Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique
Нема приказа
Аутори
Djulgerova, R.Popova, L.
Beshkov, G.
Petrović, Z. Lju
Rakočević, Zlatko Lj.
Mihailov, V.
Gencheva, V.
Dohnalik, T.
Чланак у часопису
Метаподаци
Приказ свих података о документуАпстракт
By means of hollow cathode spectroscopy and atomic force microscopy the surface morphology and composition of SnO2 thin film, modified with hexamethyldisilazane after rapid thermal annealing treatment (800-1200 degrees C), are investigated. Formation of crystalline structure is suggested at lower temperatures. Depolimerization, destruction and dehydration are developed at temperatures of 1200 degrees C. It is shown that the rapid thermal annealing treatment could modify both the surface morphology and the composition of the layer, thus changing the adsorption ability of the sensing layer. The results confirm the ability of hollow cathode emission spectroscopy for depth profiling of new materials especially combined with standard techniques.
Извор:
Journal of Physics. D: Applied Physics, 2006, 39, 15, 3267-3271
DOI: 10.1088/0022-3727/39/15/008
ISSN: 0022-3727
WoS: 000239578800022
Scopus: 2-s2.0-33746419167
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Институција/група
VinčaTY - JOUR AU - Djulgerova, R. AU - Popova, L. AU - Beshkov, G. AU - Petrović, Z. Lju AU - Rakočević, Zlatko Lj. AU - Mihailov, V. AU - Gencheva, V. AU - Dohnalik, T. PY - 2006 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3057 AB - By means of hollow cathode spectroscopy and atomic force microscopy the surface morphology and composition of SnO2 thin film, modified with hexamethyldisilazane after rapid thermal annealing treatment (800-1200 degrees C), are investigated. Formation of crystalline structure is suggested at lower temperatures. Depolimerization, destruction and dehydration are developed at temperatures of 1200 degrees C. It is shown that the rapid thermal annealing treatment could modify both the surface morphology and the composition of the layer, thus changing the adsorption ability of the sensing layer. The results confirm the ability of hollow cathode emission spectroscopy for depth profiling of new materials especially combined with standard techniques. T2 - Journal of Physics. D: Applied Physics T1 - Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique VL - 39 IS - 15 SP - 3267 EP - 3271 DO - 10.1088/0022-3727/39/15/008 ER -
@article{ author = "Djulgerova, R. and Popova, L. and Beshkov, G. and Petrović, Z. Lju and Rakočević, Zlatko Lj. and Mihailov, V. and Gencheva, V. and Dohnalik, T.", year = "2006", abstract = "By means of hollow cathode spectroscopy and atomic force microscopy the surface morphology and composition of SnO2 thin film, modified with hexamethyldisilazane after rapid thermal annealing treatment (800-1200 degrees C), are investigated. Formation of crystalline structure is suggested at lower temperatures. Depolimerization, destruction and dehydration are developed at temperatures of 1200 degrees C. It is shown that the rapid thermal annealing treatment could modify both the surface morphology and the composition of the layer, thus changing the adsorption ability of the sensing layer. The results confirm the ability of hollow cathode emission spectroscopy for depth profiling of new materials especially combined with standard techniques.", journal = "Journal of Physics. D: Applied Physics", title = "Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique", volume = "39", number = "15", pages = "3267-3271", doi = "10.1088/0022-3727/39/15/008" }
Djulgerova, R., Popova, L., Beshkov, G., Petrović, Z. L., Rakočević, Z. Lj., Mihailov, V., Gencheva, V.,& Dohnalik, T.. (2006). Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique. in Journal of Physics. D: Applied Physics, 39(15), 3267-3271. https://doi.org/10.1088/0022-3727/39/15/008
Djulgerova R, Popova L, Beshkov G, Petrović ZL, Rakočević ZL, Mihailov V, Gencheva V, Dohnalik T. Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique. in Journal of Physics. D: Applied Physics. 2006;39(15):3267-3271. doi:10.1088/0022-3727/39/15/008 .
Djulgerova, R., Popova, L., Beshkov, G., Petrović, Z. Lju, Rakočević, Zlatko Lj., Mihailov, V., Gencheva, V., Dohnalik, T., "Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique" in Journal of Physics. D: Applied Physics, 39, no. 15 (2006):3267-3271, https://doi.org/10.1088/0022-3727/39/15/008 . .