Investigations of TiN films optical and mechanical characteristics
Апстракт
The TiN films produced in different magnetron deposition systems (double magnetron and magnetron only) have shown variations in color, reflectivity and some mechanical characteristics as well as some changes induced by aging. STM, SEM, XRD analyses and reflectivity and ellipsometry measurements were performed in order to examine the correlation between the structural and optical coating properties.
Кључне речи:
TiN / magnetron sputtering / optical characteristics / mechanical characteristicsИзвор:
Materials Science Forum, 1998, 282-2, 139-146Напомена:
- Advanced Materials and Processes, 2nd Yugoslav Conference on Advanced Materials (YUGOMAT II), Sep 15-19, 1997, Herceg Novi, Yugoslavia
DOI: 10.4028/www.scientific.net/MSF.282-283.139
ISSN: 0255-5476
WoS: 000075079900019
Scopus: 2-s2.0-0031638828
Колекције
Институција/група
VinčaTY - JOUR AU - Zlatanovic, M AU - Sesum, D AU - Đukić, D AU - Popovic, N PY - 1998 UR - https://vinar.vin.bg.ac.rs/handle/123456789/6245 AB - The TiN films produced in different magnetron deposition systems (double magnetron and magnetron only) have shown variations in color, reflectivity and some mechanical characteristics as well as some changes induced by aging. STM, SEM, XRD analyses and reflectivity and ellipsometry measurements were performed in order to examine the correlation between the structural and optical coating properties. T2 - Materials Science Forum T1 - Investigations of TiN films optical and mechanical characteristics VL - 282-2 SP - 139 EP - 146 DO - 10.4028/www.scientific.net/MSF.282-283.139 ER -
@article{ author = "Zlatanovic, M and Sesum, D and Đukić, D and Popovic, N", year = "1998", abstract = "The TiN films produced in different magnetron deposition systems (double magnetron and magnetron only) have shown variations in color, reflectivity and some mechanical characteristics as well as some changes induced by aging. STM, SEM, XRD analyses and reflectivity and ellipsometry measurements were performed in order to examine the correlation between the structural and optical coating properties.", journal = "Materials Science Forum", title = "Investigations of TiN films optical and mechanical characteristics", volume = "282-2", pages = "139-146", doi = "10.4028/www.scientific.net/MSF.282-283.139" }
Zlatanovic, M., Sesum, D., Đukić, D.,& Popovic, N.. (1998). Investigations of TiN films optical and mechanical characteristics. in Materials Science Forum, 282-2, 139-146. https://doi.org/10.4028/www.scientific.net/MSF.282-283.139
Zlatanovic M, Sesum D, Đukić D, Popovic N. Investigations of TiN films optical and mechanical characteristics. in Materials Science Forum. 1998;282-2:139-146. doi:10.4028/www.scientific.net/MSF.282-283.139 .
Zlatanovic, M, Sesum, D, Đukić, D, Popovic, N, "Investigations of TiN films optical and mechanical characteristics" in Materials Science Forum, 282-2 (1998):139-146, https://doi.org/10.4028/www.scientific.net/MSF.282-283.139 . .