laser energy absorbed on the target surface was converted into thermal energy and effects such as melting, vaporization and exfoliation were observed. Nd:YAG laser produced craters with sharp periphery, while TEA CO2 laser created damages with broad boundary zone. Hydrodynamic effects were especially pronounced during irradiation with TEA CO2 laser.
Keywords:Nd : YAG laser / OM / SEM / TEA CO2 laser / TiN thin film
Source:Materials Science Forum, 2006, 518, 161-166
- Recent Developments in Advanced Materials and Processes, 7th Conference of the Yugoslav-Materials-Research-Society (Yu-MRS), Sep 12-16, 2005, Herceg Novi, Montenegro