Structural Characterization of the Nickel Thin Film Deposited by GLAD Technique
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In this work, a columnar structure of nickel thin film has been obtained using an advanced deposition technique known as Glancing Angle Deposition. Nickel thin film was deposited on glass sample at the constant emission current of 100 mA. Glass sample was positioned 15 degrees with respect to the nickel vapor flux. The obtained nickel thin film was characterized by Force Modulation Atomic Force Microscopy and by Scanning Electron Microscopy. Analysis indicated that the formation of the columnar structure occurred at the film thickness of 1 mu m, which was achieved for the deposition time of 3 hours.
Кључне речи:Glancing Angle Deposition / Force Modulation Atomic Force Microscopy / nickel / cross section
Извор:Science of Sintering, 2013, 45, 1, 61-67
ISSN: 0350-820X (print)