Prototype of the Particle Fluence Measurement Device
Authors
Trajić, IvanBeličev, Petar
Petrović, Srđan M.
Rajčević, Milan N.
Munitlak, Dragan M.
Bojović, Boško
Article (Published version)
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A method of measuring particle fluence and ion beam current in experiments of ion implantation is presented. The design and technical details of a realized prototype device are discussed. Special care is devoted to the effect of secondary electrons and its elimination. An electrostatic solution with two electrodes for the suppression of secondary electrons has been realized. Our approach provides redundancy and allows lower bias voltages to be used for the suppression of electrons. The presented results illustrate the efficiency of the proposed solution.
Keywords:
fluence / ion beam / measurement device / secondary electronSource:
Nuclear technology and radiation protection, 2012, 27, 4, 404-408Funding / projects:
- Physics and Chemistry with Ion Beams (RS-45006)
DOI: 10.2298/NTRP1204404T
ISSN: 1451-3994
WoS: 000313605000012
Scopus: 2-s2.0-84873868318
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VinčaTY - JOUR AU - Trajić, Ivan AU - Beličev, Petar AU - Petrović, Srđan M. AU - Rajčević, Milan N. AU - Munitlak, Dragan M. AU - Bojović, Boško PY - 2012 UR - https://vinar.vin.bg.ac.rs/handle/123456789/5268 AB - A method of measuring particle fluence and ion beam current in experiments of ion implantation is presented. The design and technical details of a realized prototype device are discussed. Special care is devoted to the effect of secondary electrons and its elimination. An electrostatic solution with two electrodes for the suppression of secondary electrons has been realized. Our approach provides redundancy and allows lower bias voltages to be used for the suppression of electrons. The presented results illustrate the efficiency of the proposed solution. T2 - Nuclear technology and radiation protection T1 - Prototype of the Particle Fluence Measurement Device VL - 27 IS - 4 SP - 404 EP - 408 DO - 10.2298/NTRP1204404T ER -
@article{ author = "Trajić, Ivan and Beličev, Petar and Petrović, Srđan M. and Rajčević, Milan N. and Munitlak, Dragan M. and Bojović, Boško", year = "2012", abstract = "A method of measuring particle fluence and ion beam current in experiments of ion implantation is presented. The design and technical details of a realized prototype device are discussed. Special care is devoted to the effect of secondary electrons and its elimination. An electrostatic solution with two electrodes for the suppression of secondary electrons has been realized. Our approach provides redundancy and allows lower bias voltages to be used for the suppression of electrons. The presented results illustrate the efficiency of the proposed solution.", journal = "Nuclear technology and radiation protection", title = "Prototype of the Particle Fluence Measurement Device", volume = "27", number = "4", pages = "404-408", doi = "10.2298/NTRP1204404T" }
Trajić, I., Beličev, P., Petrović, S. M., Rajčević, M. N., Munitlak, D. M.,& Bojović, B.. (2012). Prototype of the Particle Fluence Measurement Device. in Nuclear technology and radiation protection, 27(4), 404-408. https://doi.org/10.2298/NTRP1204404T
Trajić I, Beličev P, Petrović SM, Rajčević MN, Munitlak DM, Bojović B. Prototype of the Particle Fluence Measurement Device. in Nuclear technology and radiation protection. 2012;27(4):404-408. doi:10.2298/NTRP1204404T .
Trajić, Ivan, Beličev, Petar, Petrović, Srđan M., Rajčević, Milan N., Munitlak, Dragan M., Bojović, Boško, "Prototype of the Particle Fluence Measurement Device" in Nuclear technology and radiation protection, 27, no. 4 (2012):404-408, https://doi.org/10.2298/NTRP1204404T . .