Evolution of structural and optical properties of Ag implanted CrN thin films with annealing temperature
Само за регистроване кориснике
2017
Аутори
Novaković, Mirjana M.Popović, Maja
Schmidt, Emanuel O.
Schoeppe, P.
Mitrić, Miodrag
Bibić, Nataša M.
Ronning, Carsten
Rakočević, Zlatko Lj.
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
This study reports on the changes of the structural and optical properties occurring in CrN thin films upon Ag ion implantation. The films were grown by reactive sputtering on top of Si (100) wafers at a temperature of around 150 degrees C. Subsequently, the films were implanted with Ag ion fluences in the range of 0.5 x 10(16) ions/cm(2) -2 x 10(16) ions/cm(2) with energy of 200 keV. The structural and morphological changes, promoted by in-vacuum annealing of the as-implanted thin films at 200 degrees C, 400 degrees C and 700 degrees C, resulted in different optical responses of the CrN: Ag films due to the formation of Ag nanoparticles. The nanoparticles were inhomogenously distributed through the layer, which is related to the implantation distribution of silver in CrN. Apart from this, Ag nanoparticles with a size of 20-25 nm were formed at the surface of the layer. These structural properties are responsible for the formation of a broad optical absorption peak. This peak is locate...d at similar to 420 nm and can be associated with the plasmon resonance of Ag particles embedded in the CrN matrix. (C) 2017 Elsevier B.V. All rights reserved.
Кључне речи:
Ion implantation / CrN films / Ag nanoparticles / Spectroscopic ellipsometry / Surface plasmon resonanceИзвор:
Journal of Alloys and Compounds, 2017, 729, 671-678Финансирање / пројекти:
- Функционални, функционализовани и усавршени нано материјали (RS-45005)
- German-Serbian DAAD bilateral collaboration [451-03-01038/2015-09118/18]
DOI: 10.1016/j.jallcom.2017.09.180
ISSN: 0925-8388; 1873-4669
WoS: 000413555000081
Scopus: 2-s2.0-85029815485
Колекције
Институција/група
VinčaTY - JOUR AU - Novaković, Mirjana M. AU - Popović, Maja AU - Schmidt, Emanuel O. AU - Schoeppe, P. AU - Mitrić, Miodrag AU - Bibić, Nataša M. AU - Ronning, Carsten AU - Rakočević, Zlatko Lj. PY - 2017 UR - https://vinar.vin.bg.ac.rs/handle/123456789/1793 AB - This study reports on the changes of the structural and optical properties occurring in CrN thin films upon Ag ion implantation. The films were grown by reactive sputtering on top of Si (100) wafers at a temperature of around 150 degrees C. Subsequently, the films were implanted with Ag ion fluences in the range of 0.5 x 10(16) ions/cm(2) -2 x 10(16) ions/cm(2) with energy of 200 keV. The structural and morphological changes, promoted by in-vacuum annealing of the as-implanted thin films at 200 degrees C, 400 degrees C and 700 degrees C, resulted in different optical responses of the CrN: Ag films due to the formation of Ag nanoparticles. The nanoparticles were inhomogenously distributed through the layer, which is related to the implantation distribution of silver in CrN. Apart from this, Ag nanoparticles with a size of 20-25 nm were formed at the surface of the layer. These structural properties are responsible for the formation of a broad optical absorption peak. This peak is located at similar to 420 nm and can be associated with the plasmon resonance of Ag particles embedded in the CrN matrix. (C) 2017 Elsevier B.V. All rights reserved. T2 - Journal of Alloys and Compounds T1 - Evolution of structural and optical properties of Ag implanted CrN thin films with annealing temperature VL - 729 SP - 671 EP - 678 DO - 10.1016/j.jallcom.2017.09.180 ER -
@article{ author = "Novaković, Mirjana M. and Popović, Maja and Schmidt, Emanuel O. and Schoeppe, P. and Mitrić, Miodrag and Bibić, Nataša M. and Ronning, Carsten and Rakočević, Zlatko Lj.", year = "2017", abstract = "This study reports on the changes of the structural and optical properties occurring in CrN thin films upon Ag ion implantation. The films were grown by reactive sputtering on top of Si (100) wafers at a temperature of around 150 degrees C. Subsequently, the films were implanted with Ag ion fluences in the range of 0.5 x 10(16) ions/cm(2) -2 x 10(16) ions/cm(2) with energy of 200 keV. The structural and morphological changes, promoted by in-vacuum annealing of the as-implanted thin films at 200 degrees C, 400 degrees C and 700 degrees C, resulted in different optical responses of the CrN: Ag films due to the formation of Ag nanoparticles. The nanoparticles were inhomogenously distributed through the layer, which is related to the implantation distribution of silver in CrN. Apart from this, Ag nanoparticles with a size of 20-25 nm were formed at the surface of the layer. These structural properties are responsible for the formation of a broad optical absorption peak. This peak is located at similar to 420 nm and can be associated with the plasmon resonance of Ag particles embedded in the CrN matrix. (C) 2017 Elsevier B.V. All rights reserved.", journal = "Journal of Alloys and Compounds", title = "Evolution of structural and optical properties of Ag implanted CrN thin films with annealing temperature", volume = "729", pages = "671-678", doi = "10.1016/j.jallcom.2017.09.180" }
Novaković, M. M., Popović, M., Schmidt, E. O., Schoeppe, P., Mitrić, M., Bibić, N. M., Ronning, C.,& Rakočević, Z. Lj.. (2017). Evolution of structural and optical properties of Ag implanted CrN thin films with annealing temperature. in Journal of Alloys and Compounds, 729, 671-678. https://doi.org/10.1016/j.jallcom.2017.09.180
Novaković MM, Popović M, Schmidt EO, Schoeppe P, Mitrić M, Bibić NM, Ronning C, Rakočević ZL. Evolution of structural and optical properties of Ag implanted CrN thin films with annealing temperature. in Journal of Alloys and Compounds. 2017;729:671-678. doi:10.1016/j.jallcom.2017.09.180 .
Novaković, Mirjana M., Popović, Maja, Schmidt, Emanuel O., Schoeppe, P., Mitrić, Miodrag, Bibić, Nataša M., Ronning, Carsten, Rakočević, Zlatko Lj., "Evolution of structural and optical properties of Ag implanted CrN thin films with annealing temperature" in Journal of Alloys and Compounds, 729 (2017):671-678, https://doi.org/10.1016/j.jallcom.2017.09.180 . .