Picoseconds-laser modification of thin films
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The interaction of a Nd:YAG laser, pulse duration of 40 ps, with a titanium nitride (TiN) and tungsten-titanium (W-Ti) thin films deposited at silicon was studied. The peak intensity on targets was up to 10(12) W/cm(2). Results have shown that the TiN surface was modified, by the laser beam, with energy density of GT = 0.18 J/cm(2) (lambda(laser) = 532 nm) as well as of 30.0 J/cm(2) (lambda(laser)= 1064 nm). The W-Ti was surface modified with energy density of 5.0 J/cm(2) (lambda(laser)= 532 nm). ne energy absorbed from the Nd:YAG laser beam is partially converted to thermal energy, which generates a series of effects such as melting, vaporization of molten materials, dissociation and ionization of the vaporized material, appearance of plasma, etc. The following morphological changes of both targets were observed: (i) The appearance of periodic microstructures, in the central zone of the irradiated area, for laser irradiation at 532 nm. Accumulation of great number of laser pulses caus...ed film ablation and silicon modification. (ii) Hole formation on the titanium nitride/silicon target was registered at 1064 nm. The process of the Nd:YAG laser interaction with both targets was accompanied by plasma formation above the target.
Извор:AIP Conference Proceedings, 2006, 827, 546-+
- APPOLO - Hub of Application Laboratories for Equipment Assessment in Laser Based Manufacturing (EU-609355)
- Applications of Laserplasma Studies to Particle Acceleration, Laboratory Astrophysics, Laser Induced Nuclear Reactions and the Fast Ignition Approach to Internal Confinement Fusion [COST- P14], Ministry of Science and Environmental Protection of the Republic Serbia
- 3rd International Conference on Superstrong Fields in Plasmas, Sep 19-24, 2005, Varenna, Italy
ISSN: 0094-243X (print)