Picosecond laser ablation of nano-sized WTi thin film
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Аутори
Petrović, Suzana![](/themes/MirageVinar/images/orcid.png)
Gaković, Biljana M.
![](/themes/MirageVinar/images/orcid.png)
Peruško, Davor
![](/themes/MirageVinar/images/orcid.png)
Desai, T.
Batani, Dimitri
Čekada, Miha
Radak, Bojan
![](/themes/MirageVinar/images/orcid.png)
Trtica, Milan
![](/themes/MirageVinar/images/orcid.png)
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Interaction of an Nd:YAG laser, operating at 532 nm wavelength and pulse duration of 40 ps, with tungsten-titanium (WTi) thin film (thickness, 190 nm) deposited on single silicon (100) substrate was studied. Laser fluences of 10.5 and 13.4 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The energy absorbed from the Nd:YAG laser beam is partially converted to thermal energy, which generates a series of effects, such as melting, vaporization of the molten material, shock waves, etc. The following WTi/silicon surface morphological changes were observed: (i) ablation of the thin film during the first laser pulse. The boundary of damage area was relatively sharp after action of one pulse whereas it was quite diffuse after irradiation with more than 10 pulses; (ii) appearance of some nano-structures (e.g., nano-ripples) in the irradiated region; (iii) appearance of the micro-cracking. The process of the laser interaction with WTi/silicon target was acco...mpanied by formation of plasma.
Извор:
Laser Physics, 2009, 19, 8, 1844-1849Финансирање / пројекти:
- Спектроскопска и ласерска истраживања површина, плазме и животне средине (RS-MESTD-MPN2006-2010-142065)
DOI: 10.1134/S1054660X09150353
ISSN: 1054-660X
WoS: 000269012800053
Scopus: 2-s2.0-68949217645
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VinčaTY - JOUR AU - Petrović, Suzana AU - Gaković, Biljana M. AU - Peruško, Davor AU - Desai, T. AU - Batani, Dimitri AU - Čekada, Miha AU - Radak, Bojan AU - Trtica, Milan PY - 2009 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3773 AB - Interaction of an Nd:YAG laser, operating at 532 nm wavelength and pulse duration of 40 ps, with tungsten-titanium (WTi) thin film (thickness, 190 nm) deposited on single silicon (100) substrate was studied. Laser fluences of 10.5 and 13.4 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The energy absorbed from the Nd:YAG laser beam is partially converted to thermal energy, which generates a series of effects, such as melting, vaporization of the molten material, shock waves, etc. The following WTi/silicon surface morphological changes were observed: (i) ablation of the thin film during the first laser pulse. The boundary of damage area was relatively sharp after action of one pulse whereas it was quite diffuse after irradiation with more than 10 pulses; (ii) appearance of some nano-structures (e.g., nano-ripples) in the irradiated region; (iii) appearance of the micro-cracking. The process of the laser interaction with WTi/silicon target was accompanied by formation of plasma. T2 - Laser Physics T1 - Picosecond laser ablation of nano-sized WTi thin film VL - 19 IS - 8 SP - 1844 EP - 1849 DO - 10.1134/S1054660X09150353 ER -
@article{ author = "Petrović, Suzana and Gaković, Biljana M. and Peruško, Davor and Desai, T. and Batani, Dimitri and Čekada, Miha and Radak, Bojan and Trtica, Milan", year = "2009", abstract = "Interaction of an Nd:YAG laser, operating at 532 nm wavelength and pulse duration of 40 ps, with tungsten-titanium (WTi) thin film (thickness, 190 nm) deposited on single silicon (100) substrate was studied. Laser fluences of 10.5 and 13.4 J/cm(2) were found to be sufficient for modification of the WTi/silicon target system. The energy absorbed from the Nd:YAG laser beam is partially converted to thermal energy, which generates a series of effects, such as melting, vaporization of the molten material, shock waves, etc. The following WTi/silicon surface morphological changes were observed: (i) ablation of the thin film during the first laser pulse. The boundary of damage area was relatively sharp after action of one pulse whereas it was quite diffuse after irradiation with more than 10 pulses; (ii) appearance of some nano-structures (e.g., nano-ripples) in the irradiated region; (iii) appearance of the micro-cracking. The process of the laser interaction with WTi/silicon target was accompanied by formation of plasma.", journal = "Laser Physics", title = "Picosecond laser ablation of nano-sized WTi thin film", volume = "19", number = "8", pages = "1844-1849", doi = "10.1134/S1054660X09150353" }
Petrović, S., Gaković, B. M., Peruško, D., Desai, T., Batani, D., Čekada, M., Radak, B.,& Trtica, M.. (2009). Picosecond laser ablation of nano-sized WTi thin film. in Laser Physics, 19(8), 1844-1849. https://doi.org/10.1134/S1054660X09150353
Petrović S, Gaković BM, Peruško D, Desai T, Batani D, Čekada M, Radak B, Trtica M. Picosecond laser ablation of nano-sized WTi thin film. in Laser Physics. 2009;19(8):1844-1849. doi:10.1134/S1054660X09150353 .
Petrović, Suzana, Gaković, Biljana M., Peruško, Davor, Desai, T., Batani, Dimitri, Čekada, Miha, Radak, Bojan, Trtica, Milan, "Picosecond laser ablation of nano-sized WTi thin film" in Laser Physics, 19, no. 8 (2009):1844-1849, https://doi.org/10.1134/S1054660X09150353 . .