Influence of the primary ion beam profile and the energy analyzer optics to the LEIS spectra: the analytical study
Abstract
The quantitative surface composition analysis with low energy ion scattering (LEIS), which is the experimental technique with the information depth that can be restricted to the first atomic layer, is often obstructed by the experimental problems. A novel approach is presented in order to calculate the influence of the optics of the energy analyzer and the geometric primary ion beam profile to the position, the width and the intensity of peaks in LEIS spectra. The developed method is applied for the analysis of our LEIS experimental system. The obtained results are compared to simple analytical models. The results obtained for our experimental device show that the deviations are not significant, indicating that the experimental system is convenient for performing refined surface composition analysis. (c) 2005 Published by Elsevier B.V.
Keywords:
low energy ion scattering / primary ion beam profile / energy analyzerSource:
Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 2005, 237, 3-4, 613-622
DOI: 10.1016/j.nimb.2005.03.009
ISSN: 0168-583X
WoS: 000231777800014
Scopus: 2-s2.0-33646082155
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Institution/Community
VinčaTY - JOUR AU - Bundaleski, Nenad AU - Ristić, Zoran AU - Radović, Milan AU - Rakočević, Zlatko Lj. PY - 2005 UR - https://vinar.vin.bg.ac.rs/handle/123456789/2926 AB - The quantitative surface composition analysis with low energy ion scattering (LEIS), which is the experimental technique with the information depth that can be restricted to the first atomic layer, is often obstructed by the experimental problems. A novel approach is presented in order to calculate the influence of the optics of the energy analyzer and the geometric primary ion beam profile to the position, the width and the intensity of peaks in LEIS spectra. The developed method is applied for the analysis of our LEIS experimental system. The obtained results are compared to simple analytical models. The results obtained for our experimental device show that the deviations are not significant, indicating that the experimental system is convenient for performing refined surface composition analysis. (c) 2005 Published by Elsevier B.V. T2 - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms T1 - Influence of the primary ion beam profile and the energy analyzer optics to the LEIS spectra: the analytical study VL - 237 IS - 3-4 SP - 613 EP - 622 DO - 10.1016/j.nimb.2005.03.009 ER -
@article{ author = "Bundaleski, Nenad and Ristić, Zoran and Radović, Milan and Rakočević, Zlatko Lj.", year = "2005", abstract = "The quantitative surface composition analysis with low energy ion scattering (LEIS), which is the experimental technique with the information depth that can be restricted to the first atomic layer, is often obstructed by the experimental problems. A novel approach is presented in order to calculate the influence of the optics of the energy analyzer and the geometric primary ion beam profile to the position, the width and the intensity of peaks in LEIS spectra. The developed method is applied for the analysis of our LEIS experimental system. The obtained results are compared to simple analytical models. The results obtained for our experimental device show that the deviations are not significant, indicating that the experimental system is convenient for performing refined surface composition analysis. (c) 2005 Published by Elsevier B.V.", journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms", title = "Influence of the primary ion beam profile and the energy analyzer optics to the LEIS spectra: the analytical study", volume = "237", number = "3-4", pages = "613-622", doi = "10.1016/j.nimb.2005.03.009" }
Bundaleski, N., Ristić, Z., Radović, M.,& Rakočević, Z. Lj.. (2005). Influence of the primary ion beam profile and the energy analyzer optics to the LEIS spectra: the analytical study. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 237(3-4), 613-622. https://doi.org/10.1016/j.nimb.2005.03.009
Bundaleski N, Ristić Z, Radović M, Rakočević ZL. Influence of the primary ion beam profile and the energy analyzer optics to the LEIS spectra: the analytical study. in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2005;237(3-4):613-622. doi:10.1016/j.nimb.2005.03.009 .
Bundaleski, Nenad, Ristić, Zoran, Radović, Milan, Rakočević, Zlatko Lj., "Influence of the primary ion beam profile and the energy analyzer optics to the LEIS spectra: the analytical study" in Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 237, no. 3-4 (2005):613-622, https://doi.org/10.1016/j.nimb.2005.03.009 . .