Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures
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Autori
Peruško, DavorPetrović, Suzana
Stojanović, Mirjana
Mitrić, Miodrag
Cizmovic, M.
Panjan, Matjaž
Milosavljević, Momir
Članak u časopisu
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
The effects of Ar+ ion irradiation on Al/Ti multilayers at room temperature were investigated. Eight (Al/Ti) bilayers were deposited by d.c. ion sputtering on (100) Si wafers to a total thickness of similar to 300 nm. Ion irradiations were performed by 180 keV Ar+ ions with doses 1-6 x 10(16) ions cm(-2). After implantation the samples were vacuum annealed at 400 degrees C for 30 min. Ion irradiations induced intermixing of layer constituents. and for the highest fluence formation of AlTi and AlTi3 intermetallic phases in the vicinity of the mid projected range of the impact ions. Subsequent vacuum annealing of sample implanted to 6 x 10(16) ions cm(-2) lead to transformation of all deposited layers into AlTi3 and gamma-AlTi intermetallic phases, except for 3-4 layers close to the substrate which were out of range of the effects induced by ion implantation. It is assumed that Al-Ti reaction was initiated by thermal spikes and further enhanced by chemical driving forces, but only in the... intermixed region. This procedure may be interesting for fabrication of Al-Ti intermetallic compounds tightly adhered on different substrates. (C) 2011 Elsevier B.V. All rights reserved.
Ključne reči:
Multilayer / Ion implantation / Al-Ti intermetallics / Nano-hardnessIzvor:
Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2012, 282, 4-7Finansiranje / projekti:
- SPIRIT - Support of Public and Industrial Research using Ion Beam Technology (EU-227012)
- Fizički procesi u sintezi novih nanostrukturnih materijala (RS-171023)
DOI: 10.1016/j.nimb.2011.08.038
ISSN: 0168-583X
WoS: 000305724500003
Scopus: 2-s2.0-84861624092
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Peruško, Davor AU - Petrović, Suzana AU - Stojanović, Mirjana AU - Mitrić, Miodrag AU - Cizmovic, M. AU - Panjan, Matjaž AU - Milosavljević, Momir PY - 2012 UR - https://vinar.vin.bg.ac.rs/handle/123456789/4913 AB - The effects of Ar+ ion irradiation on Al/Ti multilayers at room temperature were investigated. Eight (Al/Ti) bilayers were deposited by d.c. ion sputtering on (100) Si wafers to a total thickness of similar to 300 nm. Ion irradiations were performed by 180 keV Ar+ ions with doses 1-6 x 10(16) ions cm(-2). After implantation the samples were vacuum annealed at 400 degrees C for 30 min. Ion irradiations induced intermixing of layer constituents. and for the highest fluence formation of AlTi and AlTi3 intermetallic phases in the vicinity of the mid projected range of the impact ions. Subsequent vacuum annealing of sample implanted to 6 x 10(16) ions cm(-2) lead to transformation of all deposited layers into AlTi3 and gamma-AlTi intermetallic phases, except for 3-4 layers close to the substrate which were out of range of the effects induced by ion implantation. It is assumed that Al-Ti reaction was initiated by thermal spikes and further enhanced by chemical driving forces, but only in the intermixed region. This procedure may be interesting for fabrication of Al-Ti intermetallic compounds tightly adhered on different substrates. (C) 2011 Elsevier B.V. All rights reserved. T2 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms T1 - Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures VL - 282 SP - 4 EP - 7 DO - 10.1016/j.nimb.2011.08.038 ER -
@article{ author = "Peruško, Davor and Petrović, Suzana and Stojanović, Mirjana and Mitrić, Miodrag and Cizmovic, M. and Panjan, Matjaž and Milosavljević, Momir", year = "2012", abstract = "The effects of Ar+ ion irradiation on Al/Ti multilayers at room temperature were investigated. Eight (Al/Ti) bilayers were deposited by d.c. ion sputtering on (100) Si wafers to a total thickness of similar to 300 nm. Ion irradiations were performed by 180 keV Ar+ ions with doses 1-6 x 10(16) ions cm(-2). After implantation the samples were vacuum annealed at 400 degrees C for 30 min. Ion irradiations induced intermixing of layer constituents. and for the highest fluence formation of AlTi and AlTi3 intermetallic phases in the vicinity of the mid projected range of the impact ions. Subsequent vacuum annealing of sample implanted to 6 x 10(16) ions cm(-2) lead to transformation of all deposited layers into AlTi3 and gamma-AlTi intermetallic phases, except for 3-4 layers close to the substrate which were out of range of the effects induced by ion implantation. It is assumed that Al-Ti reaction was initiated by thermal spikes and further enhanced by chemical driving forces, but only in the intermixed region. This procedure may be interesting for fabrication of Al-Ti intermetallic compounds tightly adhered on different substrates. (C) 2011 Elsevier B.V. All rights reserved.", journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms", title = "Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures", volume = "282", pages = "4-7", doi = "10.1016/j.nimb.2011.08.038" }
Peruško, D., Petrović, S., Stojanović, M., Mitrić, M., Cizmovic, M., Panjan, M.,& Milosavljević, M.. (2012). Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 282, 4-7. https://doi.org/10.1016/j.nimb.2011.08.038
Peruško D, Petrović S, Stojanović M, Mitrić M, Cizmovic M, Panjan M, Milosavljević M. Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2012;282:4-7. doi:10.1016/j.nimb.2011.08.038 .
Peruško, Davor, Petrović, Suzana, Stojanović, Mirjana, Mitrić, Miodrag, Cizmovic, M., Panjan, Matjaž, Milosavljević, Momir, "Formation of intermetallics by ion implantation of multilatered Al/Ti nano-structures" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 282 (2012):4-7, https://doi.org/10.1016/j.nimb.2011.08.038 . .