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Optical properties of titanium oxide films obtained by cathodic arc plasma deposition

dc.creatorJokanović, Vukoman R.
dc.creatorČolović, Božana M.
dc.creatorTrajkovska Petkoska, Anka
dc.creatorMraković, Ana Đ.
dc.creatorJokanović, Bojan
dc.creatorNenadović, Miloš
dc.creatorFerrara, Manuela
dc.creatorNasov, Ilija
dc.date.accessioned2018-03-01T18:03:21Z
dc.date.available2018-03-01T18:03:21Z
dc.date.issued2017
dc.identifier.issn1009-0630
dc.identifier.urihttps://vinar.vin.bg.ac.rs/handle/123456789/1871
dc.description.abstractStructural and optical properties of nanometric titanium oxide (TixOy) films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fourier-transform infrared spectroscopy showed the presence of anatase, rutile, Ti2O3, Ti4O7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and 50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet-visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.en
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/172026/RS//
dc.relationCOST action [MP1306]
dc.rightsrestrictedAccessen
dc.sourcePlasma Science and Technologyen
dc.subjectoptical materialsen
dc.subjectplasma depositionen
dc.subjectthin filmsen
dc.subjectellipsometryen
dc.titleOptical properties of titanium oxide films obtained by cathodic arc plasma depositionen
dc.typearticleen
dc.rights.licenseARR
dcterms.abstractПеткоска, Aнка Трајковска; Јокановић Вукоман Р.; Јокановиц, Бојан; Чоловић Божана; Насов, Илија; Мраковић Aна; Феррара, Мануела; Ненадовић Милош;
dc.citation.volume19
dc.citation.issue12
dc.identifier.wos000418019400014
dc.identifier.doi10.1088/2058-6272/aa8806
dc.citation.otherArticle Number: UNSP 125504
dc.citation.rankM23
dc.type.versionpublishedVersion
dc.identifier.scopus2-s2.0-85033592975


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