Pulsed TEA CO2 laser surface modifications of silicon
Апстракт
The interaction of a transversely excited atmospheric (TEA) CO, laser, pulse duration of about 2 mus (FWHM of initial spike = 120 ns), with p-type single crystalline silicon doped by boron, was studied. The results have shown that the silicon was surface modified by the laser beam of 12.0 J cm(-2) energy density. The energy absorbed from the CO, laser beam is converted partially into thermal energy, which generates a series of effects such as melting, vaporisation of molten material, shock waves, etc. Morphological manifestations on the silicon surface are: nonuniform modifications (central zone of interaction); wave-like periodical microstructure (inner periphery zone); hydrodynamical structure-like droplets (outer periphery zone). Wave-like microstructure consists of periodic parallel fringes with a period of about 0.8 mum. Formation of these wave-like microstructures is very complex. Explanation includes a consideration of the laser-induced periodic surface structure (LIPSS) effect.... The process of the CO2 laser interaction with silicon was not initially accompanied by plasma. Plasma, in the form of a spark, typically appeared after about 100 cumulated laser pulses. (C) 2002 Elsevier Science B.V. All rights reserved.
Кључне речи:
laser surface modification / silicon / laser-induced periodic microstructure / pulsed TEA carbon dioxide laserИзвор:
Applied Surface Science, 2003, 205, 1-4, 336-342
DOI: 10.1016/S0169-4332(02)01156-X
ISSN: 0169-4332
WoS: 000180675100042
Scopus: 2-s2.0-0037204393
Колекције
Институција/група
VinčaTY - JOUR AU - Trtica, Milan AU - Gaković, Biljana M. PY - 2003 UR - https://vinar.vin.bg.ac.rs/handle/123456789/2604 AB - The interaction of a transversely excited atmospheric (TEA) CO, laser, pulse duration of about 2 mus (FWHM of initial spike = 120 ns), with p-type single crystalline silicon doped by boron, was studied. The results have shown that the silicon was surface modified by the laser beam of 12.0 J cm(-2) energy density. The energy absorbed from the CO, laser beam is converted partially into thermal energy, which generates a series of effects such as melting, vaporisation of molten material, shock waves, etc. Morphological manifestations on the silicon surface are: nonuniform modifications (central zone of interaction); wave-like periodical microstructure (inner periphery zone); hydrodynamical structure-like droplets (outer periphery zone). Wave-like microstructure consists of periodic parallel fringes with a period of about 0.8 mum. Formation of these wave-like microstructures is very complex. Explanation includes a consideration of the laser-induced periodic surface structure (LIPSS) effect. The process of the CO2 laser interaction with silicon was not initially accompanied by plasma. Plasma, in the form of a spark, typically appeared after about 100 cumulated laser pulses. (C) 2002 Elsevier Science B.V. All rights reserved. T2 - Applied Surface Science T1 - Pulsed TEA CO2 laser surface modifications of silicon VL - 205 IS - 1-4 SP - 336 EP - 342 DO - 10.1016/S0169-4332(02)01156-X ER -
@article{ author = "Trtica, Milan and Gaković, Biljana M.", year = "2003", abstract = "The interaction of a transversely excited atmospheric (TEA) CO, laser, pulse duration of about 2 mus (FWHM of initial spike = 120 ns), with p-type single crystalline silicon doped by boron, was studied. The results have shown that the silicon was surface modified by the laser beam of 12.0 J cm(-2) energy density. The energy absorbed from the CO, laser beam is converted partially into thermal energy, which generates a series of effects such as melting, vaporisation of molten material, shock waves, etc. Morphological manifestations on the silicon surface are: nonuniform modifications (central zone of interaction); wave-like periodical microstructure (inner periphery zone); hydrodynamical structure-like droplets (outer periphery zone). Wave-like microstructure consists of periodic parallel fringes with a period of about 0.8 mum. Formation of these wave-like microstructures is very complex. Explanation includes a consideration of the laser-induced periodic surface structure (LIPSS) effect. The process of the CO2 laser interaction with silicon was not initially accompanied by plasma. Plasma, in the form of a spark, typically appeared after about 100 cumulated laser pulses. (C) 2002 Elsevier Science B.V. All rights reserved.", journal = "Applied Surface Science", title = "Pulsed TEA CO2 laser surface modifications of silicon", volume = "205", number = "1-4", pages = "336-342", doi = "10.1016/S0169-4332(02)01156-X" }
Trtica, M.,& Gaković, B. M.. (2003). Pulsed TEA CO2 laser surface modifications of silicon. in Applied Surface Science, 205(1-4), 336-342. https://doi.org/10.1016/S0169-4332(02)01156-X
Trtica M, Gaković BM. Pulsed TEA CO2 laser surface modifications of silicon. in Applied Surface Science. 2003;205(1-4):336-342. doi:10.1016/S0169-4332(02)01156-X .
Trtica, Milan, Gaković, Biljana M., "Pulsed TEA CO2 laser surface modifications of silicon" in Applied Surface Science, 205, no. 1-4 (2003):336-342, https://doi.org/10.1016/S0169-4332(02)01156-X . .