Ion irradiation induced Al-Ti interaction in nano-scaled Al/Ti multilayers
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Autori
Milosavljević, MomirStojanovic, N.
Peruško, Davor
Timotijević, B.
Toprek, Dragan
Kovač, Janez
Dražić, Goran
Jeynes, C.
Članak u časopisu
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Interactions induced in Al/Ti multilayers by implantation of Ar ions at room temperature were investgated. Initial structures consisted of (Al/Ti) x 5 multilayers deposited by d.c. ion sputtering on Si(1 0 0) wafers, to a total thickness of similar to 250 nm. They were irradiated with 200 keV Ar+ ions, to the fluences from 5 x 10(15) to 4 x 10(16) ions/cm(2). It was found that ion irradiation induced a progressed intermixing of the multilayer constituents and Al-Ti nanoalloying for the highest applied fluence. The resulting nanocrystalline structure had a graded composition with non-reacted or interdiffused Al and Ti, and gamma-AlTi and AlTi3 intermetallic phases. Most intense reactivity was observed around mid depth of the multilayers, where most energy was deposited by the impact ions. It is presumed that Al-Ti chemical reaction is triggered by thermal spikes and further enhanced by chemical driving forces. The applied processing can be interesting for fabrication of tightly bond mul...tilayered structures with gradual changes of their composition and properties. (C) 2011 Elsevier B. V. All rights reserved.
Ključne reči:
Al/Ti multilayers / Ion irradiation / Nanoalloying / Intermetallic phasesIzvor:
Applied Surface Science, 2012, 258, 6, 2043-2046Finansiranje / projekti:
- SPIRIT - Support of Public and Industrial Research using Ion Beam Technology (EU-FP7-227012)
- Fizički procesi u sintezi novih nanostrukturnih materijala (RS-MESTD-Basic Research (BR or ON)-171023)
- Slovenian Research Agency [P2-0082]
DOI: 10.1016/j.apsusc.2011.04.107
ISSN: 0169-4332
WoS: 000298670300031
Scopus: 2-s2.0-80051843701
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Milosavljević, Momir AU - Stojanovic, N. AU - Peruško, Davor AU - Timotijević, B. AU - Toprek, Dragan AU - Kovač, Janez AU - Dražić, Goran AU - Jeynes, C. PY - 2012 UR - https://vinar.vin.bg.ac.rs/handle/123456789/4631 AB - Interactions induced in Al/Ti multilayers by implantation of Ar ions at room temperature were investgated. Initial structures consisted of (Al/Ti) x 5 multilayers deposited by d.c. ion sputtering on Si(1 0 0) wafers, to a total thickness of similar to 250 nm. They were irradiated with 200 keV Ar+ ions, to the fluences from 5 x 10(15) to 4 x 10(16) ions/cm(2). It was found that ion irradiation induced a progressed intermixing of the multilayer constituents and Al-Ti nanoalloying for the highest applied fluence. The resulting nanocrystalline structure had a graded composition with non-reacted or interdiffused Al and Ti, and gamma-AlTi and AlTi3 intermetallic phases. Most intense reactivity was observed around mid depth of the multilayers, where most energy was deposited by the impact ions. It is presumed that Al-Ti chemical reaction is triggered by thermal spikes and further enhanced by chemical driving forces. The applied processing can be interesting for fabrication of tightly bond multilayered structures with gradual changes of their composition and properties. (C) 2011 Elsevier B. V. All rights reserved. T2 - Applied Surface Science T1 - Ion irradiation induced Al-Ti interaction in nano-scaled Al/Ti multilayers VL - 258 IS - 6 SP - 2043 EP - 2046 DO - 10.1016/j.apsusc.2011.04.107 ER -
@article{ author = "Milosavljević, Momir and Stojanovic, N. and Peruško, Davor and Timotijević, B. and Toprek, Dragan and Kovač, Janez and Dražić, Goran and Jeynes, C.", year = "2012", abstract = "Interactions induced in Al/Ti multilayers by implantation of Ar ions at room temperature were investgated. Initial structures consisted of (Al/Ti) x 5 multilayers deposited by d.c. ion sputtering on Si(1 0 0) wafers, to a total thickness of similar to 250 nm. They were irradiated with 200 keV Ar+ ions, to the fluences from 5 x 10(15) to 4 x 10(16) ions/cm(2). It was found that ion irradiation induced a progressed intermixing of the multilayer constituents and Al-Ti nanoalloying for the highest applied fluence. The resulting nanocrystalline structure had a graded composition with non-reacted or interdiffused Al and Ti, and gamma-AlTi and AlTi3 intermetallic phases. Most intense reactivity was observed around mid depth of the multilayers, where most energy was deposited by the impact ions. It is presumed that Al-Ti chemical reaction is triggered by thermal spikes and further enhanced by chemical driving forces. The applied processing can be interesting for fabrication of tightly bond multilayered structures with gradual changes of their composition and properties. (C) 2011 Elsevier B. V. All rights reserved.", journal = "Applied Surface Science", title = "Ion irradiation induced Al-Ti interaction in nano-scaled Al/Ti multilayers", volume = "258", number = "6", pages = "2043-2046", doi = "10.1016/j.apsusc.2011.04.107" }
Milosavljević, M., Stojanovic, N., Peruško, D., Timotijević, B., Toprek, D., Kovač, J., Dražić, G.,& Jeynes, C.. (2012). Ion irradiation induced Al-Ti interaction in nano-scaled Al/Ti multilayers. in Applied Surface Science, 258(6), 2043-2046. https://doi.org/10.1016/j.apsusc.2011.04.107
Milosavljević M, Stojanovic N, Peruško D, Timotijević B, Toprek D, Kovač J, Dražić G, Jeynes C. Ion irradiation induced Al-Ti interaction in nano-scaled Al/Ti multilayers. in Applied Surface Science. 2012;258(6):2043-2046. doi:10.1016/j.apsusc.2011.04.107 .
Milosavljević, Momir, Stojanovic, N., Peruško, Davor, Timotijević, B., Toprek, Dragan, Kovač, Janez, Dražić, Goran, Jeynes, C., "Ion irradiation induced Al-Ti interaction in nano-scaled Al/Ti multilayers" in Applied Surface Science, 258, no. 6 (2012):2043-2046, https://doi.org/10.1016/j.apsusc.2011.04.107 . .