Приказ основних података о документу

dc.creatorGoncić, Bratislav
dc.creatorPopovic, N
dc.creatorBogdanov, Žarko
dc.creatorZec, Slavica
dc.creatorZlatanovic, M
dc.date.accessioned2018-03-03T13:56:21Z
dc.date.available2018-03-03T13:56:21Z
dc.date.issued2003
dc.identifier.issn0255-5476
dc.identifier.urihttps://vinar.vin.bg.ac.rs/handle/123456789/6350
dc.description.abstractThe method and parameters of TiN film deposition processes are of dominant influence on the film growth microstructure and its physical properties. One of the PVD methods is the low energy ion beam reactive sputter deposition that offers the changes in the film properties by means of changing the beam parameters such as energy, divergence and current density. In this work, a laboratory made, broad beam, argon ion source was used for the reactive sputter deposition of TiN, thin films onto the glass substrates at ambient temperature. At constant argon beam energy (2keV), partial pressure of nitrogen (up to 6.6x10(-6) mbar), the substrate ion current and residual gas pressure were changed. The film deposition rate and thickness were controlled in situ by means of a light sensitive device placed on the rear side of the glass substrate. The physical properties of films: color, electrical resistivity and grain size, were correlated with the deposition parameters. High energy ion bombardment of growing film, relatively small ion to atom flux ratio up to 0.04, and low working pressure of 10(-5) mbar enabled the formation of a strong (220) preferred orientation rarely obtained for TiNx thin films.en
dc.rightsrestrictedAccessen
dc.sourceMaterials Science Forumen
dc.subjection beam reactive sputteringen
dc.subjectpreferred orientationen
dc.subjectresistivity TiN thin filmsen
dc.titleLow-energy broad-beam sputter deposition of TiNx thin filmsen
dc.typearticleen
dcterms.abstractПоповиц, Н; Богданов Жарко; Зец Славица; Гонциц, Б; Златановиц, М;
dc.citation.volume413
dc.citation.spage159
dc.citation.epage164
dc.identifier.wos000180730700028
dc.citation.rankM23
dc.description.other4th Yugoslav-Materials-Research-Society Conference, Sep 10-14, 2001, Herceg Novi, Yugoslaviaen
dc.identifier.rcubhttps://hdl.handle.net/21.15107/rcub_vinar_6350


Документи

ДатотекеВеличинаФорматПреглед

Уз овај запис нема датотека.

Овај документ се појављује у следећим колекцијама

Приказ основних података о документу