Surface modification of titanium nitride film by a picosecond Nd : YAG laser
Нема приказа
Аутори
Gaković, Biljana M.Trtica, Milan
Batani, Dimitri
Desai, T.
Panjan, Peter
Vasiljević-Radović, Dana
Чланак у часопису
Метаподаци
Приказ свих података о документуАпстракт
The interaction of a picosecond Nd: YAG laser ( wavelength 532 nm, pulse duration 40 ps) with a polycrystalline titanium nitride ( TiN) film was studied. The TiN thin film was deposited by physical vapour deposition on a silicon substrate. The titanium nitride/ silicon system was modified with an energy fluence from 0.2 to 5.9 J cm(-2). Multi- pulse irradiation was performed in air by a focused laser beam. Surface modifications were analysed after 1 - 100 successive laser pulses. Depending on the laser pulse energy and pulse count, the following phenomena were observed: ( i) increased surface roughness, ( ii) titanium nitride film cracking, ( iii) silicon substrate modification, ( iv) film exfoliation and ( v) laser- induced periodical surface structures on nano- ( NPSS) and micro- dimensions ( MPSS).
Кључне речи:
laser-induced surface modification / titanium nitride film / micro and nano periodical structure / picoseconds laser pulseИзвор:
Journal of Optics. A: Pure and Applied Optics, 2007, 9, 6, S76-S80Напомена:
- Photon 2006 Conference, Sep 04-07, 2006, Univ Manchester, Manchester, England
DOI: 10.1088/1464-4258/9/6/S11
ISSN: 1464-4258
WoS: 000246851500012
Scopus: 2-s2.0-34249726737
Колекције
Институција/група
VinčaTY - JOUR AU - Gaković, Biljana M. AU - Trtica, Milan AU - Batani, Dimitri AU - Desai, T. AU - Panjan, Peter AU - Vasiljević-Radović, Dana PY - 2007 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6581 AB - The interaction of a picosecond Nd: YAG laser ( wavelength 532 nm, pulse duration 40 ps) with a polycrystalline titanium nitride ( TiN) film was studied. The TiN thin film was deposited by physical vapour deposition on a silicon substrate. The titanium nitride/ silicon system was modified with an energy fluence from 0.2 to 5.9 J cm(-2). Multi- pulse irradiation was performed in air by a focused laser beam. Surface modifications were analysed after 1 - 100 successive laser pulses. Depending on the laser pulse energy and pulse count, the following phenomena were observed: ( i) increased surface roughness, ( ii) titanium nitride film cracking, ( iii) silicon substrate modification, ( iv) film exfoliation and ( v) laser- induced periodical surface structures on nano- ( NPSS) and micro- dimensions ( MPSS). T2 - Journal of Optics. A: Pure and Applied Optics T1 - Surface modification of titanium nitride film by a picosecond Nd : YAG laser VL - 9 IS - 6 SP - S76 EP - S80 DO - 10.1088/1464-4258/9/6/S11 ER -
@article{ author = "Gaković, Biljana M. and Trtica, Milan and Batani, Dimitri and Desai, T. and Panjan, Peter and Vasiljević-Radović, Dana", year = "2007", abstract = "The interaction of a picosecond Nd: YAG laser ( wavelength 532 nm, pulse duration 40 ps) with a polycrystalline titanium nitride ( TiN) film was studied. The TiN thin film was deposited by physical vapour deposition on a silicon substrate. The titanium nitride/ silicon system was modified with an energy fluence from 0.2 to 5.9 J cm(-2). Multi- pulse irradiation was performed in air by a focused laser beam. Surface modifications were analysed after 1 - 100 successive laser pulses. Depending on the laser pulse energy and pulse count, the following phenomena were observed: ( i) increased surface roughness, ( ii) titanium nitride film cracking, ( iii) silicon substrate modification, ( iv) film exfoliation and ( v) laser- induced periodical surface structures on nano- ( NPSS) and micro- dimensions ( MPSS).", journal = "Journal of Optics. A: Pure and Applied Optics", title = "Surface modification of titanium nitride film by a picosecond Nd : YAG laser", volume = "9", number = "6", pages = "S76-S80", doi = "10.1088/1464-4258/9/6/S11" }
Gaković, B. M., Trtica, M., Batani, D., Desai, T., Panjan, P.,& Vasiljević-Radović, D.. (2007). Surface modification of titanium nitride film by a picosecond Nd : YAG laser. in Journal of Optics. A: Pure and Applied Optics, 9(6), S76-S80. https://doi.org/10.1088/1464-4258/9/6/S11
Gaković BM, Trtica M, Batani D, Desai T, Panjan P, Vasiljević-Radović D. Surface modification of titanium nitride film by a picosecond Nd : YAG laser. in Journal of Optics. A: Pure and Applied Optics. 2007;9(6):S76-S80. doi:10.1088/1464-4258/9/6/S11 .
Gaković, Biljana M., Trtica, Milan, Batani, Dimitri, Desai, T., Panjan, Peter, Vasiljević-Radović, Dana, "Surface modification of titanium nitride film by a picosecond Nd : YAG laser" in Journal of Optics. A: Pure and Applied Optics, 9, no. 6 (2007):S76-S80, https://doi.org/10.1088/1464-4258/9/6/S11 . .