A novel procedure for elimination of the peak deviations in LEIS spectra influenced by the primary ion beam profile
Apstrakt
Quantitative surface composition analysis using low energy ion scattering (LEIS) can be obstructed by the deviations introduced by the primary beam profile and the analyzer optics. A novel procedure is presented for excluding these deviations in LEIS measurements. The LEIS spectra were calculated from the assumed energy distribution, primary beam profile and the analyzer optics. From the calculated energy spectra, the instrumental functions were determined as a deconvolution of the energy spectra and corresponding energy distributions. The obtained instrumental functions can be very well approximated by the Gaussian. It is convincingly shown that the energy distribution evaluation, by means of the deconvolution of the energy spectrum and the calculated instrumental function, significantly suppresses the problems of qualitative (the peak shift) and the quantitative (the peak intensity deviation) surface composition analysis due to the different geometric profiles of the primary ion beam.... The calculation method was then successfully applied for the analysis or the real experimental data that are not too noisy. (c) 2006 Elsevier B.V. All rights reserved.
Ključne reči:
low energy ion scattering / primary ion beam profile / instrumental function / deconvolutionIzvor:
Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2006, 246, 2, 463-470
DOI: 10.1016/j.nimb.2006.01.015
ISSN: 0168-583X
WoS: 000237677900026
Scopus: 2-s2.0-33646090401
Kolekcije
Institucija/grupa
VinčaTY - JOUR AU - Bundaleski, Nenad AU - Ristić, Zoran AU - Radović, Milan PY - 2006 UR - https://vinar.vin.bg.ac.rs/handle/123456789/3022 AB - Quantitative surface composition analysis using low energy ion scattering (LEIS) can be obstructed by the deviations introduced by the primary beam profile and the analyzer optics. A novel procedure is presented for excluding these deviations in LEIS measurements. The LEIS spectra were calculated from the assumed energy distribution, primary beam profile and the analyzer optics. From the calculated energy spectra, the instrumental functions were determined as a deconvolution of the energy spectra and corresponding energy distributions. The obtained instrumental functions can be very well approximated by the Gaussian. It is convincingly shown that the energy distribution evaluation, by means of the deconvolution of the energy spectrum and the calculated instrumental function, significantly suppresses the problems of qualitative (the peak shift) and the quantitative (the peak intensity deviation) surface composition analysis due to the different geometric profiles of the primary ion beam. The calculation method was then successfully applied for the analysis or the real experimental data that are not too noisy. (c) 2006 Elsevier B.V. All rights reserved. T2 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms T1 - A novel procedure for elimination of the peak deviations in LEIS spectra influenced by the primary ion beam profile VL - 246 IS - 2 SP - 463 EP - 470 DO - 10.1016/j.nimb.2006.01.015 ER -
@article{ author = "Bundaleski, Nenad and Ristić, Zoran and Radović, Milan", year = "2006", abstract = "Quantitative surface composition analysis using low energy ion scattering (LEIS) can be obstructed by the deviations introduced by the primary beam profile and the analyzer optics. A novel procedure is presented for excluding these deviations in LEIS measurements. The LEIS spectra were calculated from the assumed energy distribution, primary beam profile and the analyzer optics. From the calculated energy spectra, the instrumental functions were determined as a deconvolution of the energy spectra and corresponding energy distributions. The obtained instrumental functions can be very well approximated by the Gaussian. It is convincingly shown that the energy distribution evaluation, by means of the deconvolution of the energy spectrum and the calculated instrumental function, significantly suppresses the problems of qualitative (the peak shift) and the quantitative (the peak intensity deviation) surface composition analysis due to the different geometric profiles of the primary ion beam. The calculation method was then successfully applied for the analysis or the real experimental data that are not too noisy. (c) 2006 Elsevier B.V. All rights reserved.", journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms", title = "A novel procedure for elimination of the peak deviations in LEIS spectra influenced by the primary ion beam profile", volume = "246", number = "2", pages = "463-470", doi = "10.1016/j.nimb.2006.01.015" }
Bundaleski, N., Ristić, Z.,& Radović, M.. (2006). A novel procedure for elimination of the peak deviations in LEIS spectra influenced by the primary ion beam profile. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 246(2), 463-470. https://doi.org/10.1016/j.nimb.2006.01.015
Bundaleski N, Ristić Z, Radović M. A novel procedure for elimination of the peak deviations in LEIS spectra influenced by the primary ion beam profile. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2006;246(2):463-470. doi:10.1016/j.nimb.2006.01.015 .
Bundaleski, Nenad, Ristić, Zoran, Radović, Milan, "A novel procedure for elimination of the peak deviations in LEIS spectra influenced by the primary ion beam profile" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 246, no. 2 (2006):463-470, https://doi.org/10.1016/j.nimb.2006.01.015 . .