Diamond coating deposition by synergy of thermal and laser methods - A problem revisited
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Diamond coatings were deposited by synergy of the hot filament CVD method and the pulse TEA CO2 laser, in spectroactive and spectroinactive diamond precursor atmospheres. Resulting diamond coatings are interpreted relying on evidence of scanning electron microscopy as well as microRaman spectroscopy. Thermal synergy component (hot filament) possesses an activating agent for diamond deposition, and contributes significantly to quality and extent of diamond deposition. Laser synergy component comprises a solid surface modification as well as the spectroactive gaseous atmosphere modification. Surface modification consists in changes of the diamond coating being deposited and, at the same time, in changes of the substrate surface structure. Laser modification of the spectroactive diamond precursor atmosphere means specific consumption of the precursor, which enables to skip the deposition on a defined substrate location. The resulting process of diamond coating elimination from certain, de...sired locations using the CO2 laser might contribute to tailoring diamond coatings for particular applications. Additionally, the substrate laser modification could be optimized by choice of a proper spectroactive precursor concentration, or by a laser radiation multiple pass through an absorbing medium. (c) 2006 Elsevier B.V. All rights reserved.
Кључне речи:diamond coating / hot filament / CO2-laser / chemical vapour deposition / laser and hot filament synergy / deposition tailoring
Извор:Applied Surface Science, 2007, 253, 12, 5233-5239
ISSN: 0169-4332 (print); 1873-5584 (electronic)