Cylindrical hollow anode ion source
Апстракт
The hollow anode ion-electron source is based on the hollow anode discharge, a kind of plasma utilizing a cold cathode and a tiny bore or slot in the anode that simultaneously serves as exit aperture of the ion (or electron) source. These sources are particularly suitable, for example, for deposition of films on large flat surfaces. The length of the slot-shaped hollow anode aperture can be sufficient so that, together with sweeping of either source or substrate, large area substrates can be processed, thereby simulating the function of large area plasma sources. (C) 2002 American Institute of Physics.
Извор:
Review of Scientific Instruments, 2002, 73, 2, 751-753Напомена:
- 9th International Conference on Ion Sources (ICIS), Sep 03-07, 2001, Oakland, California
DOI: 10.1063/1.1427346
ISSN: 0034-6748
WoS: 000173921000079
Scopus: 2-s2.0-0036472594
Колекције
Институција/група
VinčaTY - JOUR AU - Miljevic, V PY - 2002 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6327 AB - The hollow anode ion-electron source is based on the hollow anode discharge, a kind of plasma utilizing a cold cathode and a tiny bore or slot in the anode that simultaneously serves as exit aperture of the ion (or electron) source. These sources are particularly suitable, for example, for deposition of films on large flat surfaces. The length of the slot-shaped hollow anode aperture can be sufficient so that, together with sweeping of either source or substrate, large area substrates can be processed, thereby simulating the function of large area plasma sources. (C) 2002 American Institute of Physics. T2 - Review of Scientific Instruments T1 - Cylindrical hollow anode ion source VL - 73 IS - 2 SP - 751 EP - 753 DO - 10.1063/1.1427346 ER -
@article{ author = "Miljevic, V", year = "2002", abstract = "The hollow anode ion-electron source is based on the hollow anode discharge, a kind of plasma utilizing a cold cathode and a tiny bore or slot in the anode that simultaneously serves as exit aperture of the ion (or electron) source. These sources are particularly suitable, for example, for deposition of films on large flat surfaces. The length of the slot-shaped hollow anode aperture can be sufficient so that, together with sweeping of either source or substrate, large area substrates can be processed, thereby simulating the function of large area plasma sources. (C) 2002 American Institute of Physics.", journal = "Review of Scientific Instruments", title = "Cylindrical hollow anode ion source", volume = "73", number = "2", pages = "751-753", doi = "10.1063/1.1427346" }
Miljevic, V.. (2002). Cylindrical hollow anode ion source. in Review of Scientific Instruments, 73(2), 751-753. https://doi.org/10.1063/1.1427346
Miljevic V. Cylindrical hollow anode ion source. in Review of Scientific Instruments. 2002;73(2):751-753. doi:10.1063/1.1427346 .
Miljevic, V, "Cylindrical hollow anode ion source" in Review of Scientific Instruments, 73, no. 2 (2002):751-753, https://doi.org/10.1063/1.1427346 . .