Investigation of modified thin SnO2 layers treated by rapid thermal annealing by means of hollow cathode spectroscopy and AFM technique
Petrovic, Z. Lju
Rakočević, Zlatko Lj.
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By means of hollow cathode spectroscopy and atomic force microscopy the surface morphology and composition of SnO2 thin film, modified with hexamethyldisilazane after rapid thermal annealing treatment (800-1200 degrees C), are investigated. Formation of crystalline structure is suggested at lower temperatures. Depolimerization, destruction and dehydration are developed at temperatures of 1200 degrees C. It is shown that the rapid thermal annealing treatment could modify both the surface morphology and the composition of the layer, thus changing the adsorption ability of the sensing layer. The results confirm the ability of hollow cathode emission spectroscopy for depth profiling of new materials especially combined with standard techniques.
Извор:Journal of Physics. D: Applied Physics, 2006, 39, 15, 3267-3271
ISSN: 0022-3727 (print)