A multipurpose apparatus for studying the interaction of low energy ions with solid state surface
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A new concept of a multipurpose device for the investigation of a low energy in beam interactions with solid state surfaces is realized in an apparatus for surface analysis by means of low energy ion scattering (LEIS), direct recoil spectrometry (DRS), mass spectrometry of recoil ions (MRSI), and secondary-ion mass spectrometry (SIMS). This device provides broad alkali ion beams, homogeneous and much more intense than in standard commercial realizations available, as well as various high quality intense gas ion beams. A long tube with a magnetic quadrupole triplet is introduced. This construction disjoins the high vacuum from the ultrahigh vacuum (UHV) parts of the system and makes possible low cost differential pumping. The use of an UHV broad alkali ion beam in SIMS experiments should importantly decrease crater effect problems without use of rastering and electrical gating systems. In order to demonstrate the possibilities and the advantages of the proposed concept, we present the r...esults of experimental analysis of primary ion beam characteristics, as well as LEIS and DRS experimental results obtained by use of gas ion beams scattered from silver polycrystalline surfaces. This design concept results in a simple and low cost device with operating characteristics comparable to those of high quality devices of similar type. (C) 2000 American Institute of Physics. [S0034-6748(00)00812-1].
Извор:Review of Scientific Instruments, 2000, 71, 11, 4195-4200
ISSN: 0034-6748 (print)