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dc.creatorKokkoris, Michael
dc.creatorKossionides, S
dc.creatorVlastou, R
dc.creatorAslanoglou, XA
dc.creatorGrotzschel, R
dc.creatorNsouli, B
dc.creatorKuznetsov, A
dc.creatorPetrović, Srđan M.
dc.creatorParadellis, T
dc.date.accessioned2018-03-01T19:02:28Z
dc.date.available2018-03-01T19:02:28Z
dc.date.issued2001
dc.identifier.issn0168-583X (print)
dc.identifier.urihttp://vinar.vin.bg.ac.rs/handle/123456789/2476
dc.description.abstractEnergy spectra of protons channeling along the (0001) axis of several SiC polytype crystals (namely 4H, 6H, 15R, 21R) in the energy region E-p = 1.7-2.5 MeV, in the backscattering geometry, were taken and analyzed. Computer simulations based on the assumption that the dechanneling of protons follows an exponential law are in very good agreement with the measured spectra. The obtained results for the two crucial channeling parameters, gimel, the mean channeling distance, and, alpha, the ratio of the stopping powers in the aligned and random mode are compared for the different structures and an attempt is made to explain the occurring similarities as well as the differences, in order to evaluate the use of SiC polytypes as substrates in implantations and thin film depositions. An attempt is also made to correlate the results from the present work to the ones obtained in the past for simpler crystallographic structures, namely Si(100) and Si(111), as well as more complex ones, such as SiO2 (c-axis). (C) 2001 Elsevier Science B.V. All rights reserved.en
dc.rightsrestrictedAccessen
dc.sourceNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atomsen
dc.subjectbackscatteringen
dc.subjectchannelingen
dc.subjectnuclear resonanceen
dc.subjectSiC crystalen
dc.subjectprotonsen
dc.subjectpolytypeen
dc.titleDetermination of parameters for channeling of protons in SiC polytype crystals in the backscattering geometryen
dc.typearticleen
dcterms.abstractКоккорис, М; Коссионидес, С; Властоу, Р; Aсланоглоу, XA; Гротзсцхел, Р; Нсоули, Б; Кузнетсов, A; Параделлис, Т; Петровић Срђан М.;
dc.citation.volume184
dc.citation.issue3
dc.citation.spage319
dc.citation.epage326
dc.identifier.wos000171929600003
dc.identifier.doi10.1016/S0168-583X(01)00727-3
dc.citation.rankM21
dc.identifier.scopus2-s2.0-0035498448


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